CL

to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1000 30 to 1000 30 to 1200 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 1/4 1/4 1/4 1/4 1/4 1/2 1/2 3/4 22 27 27 32 41 69 78 84 92 100 141.5 150 167 44 52 64 78 92 115 128 144 8 11 11 13 16 59 67 73 77 85 112.5 121 133 10 12 16 20 25 25 28 32 17 17 20 16 20 20 25 30 36 36 40 40 50 55 65 80 90 90 90 15 17 17 21 21 16

MGP

40 stroke 20 30 100 P=0.5MPa P=0.5MPa 200 80 100 25 10 20 50 50 40 Load weight m (kg) 3 4 5 16 40 20 30 32 12 2 Load weight m (kg) 1 25 20 10 0.3 0.4 0.5 5 4 16 12 3 0.2 2 0.1 10 100 50 200 40 30 20 1 Eccentric distance l (mm) 0.5 0.3 0.4 40 to 124 stroke 0.2 30 20 0.1 P=0.5MPa 10 100 50 20 30 40 200 25 20 10 Eccentric distance l (mm) Load weight m (kg) 2 3 4 5 16 12 Over 75 stroke 1 100

Possible to transfer a workpiece at low-speed.

Description 10 20 30 50 DSeal kit P523010-20 P523020-20 P523030-20 P523040-20 No. Description Qty. No. Description Qty. No. Description Qty. No.

CQS

12 16 5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 2.2-24 Series CQSlS 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45,

CM2

25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 0 0 1 6 6 6 7 12 3 3 4 9 0 0 0.5 5.5 5 5 6 11 3.5 3.5 4.5 9.5 1.5 1.5 2.5 7.5 D-B5 D-B6 D-B59W D-G5NTL D-B5 D-B6 D-C7 D-C8 D-C73C D-C80C D-C7/C8 D-H7l D-H7lW D-H7BAL D-H7lF D-C73C D-C80C D-H7C D-B59W D-A3lA D-G39A D-K39A D-A44A D-A3lA D-G39A D-K39A

MXS

(Unit: mm) A 2 2.5 4 5 5.5 10 B Model MXS 6 MXS 8 MXS12 MXS16 MXS20 MXS25 3 3.11-5 Air Slide Table Series MXS How to Order MXS 12 50 F9N S Air slide table Number of auto switches Bore size (Stroke mm) 2 1 n 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100

CNA

40 10 95 17 56.5 20 13 15 12 11 to 600 35 32 86 27 115 1/4 1/4 64 16 25 20 40 10 102 17 67 20 18 12 15 11 to 600 40 37 102 32 139 1/4 1/4 78 20 31.5 25 52 14 123 21 83 20 23 18 17 13 to 750 40 37 116 41 160 1/4 1/4 92 25 35.5 30 52 14 144 21 98 22 25 20 19 16 to 750 (mm) Bore (mm) 40 50 63 80 100 K J KA L MM N P Q H S T U V W Z ZZ RR 6 M8 X 1.25 14 30 M14 X 1.5 27 1/4 37 to 39.5 51 10 153

Series SV

pins) Common Common Common Common 20 26 19 25 SOL.

CJ2

(mm) Material: Iron A 15 15 CX 3.2 6.5 BA 12 18 GB 18 23 BB 12 18 H 20 20 CD(cd) 3.3 5 CA 14 20 KA 4.2 5.2 CB 14 20 MM M4 X 0.7 M5 X 0.8 NA 5.5 5.5 NB 22.5 27.5 R 5 8 U 8 10 Part No.

Base Mounted Metal Seal/Rubber Seal Series VQ

With lead wire ZS-20-A ZS-20-5A-50 0.6 m 3 m 5 m Nil 30 50 (The flow characteristics are for the supply pressure of 0.5 MPa.)

Copper-free Actuators

, 3) 20-CDQS Standard 2.2-2 20-CDQS Standard long stroke SCQSl 2.2-10 20-CDQSW Double rod 2.2-30 20-CDQSlS Anti-lateral load Air cylinder Series C(D)M2 20-CM2l Standard 1.4-3 20-CM2lA Standard with air cushion SCM2l 1.4-22 20-CM2W Double rod 1.4-50 20-CM2K Non-rotating rod 1.4-66 20-CM2R Direct mounting Air cylinder Series M(D)B 1.7-6 20-M(D)B Standard 20-M(D)BW Double rod SMB-l 1.7-16 20

0.4

or less Rubber seal 0.25 0.30 1.0 0.21 0.20 0.85 15 or less 34 or less VQ1200 13 or less Metal seal 0.18 0.25 0.72 0.16 0.15 0.70 10 or less 13 or less Double VQ1201 20 or less Rubber seal 0.25 0.30 1.0 0.21 0.20 0.85 15 or less 20 or less VQ1300 26 or less Metal seal 0.18 0.25 0.72 0.16 0.15 0.68 20 or less 40 or less Closed center VQ1301 33 or less Rubber seal 0.18 0.42 0.65 0.16 0.20

Series IDG

Outlet air atmospheric pressure dew point C P1 = 0.5MPa P1 = 0.5MPa 10 10 20 20 P1 = 0.7MPa P1 = 0.7MPa 30 30 40 40 0 40 80 120 160 20 40 60 80 0 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG20 IDG30 P1 = 0.3MPa P1 = 0.3MPa 0 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C P1 = 0.5MPa 10 P1 = 0.5MPa 10 P1 = 0.7MPa 20 20 P1

Microspeed Cylinder

25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20 25, 32 12, 16 20, 25 32, 40 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 20, 25 32, 40 50, 63 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Rubber

Electric Rotary Table

to 280 30 to 420 20 to 280 30 to 420 20 to 280 30 to 420 Step Motor (Servo/24 VDC) Pushing speed [/sec] 20 30 20 30 20 30 Max. angular acceleration/deceleration [/sec2] Note 2) 3,000 0.5 Backlash [] 0.05 Positioning repeatability [] Impact/Vibration resistance [m/s2] Note 4) 150/30 Actuation type Special worm gear + Belt drive Max. operating frequency [c.p.m] 60 Operating temp. range [C]

0.4

or less VQ1200 13 or less 10 or less 0.70 0.15 0.16 0.72 0.25 0.18 Metal seal 13 or less Double VQ1201 20 or less 15 or less 0.85 0.20 0.21 1.0 0.30 0.25 Rubber seal 20 or less VQ1300 40 or less 20 or less 0.68 0.15 0.16 0.72 0.25 0.18 Metal seal 26 or less Closed center VQ1301 47 or less 25 or less 0.70 0.20 0.16 0.65 0.42 0.18 Rubber seal 33 or less VQ1000 VQ1400 40 or less 20 or less

VDW Series

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 Thread type 1 2 10 20 Rc G NPT Nil F N Material Brass Stainless steel C S Type 30 OUT port size Stations VVCW20-4A Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 Type 10 is M5 only.

Tamper Proof and Flat Head Screw

In-line type AS1001F AS2001F AS2051F AS3001F AS4001F 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 Dual speed controller ASD230F ASD330F ASD430F ASD530F ASD530F ASD630F 6 to 20 20 to 32 20 to 40 20 to 40 40 to 63 63 to 100 M5 1/8 1/4 1/4 3/8 1/2 Applicable cylinder bore size (mm) Piping side port size Cylinder side port size Model AS1200 AS2200 AS3200 AS4200 M5 1 2 1/8 1/4 3/8 1/2 3/4 1 1

7ND9071en

The display starts to blink next position (50 % or 20 %).

CXT

15 10 2 pcs. 10 10 25 to 5 20 15 5 1 pc. 10 10 25 CXTl25 5 15 10 10 2 pcs. 10 15 20 CXTl 32 40 5 15 10 5 1 pc. 10 10 20 (mm) D-F7lW D-J79W D-F9BAL D-F7NT D-F79F Auto switch model D-A7l D-A8l D-A73C D-A80C D-A7lH D-A80H D-F7l D-J79 D-F7lV D-J79C Applicable model D-F7lWV D-A79W D-F7LF Number of mountings 2 pcs. 5 10 15 15 20 20 25 CXTl 32 40 1 pc. 5 5 10 15 15 20 25 3.8-10 Platform Cylinder