Series ZSE10(F)/ISE10 Digital Pressure Switch ®

Option ZS-39-5G ZS-39-B ZS-39-D ZS-39-R ZS-39-01 ZS-39-N1 ZS-39-N2 Lead wire with connector (with connector cover) (5 cores, 2 m) Panel mount adapter Panel mount adapter + Front protective cover DIN rail adapter Front protective cover R1/8 piping adapter NPT1/8 piping adapter Made to Order 1

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Grease pack GR-X-005 (5g) Caution 1. Be careful of the snap ring springing out.

2

Thread type Nil R N NPT G G Port size 01 1/8 02 1/4 03 3/8 04 1/2 INDEX 474 Series AS-FG Needle Valve/Flow-rate Characteristics AS1201FG-M5, AS1211FG-M5 AS1301FG-M5, AS1311FG-M5 AS2201FG-01, AS2211FG-01 AS2301FG-01, AS2311FG-01 AS2201FG-02, AS2211FG-02 AS2301FG-02, AS2311FG-02 600 300 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 01, 23, 03, 04, 06, 07 01, 23

CATALOG

K E O F F TA K EO F F T Y P E 1 "T" Type 4 "X" Type T H R E A D T Y P E Nil Rc(PT) N NPT P O R T S I Z E M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44

Table of Contents

13.7 35 7 61 78 8 39 23 13.7 35 7 61 B C D E F G H (Mounting hole) ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 57 12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24

ZP

G 3 x M3 x 8 H F G G E F Y E F Y E 4 3 4 34 18 40 C A B D C A B D C A B D Dimensions Dimensions Dimensions Model A B C D E F Model A B C D E F Model A B C D E F ZPX40HB-B8 ZPX40HB-B10 ZPX50HB-B8 ZPX50HB-B10 ZPX63HB-B10 ZPX63HB-B12 ZPX80HB-B10 ZPX80HB-B12 ZPX100HB-B10 ZPX100HB-B12 ZPX125HB-B10 ZPX125HB-B12 01 01 01 40 41 28 43 20.5 32 63 65 46 68 31.5 43 100 103 69 107 47.5 60.5 01 01 01 01

5-Port Solenoid Valve

SY5l3 0 1l-lll1-ll-Wl-V02l (Top ported) Plug F (Max. 3) For "F" marking (Thread type) 01> 26.8 14.5 4A X 2B PE F B A A 4 B 2 3EB 1P 5EA 1/8 (For threaded type) [4(A), 2(B) port] (16.2) (For threaded type) 25.9 One-touch fitting [4(A), 2(B) port] (For threaded type) Applicable tubing O.D.: 4, 5/32" 6, 1/4" 8, 5/16" (For 01 threaded type) (76.7) (62.3) * These figures show the SY5230-5Z1

Table of Contents

AS131F-M3-23 AS131F-M3-01 17.9 7.2 7.2 28.3 17.6 17.6 7.2 28.3 24.1 24 4 3.2 8.4 1/8" 28.6 17.9 26.6 24.1 24 21.5 17.9 8.4 4 ASV 12.7 7.2 5.5 5.5 10.1 21.5 10.1 26.6 18.3 12.7 M3 x 0.5 M3 x 0.5 AS131F-M3-04 AS131F-M3-03 28.6 17.9 5 18.3 4 5/32" 9.3 9.3 5 AS131F-M5-23 AS131F-M5-01 M5 x 0.8 1/8" M5 x 0.8 19.8 3.2 19.8 8.4 8.4 AK AS131F-U10/32-23 AS131F-U10/32-01 1/8" 10-32UNF 10-32UNF 12.7

ZP

G 3 x M3 x 8 H F G G E F Y E F Y E 4 3 4 34 18 40 C A B D C A B D C A B D Dimensions Dimensions Dimensions Model A B C D E F Model A B C D E F Model A B C D E F ZPX40HB-B8 ZPX40HB-B10 ZPX50HB-B8 ZPX50HB-B10 ZPX63HB-B10 ZPX63HB-B12 ZPX80HB-B10 ZPX80HB-B12 ZPX100HB-B10 ZPX100HB-B12 ZPX125HB-B10 ZPX125HB-B12 01 01 01 40 41 28 43 20.5 32 63 65 46 68 31.5 43 100 103 69 107 47.5 60.5 01 01 01 01

AC

VE Description 0 1 M5 01 0 1 VY110 01 02 0 1 VY120 01 02 0 1 VY130 02 03 04 0 1 02 03 04 0 1 04 06 10 0 1 VY140 VY170 10 12 0 1 VY190 14 20 0 1 VY1D00-M5 VY1A0 -M5 VY150 VY1B0 VY VEX1-18-1 VEXA-18-2 VEX3-32 VEX5-32 VEX7-32 VEX9-32 B Braket (with bolt, washer) G VEX1-18-2 VEXA-18-3 F G36-10-01 G46-10-01 G G27-10-01 Pressure gauge G27-10-R1-X207 AL Pilot EXH. port silencer N AN120-M5 AN101-

Proposals for Energy Saving

roller Hard steel roller Roller plunger VM430-01-06 VM430-01-06S Polyacetal roller Hard steel roller Cross roller plunger VM430-01-07 VM430-01-07S Toggle lever VM430-01-08 VM-30AR Red VM430-01-30R VM-30AB Black VM430-01-30B Push button (Mushroom) VM-30AG Green VM430-01-30G VM-30AY Yellow VM430-01-30Y VM-32AR Red VM430-01-32R VM-32AB Black VM430-01-32B Push button (Extended) VM-32AG Green

Micro Mechanical Valve Series VM1000

P.T. 5.5 25 (L) (A) 3 port (A) 2 12 10 1 (P) 3 (R) 14.5 14.5 2 x 1/8 17 44 25.4 2 x 4.6 mounting hole * 0.5 MPa supply Model L A VM120-01-00A 32.5 7.5 F .O.F .* 26 N VM130-01-00A P .T. 1.5 mm VM121-01-00A 28.5 3.5 O.T. 1.5 mm VM131-01-00A T.T. 3 mm Roller lever VM121-01-01A VM131-01-01A VM121-01-01SA VM131-01-01SA Symbol 2 port 10 Polyacetal or hard steel roller (A) 2 12 10 1 (P) 29.2 45.5

Table of Contents

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

Table of Contents

setting trimmer Pressure setting trimmer SET HYS SET HYS L L H H L L H H 15 15 Indicator light (Red) Indicator light (Red) 23 23 SE1-01-16/-17 I Z I Z SE1-01-16C/-17C Pressure setting trimmer 2 Pressure setting trimmer 1 Pressure setting trimmer 2 Pressure setting trimmer 1 SET1 SET2 L L H H 15 SET1 SET2 L L H H 15 Indicator light (Red, Green) 23 Indicator light (Red, Green) 23 600 (3000

V

-16ASUP B L O C K P L AT E P R PR VVQ1000-N5-Station (1-Max. stations) N A M E P L AT E [-N] Direct exhaust [-S] B U I LT I N S I L E N C E R VVQ1000-F-L(VQ1000) E L B O W F I T T I N G S A S S E M B LY I N D I V I D U A L EXH S PA C E R EXH B L O C K B A S E A S S E M B LY VVQ1000-19A(VQ1000) F P L KQPP L A N K I N G P L U G 23 04 06 08 10 01 03 07 2 S TAT I O N S M AT C H I N G F I T T

2/3 Port Valve

: D Conduit terminal: T VX VNl VQ Grommet Conduit DIN connector Conduit terminal Electrical entry P Port size Rc(PT) A B C D E Model Energized open F H J F H J F H J K F H J K VX22 05 6 02 03 02 03 VX23 05 6 VX2260-04 VX2360-04 23 35 25.5 40 23 35 25.5 40 83 91 89 97 62 69 65 72 25.5 28 25.5 28 83 91 89 97 54 62 57 65 41 44 41 44 83 91 89 97 54 62 57 65 60 62 60 62 48 50 48 50 100 108 106

AS

AK AS131F-M3-23 AS131F-M3-01 7.2 7.2 28.3 17.6 1/8" 28.6 17.9 26.6 24.1 24 21.5 8.4 17.9 17.9 3.2 5.5 4 7.2 28.3 24.1 24 4 17.6 8.4 5.5 10.1 18.3 12.7 12.7 7.2 10.1 26.6 21.5 M3 x 0.5 M3 x 0.5 AS131F-M3-04 AS131F-M3-03 5 28.6 17.9 5/32" 9.3 18.3 5 4 9.3 VCHC AS131F-M5-23 AS131F-M5-01 1/8" M5 x 0.8 M5 x 0.8 8.4 19.8 19.8 3.2 8.4 AS131F-U10/32-23 AS131F-U10/32-01 1/8" 10-32UNF 10-32UNF 8 12.7

0.4

Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.

ZP

G 3 x M3 x 8 H F G G E F Y E F Y E 4 3 4 34 18 40 C A B D C A B D C A B D Dimensions Dimensions Dimensions Model A B C D E F Model A B C D E F Model A B C D E F ZPX40HB-B8 ZPX40HB-B10 ZPX50HB-B8 ZPX50HB-B10 ZPX63HB-B10 ZPX63HB-B12 ZPX80HB-B10 ZPX80HB-B12 ZPX100HB-B10 ZPX100HB-B12 ZPX125HB-B10 ZPX125HB-B12 01 01 01 40 41 28 43 20.5 32 63 65 46 68 31.5 43 100 103 69 107 47.5 60.5 01 01 01 01

0.4

F Manifold mounting AXT100 03 kit Nil E DIN rail mounting style Direct mounting style Wiring Stations Note) Note) S D Single wiring Double wiring SSQ2000 PR 3 C10 01 For 1 station P PL26: 01 to 12 (P kit, 26P) PL20: 01 to 09 (P kit, 20P) JL20: 01 to 08 (J kit, 20P) Port size kit 24 For 12 stations Option C8 C10 N9 N11 One-touch fitting for 8 One-touch fitting