SYJ300/500/700

Nil Applicable blanking plate assembly SYJ300-10-2A 02 2 stations Pilot valve is on the A port side.

Prevents Micro-Bubbles

A (OUT) port A A LLH2A-03-02-C 1 set 1 set Manifold base part no. Non-locking Locking LVH20A-02-C 2 sets 2 sets Valve part no. (stations 1 & 2) LVH20AL-02-C 1 set 1 set Valve part no.

High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLA 2 A 05 02 C LVN Body class TL/TIL Material Symbol 2 3 4 5 Body class 2 3 4 5 Thread type Manifold PFA Symbol C LQ3 Symbol Nil N Thread type Rc NPT Base type Port size (port P) A Stacking type Symbol 02 03 04 06 Body class 2 3 4 5 Port size 1/4 3/8 1/2 3/4 Manifold stations 02 2 stations 05 5 stations How to Order Valve LVA 2 0 02 C A Option Body

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

R External pilot Elbow (Downward) B Valve stations P: Flat ribbon cable connector (26 pins) F: D-sub connector Note Note Stations Stations Symbol Symbol 02 02 2 stations 2 stations Double wiring Note 1) Connector mounting position Double wiring 10 11 10 stations 11 stations Symbol Mounting position 02 02 2 stations 2 stations D D side Specified layout (Up to 22 solenoids possible) Specified

Modular Type Regulators Series AR

AR4 5 AR6 5 AR8 5 AR9 5 Description Model Pressure gauge with limit indicator Note 1) B24P B25P Bracket G46-10-02 (Max. 1.0 MPa), G46-2-02 (Max. 0.2 MPa) Note 1) In the gauge part no. (e.g. G46-10-02), indicate kind of the connecting thread. Put nothing for Rc and N for NPT thread. Please consult with SMC for NPT pressure gauge.

0.4

Rc N NPT VQZ T NPTF F G SQ In the case of alone Sub-plate Terminal block Port size VFS 02 PW VQ2000 1/4 02 VFR Dimensions VQ7 4 89.4 (43.8) 2 x 4.5 (Mounting hole) 10.5 (A port) 10.5 (B port) Manual override Indicator light VQ210 0 1-1-02 37 5 45 121 <127.9> 22.4 15.5 77.2 Clamp screw M5 x 0.8 External pilot port 72.7 <76.7> 70.7 3 R2 R1 5 X 12 P 1 (A, B port) 25 25 25 20 15.4 12 2.5 5 14.5

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

mounting adaptor: VV317-02-1-02-A 4 x 7 mounting hole Manual override (Non-locking) (Station 1) (Station n) VV061 VV100 DIN terminal facing upward 141.6 V100 S070 VQD n x 1/4 4 x 3/8 VQD-V Applicable cable O.D. 6 to 12 VK VT VT L Dimension n: Stations Stations Formula L1 = 46 x n + 89 L2 = 46 x n + 59 2 181 151 3 227 197 4 273 243 5 319 289 6 365 335 7 411 381 8 457 427 9 503 473 10 549

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

EX510-S002A Nil N PNP output (COM.)

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

EX510-S002A Nil N PNP output (COM.)

45

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

5 Port Air Operated Valve

to Order Manifold VV5FA 3 40 02 2 05 Common exhaust F Series Stations 02 Thread type Nil F N T Series VFA3000 VFA5000 P, R Port size 1/4 3/8 2 stations Symbol 3 5 A, B Port size 1/4 1/4 Rc G NPT NPTF 20 20 stations Up to 10 stations for VV5FA5 The A and B ports are made on the bottom.

60

n v v a a i i c c n n g g t t n n p p e e i i m m p p in in e e l l g. g.

3 Port Air Operated Valve Series SYJA300 1

Model Manifold base model R port model Common Individual Port size Applicable valve model Series VV3PA3-411-02 n VV3PA3-423-02 n VV3PA5-411-03 n VV3PA5-423-03 n VV3PA7-411-04 n VV3PA7-423-04 n Rc Rc Rc Rc Rc Rc 1 4 1 4 3 8 3 8 1 2 1 2 VPA300 VPA344 VPA500 Common Individual VPA544 VPA700 Common Individual VPA744 Option Description Part no.

7.5

C N C N For junction common Lead wire length How to Order Indicate the part no. of the connector assembly for the manifold and solenoid valve.

Soft Start-up Valve

)-A AVA5000-(F,N)06~10(B,G,S)(-R,Z)-A AVL2000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL3000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL4000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL5000-(F,N)06~10(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A Contents Page 1.

A

N C Q 2 / C Q 2 M5 0.8 M6 1 M8 1.25 Flange Double Clevis** Bore Size (mm) Foot* M10 1.5 (N)CQ-F012 (N)CQ-D012 12 (N)CQ-L012 (N)CQ-F016 (N)CQ-D016 16 (N)CQ-L016 (N)CQ-F020 (N)CQ-D020 20 (N)CQ-L020 (N)CQ-F025 (N)CQ-D025 25 (N)CQ-L025 (N)CQ-F032 (N)CQ-D032 32 (N)CQ-L032 (N)CQ-F040 (N)CQ-D040 40 (N)CQ-L040 (N)CQ-F050 (N)CQ-D050 50 (N)CQ-L050 (N)CQ-F063 (N)CQ-D063 63 (N)CQ-L063 Note) * If Foot

3 Port Air Operated Valve Series SYJA300

Nil Applicable blanking plate assembly SYJ300-10-2A 02 2 stations Pilot valve is on the A port side.

One-touch Fittings

Symbol Size Tubing connection 001 Same dia. tubing M3 M3 x 0.5 M5 M5 x 0.8 M6 M6 x 1.0 01 R1/8, Rc1/8 02 R1/4, Rc1/4 03 R3/8, Rc3/8 E Bulkhead union Bulkhead connector LE Bulkhead male elbow N Adapter Thread connection 1 Only for Bulkhead union and Bulkhead male elbow. Applicable tubing O.D.

Intrinsically Safe Valve

In the case of complex arrangement, specify them on the manifold specification sheet. 53 42 SS5Y 05 5 02 Manifold series Stations 5 7 02 53-SY5000 2 stations 53-SY7000 20 20 stations Thread type A, B port size Nil F N T Rc Thread piping G Symbol Port size Applicable series NPT 1/4 53-SY5000 53-SY7000 02 NPTF Warning If a resin tubing is used, take precautions against static electricity.

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03