0.4

L8 = 16n + 118.5 100 Drawing shows a SC case.

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(mm ) . 100 125 150 I 50 75 100 125 150 75 ~ 50 I 75 50 100 125 150 107 40 70 B3 83 97 11 5 128 128 194 52 62 204 212 225 225 1 83 107 50 70 83 ! 97 115 128 I 128 52 62 204 19' 212 2.?

CQS

Thus, it can be used in a Class 100 clean room.

XL

.: 120C [248F]) Uniform baking temperature Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. 3, 4, 5 3 120 120 Comparison with KF25 flange 100 100 Body 1 4 Temperature (C) Body 2 80 5 2 Temperature (C) Body 3 1 1, 2 Bellows 60 30 0 60 30 0 Time (minutes) Time (minutes) Valve F=(1.8xC

Adsorption Plate

Adsorption surface size 9 SP1130 SP1230 50 x 50 80 110 20 50 65 95 70 5 100 x 100 130 160 20 100 115 145 95 A D Rc 1/8 (Suction port) C F F B D G E E 8 x 5.5 drill Element fixing nut N pcs. 9.5 depth of counter bore 7 (mounting hole) A B C D E F G N Part no.

2-Color Display

Switch 100 kPa 0 100 kPa 500 kPa 1 MPa Pressure range For vacuum pressure ZSE30A 0 101 kPa 105 kPa 10 kPa For compound pressure 100 kPa 100 kPa ZSE30AF 105 kPa 105 kPa For positive pressure 100 kPa 1 MPa ISE30A 105 kPa (0.105 MPa) 1.05 MPa Rated pressure range of switch Set pressure range of switch Back page 2 These safety instructions are intended to prevent hazardous situations and/or equipment

0.4

When mounting elbow fitting assembly (VVQ1000-FL) on the edge of manifold station, select a silencer, AN15-C08.

LX Series Compact Electric Actuators

Model N E F LXFHSB _ 25 1 5 1 160 138 60 30 (50) LXFHSB _ 50 176 145 90 60 (50) LXFHSB _. 75 6 201 210 188 90 60 100 LXFHsB _ 100 6 226 235 213 90 60 100 tlsclriD lclltolo 0inffsifls . $lid8 $crul{ Tyfr LXFHSSfI EE r4iil & *l t30omm) Thread I Deep [ ] shows lhe location at which origin poinl switch operales.

9.8

Pressure range Switch 100 kPa 0 100 kPa 500 kPa 1 MPa For vacuum pressure ZSE10 0 101 kPa 105 kPa 10 kPa For compound pressure 100 kPa 100 kPa ZSE10F 105 kPa 105 kPa For positive pressure 100 kPa 1 MPa ISE10 105 kPa (0.105 MPa) 1.05 MPa Rated pressure range of switch Set pressure range of switch Back page 4 Revision history Acquisition of UL standards.

Tamper Proof and Flat Head Screw

Applicable cylinder bore size (mm) Metric sizes (mm) Inch sizes (inches) Cylinder side port size Elbow type Model AS121F AS221F AS321F AS421F 3/16 1/4 5/16 3.2 4 6 8 10 12 6 to 20 20 to 40 40 to 63 63 to 100 1/8 5/32 3/8 1/2 M5 1/8, 1/4 1/4, 3/8 1/2 Universal type AS131F AS231F AS331F AS431F 6 to 20 20 to 40 40 to 63 63 to 100 M5 1/8, 1/4 1/4, 3/8 1/2 Speed controller with One-touch fitting

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~me~~'U~ rl ~a~ca"--L_ ___'~O~O '--__-r_ -c~-c~c-~__ r -D-A30 ti I Different surfaces 35 + 30~n _ 2) 110 + 3O(n 2) DG39 ~ 1" =2.4. 6.8"-) D-K39 ~ Same surface 100 + 1oo(n _ 2) 110 + 100{n 2) 1-"->-"-==::---+-,,;---+-_--"'1 "-= = -= 27 .4"',6"'."

Microspeed Cylinder

The chamber is set up on a Class 100 clean bench.

Digital Gap Checker ( compatible)

to 51) (50 to 26) value ISA3-H X+150 X+100 X+50 X (50 to 0) 50 (200 to 151) (150 to 101) (100 to 51) ISA3-F ISA3-G X+750 Process X+500 X+250 X (250 to 0) 250 (1000 to 751) (750 to 501) (500 to 251) data ISA3-H : The value in the brackets in level 2 shows the boundary value. -66No.PS-OMW0009-C 4 How to use X: Switch point is divided by weight.

Air Cylinder CLA Series Fine Lock Model

fl 110+559120+559 Differenl 1 5 90 100 1 1 0 Same 90 100 1 1 0 Ditterent 15+5d!

Refrigerated Air Dryer

) 71 (120) Outlet air pressure dew point IDF IDU 45F (7.2C) 11 (19) 16 (27) 26 (45) 43 (74) 62 (106) 80 (136) Outlet air pressure dew point SCFM Note 1, 2) (m3/h (ANR)) 50F (10C) 12 (20) 17 (28) 28 (47) 45 (77) 65 (110) 86 (147) Outlet air pressure dew point IDFA psi (MPa) Operating pressure 100 (0.7) F (C) Inlet air temperature 100 (37.8) IDFB IDFB F (C) Ambient temperature 100 (37.8) Single-phase

CXT

Long stroke (mm) Slide bearing Standard stroke Long stroke Ball bushing bearing Standard stroke Long stroke X Y Z Bore size (mm) Stroke range (mm) SCXT Tube bore size A, #1(#1+#3) SCXT Tube bore size B, #1(#1+#3) 12 50, 75, 100 32 7.5 7.5 16 50, 75, 100 32 7.5 7.5 SCXT Tube bore size A, #2(#2+#3) SCXT Tube bore size B, #2(#2+#3) 20 75, 100, 125, 150, 175, 200 41 9 9 25 75, 100, 125, 150,

MGZ Series

300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

2-Apr-01 Quick Reference Auto Switch Chart with (PnP) M-8 (3 pin) & M-12 (4 pin) Connectors, Page 1/2 32, 40, 50, 63, 80 & 100 Bore sizes (Auto Switch Spacer # BMP1-032 required) 32, 40, 50, 63, 80, 100, 125 & 200 Gripper Bore sizes (sizes depend on seri

Bore) -F5PSDPC NCDA1 Tie Rod Mounting NBT-150 (1.5" Bore) NBT-200 (2" & 2.5" Bore) NBT-325 (3.25" & 4" Bore) "SC" auto switch CDQ2/NCDQ Direct Body Mount BQ-2 (32/40/50/63/80/100 Bore) Screw & Nut Kit included with cylinder "SC" auto switch CDRA1 Rail Mounting P294020-24 Screw & Nut Kit for 2 Auto Switches (50/63/80/100 Bore) -F7PSAPC -F7PSC CD85-A Rail Mounting BQ-1 (8/10/12/16/20/25 Bore

Digital Flow Switch

) [100] 100 L/min (PFMB7202) [F 3] [rES] [rES] Response time [1.00] 1 second page 41 [F10] [FLo] [FLo] Display mode [inS] Display instantaneous flow page 42 [F13] [rEv] [rEv] Reversed display mode [oFF] Not reversed page 43 [F20] [inP] [inP] External input 3 [rAC] Accumulated flow external reset page 44 [F22] [FrE] [FrE] Setting of analogue output 4 [oFF] Variable range OFF page 45 [

Copper-free Actuators

6, 8, 10, 12, 15, 16, 20, 25, 32, 40, 50, 63, 80, 100, 125, 140, 160 Copper-free Actuators SMC Actuator How to Use This List qRefer to the list below for copper-free products or standard products for each series. tName of CAD file CAD system has file name for using SMC electronic catalog. Refer to p.0-36 to 0-37 for detailed information.