JCRB-OM00003

is chrome molybdenum steel for sizes 30 and 40.

100

30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 200 180 160 140 120 100 80 60 40 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 200 180 160 140 120 100 80 60 40 20 0 Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Vacuum pressure Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] Suction flow rate Suction flow rate Air

90

Vacuum pressure 60 Suction flow (Silencer exhaust) 40 Air consumption 20 Port exhaust Silencer exhaust 0 0 10 20 30 40 Suction flow [L/min (ANR)] ZK210 Flow-rate Characteristics Exhaust Characteristics 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure [MPa] 0 10 20 30 40 50 60 70 80 90 100 100 Vacuum pressure [kPa] Vacuum pressure [kPa] 80 Suction flow (Port exhaust

Rubber seal 5 Port Solenoid Valve Series SYJ5000

-L-01 3 4 5 M plug connector (M): SYJ5 40-M-01 3 4 5 DIN terminal (D): SYJ5 40-D-01 3 4 5 M8 connector (W0): SYJ5 40-W0-01 3 4 5 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 82.9 Max. 10 75.4 50.1 [57.1] 64.1 34.7 49 M8 x 1 54.6 37.1 61.2 [68.2] Approx. 300 (Lead wire length) 6 Pg7 6 6 6 65.8 103.4 [107.8] 59.3 123 [127.4] 45.5 45.5 45.5 45.5 18.1 43.3 17 17 17 17 17 17 17

SMC Electronic Switch Series Variations

The load current range for a PS1000 and PS1100 is between 5[mA] to 40[mA]. If 40[mA] is exceeded the output transistor could be damaged. The leakage current of these switches is 1[mA].

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock absorber

Rubber seal 5 Port Solenoid Valve Series SYJ7000

-L3 4 5 01 02 M plug connector (M): SYJ7 40-M3 4 5 01 02 DIN terminal (D): SYJ7 40-D3 4 5 01 02 M8 connector (W0): SYJ7 40-W03 4 5 01 02 Applicable cable O.D. 3.5 to 7 141.8 [146.2] Approx. 300 (Lead wire length) 91 57.5 [64.5] 83.5 42.1 72.2 M8 x 1 Pg7 57.1 62 (Lead wire length) Approx. 300 44.5 68.6 [75.6] 20 20 20 20 87.6 37.6 122.2 [126.6] 81.1 31.1 22 22 22 22 65.1 15.1 161.8 63 63 63

ZQ-OM01401

-40 10 -20 -20 5 0 0 0 0.2 0.3 0.4 0.5 0 1 2 3 4 5 6 [MPa] [L/min (AMR) ] ZQ07A 0.43MPa -100 40 -100 35 -80 [L/min (AMR) ] -80 [L/min (AMR) ] 30 [kPa] [kPa] -60 25 -60 20 -40 -40 15 10 -20 -20 5 0 0 0 0 2 4 6 8 10 12 0.2 0.3 0.4 0.5 [MPa] [L/min (AMR) ] ZQ10A 0.43MPa -100 70 -100 60 -80 [L/min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 50 -60 -60 40 -40 30 -40 20 -20 -20 10 0 0 0

Compact Vacuum Unit

/ZB041 Exhaust Characteristics Flow-rate Characteristics (Supply pressure: 51 psi (0.35 MPa)) 0.53 14.5 14.5 (15) (100) (100) Vacuum pressure psi (kPa) Vacuum pressure psi (kPa) 0.42 11.6 11.6 (12) (80) (80) Air consumption Vacuum pressure 0.32 8.7 8.7 (9) (60) (60) 0.21 5.8 5.8 (6) (40) (40) 0.11 2.9 2.9 (3) (20) (20) Suction flow 0 0 0 14.5 (0.1) 29 (0.2)43.5 (0.3) 58 (0.4)72.5 (0.5) 87

VZ5000

Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Adapter plate ARBZ5000-00-P Gasket Individual SUP Spacer Assembly Round head combination screw DXT199-35-1A ( ) With spring washer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Round head combination screw ( ) M3 x 47 With spring washer Gasket Individual SUP spacer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Before using, refer to page 3-3-8.

ZQ-OM01301

-40 10 Suction flow rate -20 -20 5 0 0 0 0.2 0.3 0.4 0.5 0 1 2 3 4 5 6 Supply pressure[MPa] Suction flow rate [L/min (AMR) ] ZQ07A Exhaust Characteristics Flow Rate Characteristics Supply pressure0.43MPa -100 40 -100 35 Air consumption [L/min (AMR) ] -80 Vacuum pressure [kPa] -80 Suction flow rate [L/min (AMR) ] Vacuum pressure [kPa] Vacuum pressure 30 -60 25 -60 Air consumption 20 -40 -

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Type 40/Type 41 How to Order SS3YJ7-40 -05 --01 Applicable solenoid valve SYJ714SYJ714MSYJ724SYJ724MApplicable blanking plate assembly SYJ700-10-2A R port 1/4 R port 1/8 P, R port thread type Manifold type Stations 40 41 Type 40 Type 41 Nil Rc G NPT NPTF 2 stations : 20 stations 02 : 20 F N T A A A A 01 1/8 A port size P port 1/8 P port 1/4 A port 1/8 Note) If there are more than 6 stations

VCL

Valve model Port size VCL2l VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3l VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCL4l VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 Mounting screws (for mounting bracket) are included

Microspeed Cylinder: Double Acting/Single Rod Series CM2X ø 20, ø 25, ø 32, ø 40 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

UZ Without auto switch L 40 150 CM2X With auto switch CDM2X C73 Number of auto switches L 40 150 2 pcs. 1 pc.

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 8

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Type 40 Applicable solenoid valve SYJ514-SYJ514M-SYJ524-SYJ524M-How to Order SS3YJ5--40-05 -M5 R port 1/8 P port 1/8 P, R port thread type Stations A port size 02 : 20 2 stations : 20 stations Applicable blanking plate assembly SYJ500-10-3A Nil A A Rc G NPT NPTF M5 01 M5 x 0.8 1/8 F N T A port M5 x 0.8, 1/8 Note) For more than 9 stations, supply air to both sides of P port and exhaust air

Manifold Specifications

Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Adapter plate ARBZ5000-00-P Gasket Individual SUP Spacer Assembly Round head combination screw DXT199-35-1A ( ) With spring washer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Round head combination screw ( ) M3 x 47 With spring washer Gasket Individual SUP spacer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Before using, refer to page 3-3-8.

Air cylinder

Table 1 Tightening torque (Unit: Nm) Foot Flange Clevis Trunnion B CG1*20 1.5 1.5 to 2.2 CG1*25 2.9 2.5 to 3.5 CG1*32 2.9 6.0 to 8.6 CG1*40 4.9 10.8 to 14.6 CG1*50 11.8 19 to 25 CG1*63 24.5 30 to 40 CG1*80 24.5 --CG1*100 42.2 --8)Do not hit or grasp the sliding parts of the cylinder tube and piston rod with other objects.

IR1000/2000/3000

30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 100 0 20 40 60 80 100 120 57.0 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV3000 IRV3000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 57.0 100 95 90 85 80 75 70 65 60 100 0 20 40 60 80 100 120 140 160 VAC

VCL

Valve model VCL2 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCL4 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 Mounting screws (for mounting bracket) are included