Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 M5 x 0.8 AS221F-01 AS231F-01 R 1/8 AS221F-02 AS231F-02 R 1/4 AS321F-02 AS331F-02 R 1/4 AS321F-03 AS331F-03 R 3/8 AS421F-04 AS431F-04 R 1/2 AS121F-U10/32 AS131F-U10/32 10-32 UNF AS221F-N01 AS231F-N01 NPT 1/8 AS221F-N02 AS231F-N02 NPT 1/4 AS321F-N02 AS331F-N02
(Exhaust center) 1/4" 17(0.9) Exhaust center VH302-N02, N03 VH312-N02, N03 2 (Position) 2 1 1.56 (0.71) (A) 2 (B) 4 VH3 1/4", 3/8" VH320-N02, N03 VH330-N02, N03 3 (Closed center) 3/8" 20(1.1) 1 (P) 3 (R) VH321-N02, N03 VH331-N02, N03 3 (Exhaust center) VH322-N02, N03 VH332-N02, N03 2 1 3 4 2 (Position) VH400-N02 to N06 VH410-N02 to N06 3 (Closed center) 1/4" 45(2.5) 4 3 VH401-N02 to N06 VH411
-07S 43.9 25.6 13.2 18 55 18.5 5/16" ASD430F-N02-09S 46.5 28.2 41.7 NPT 1/4 17.5 15.2 15 18.5 36.7 29.6 34.6 11 40.4 35.4 21 3/8" ASD430F-N02-11S 49.3 31 19.7 62 18.5 17 1/4" ASD530F-N02-07S 48.7 25.6 13.2 20.3 76 18.5 5/16" ASD530F-N02-09S 51.3 28.2 46.9 NPT 1/4 38 19 15.2 19.8 23 43 15.4 41.9 48.8 43.8 21 3/8" ASD530F-N02-11S 54.1 84 32.6 23.1 18.5 17 1/4" ASD530F-N03-07S 48.7 25.6 13.2
KFG2H0122-N01 KFG2H0122-N02 KFG2H0325-N01 KFG2H0325-N02 KFG2H0704-N01 KFG2H0704-N02 KFG2H0906-N01 KFG2H0906-N02 KFG2H0906-N03 KFG2H1163-N02 KFG2H1163-N03 KFG2H1163-N04 KFG2H1395-N02 KFG2H1395-N03 KFG2H1395-N04 O.D. 19.4 23.8 19.4 23.8 21.1 25.5 23.3 26.7 28.3 29.7 30.3 33.5 31.5 31.9 35.1 16.2 19.4 16.2 19.4 17.9 21.1 20.1 22.3 23.6 25.3 25.6 27.1 27.1 27.2 28.7 1/8 1/4 1/8 1/4 1/8 1/4 1/
-07SD 17 1/4" 13.2 43.9 25.6 18 ASD430F-N02-09SD 34.7 11 NPT 1/4 17.5 18.5 41.7 40.7 1.2 15 7.2 18.5 5/16" 15.2 46.5 28.2 ASD430F-N02-11SD 21 3/8" 18.5 19.7 49.3 31 ASD530F-N02-07SD 17 1/4" 13.2 25.6 48.7 20.3 ASD530F-N02-09SD 49.3 15.4 NPT 1/4 18.5 19 5/16" 55.3 1.2 53.7 9.8 23 19.8 15.2 28.2 51.3 ASD530F-N02-11SD 21 3/8" 23.1 18.5 32.6 54.1 ASD530F-N03-07SD 17 1/4" 13.2 25.6 48.7 20.3 ASD530F-N03
-07ST ASD430F-N02-09ST ASD430F-N02-11ST ASD530F-N02-07ST ASD530F-N02-09ST ASD530F-N02-11ST ASD530F-N03-07ST ASD530F-N03-09ST ASD530F-N03-11ST ASD630F-N04-11ST 8.4 9.3 11.4 12 11.6 13.2 15.2 13.2 15.2 18.5 13.2 15.2 18.5 13.2 15.2 18.5 18.5 12.9 17.5 29.4 10-32 UNF 7.8 27.4 0.7 31 30.7 11.7 4.5 10 9.6 8 16.5 13.5 16.5 17 18.5 17 18.5 21 17 18.5 21 17 18.5 21 21 23.3 20.7 23.9 25.6 28.2 25.6
-07SD ASD430F-N02-09SD ASD430F-N02-11SD ASD530F-N02-07SD ASD530F-N02-09SD ASD530F-N02-11SD ASD530F-N03-07SD ASD530F-N03-09SD ASD530F-N03-11SD ASD630F-N04-11SD 29.4 17.5 12.9 5/32" 9.3 18 27.4 7.8 10-32 UNF 8 9.6 10 4.7 11.7 30.7 31 0.7 35.2 23.3 16.5 3/16" 11.4 20 32.6 20.7 13.5 1/4" 12 18 38.5 23.9 16.5 14 38.9 3/16" 11.6 37 31.6 10.6 NPT 1/8 12.7 14.2 11.8 7.2 34.7 1.2 42.2 25.6 17 1/4"
Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage
Select D for the vacuum port for suction of 50 L/min (ANR) or more. ( Cable length Note 3) I/O connector 0 Cable type Note 1) Note 2) + Driver type Nil S R Nil 2 5 A Nil H Without connector Without cable Standard cable Robotic cable (Flexible cable) Without cable 2 m 5 m 10 m Power supply voltage (V) Compatible drivers 25 32 Size 40 ) ) ) ) ) ) ) ) ) With connector Nil A1 A2 B1 B2 C1 C2
Application Application Mounting direction w (to minimize the installation width) Work piece Mounting direction q (to minimize the installation height) Work piece Guide Guide Series MY3 Series MY3 Floating mechanism Bracket Floating mechanism Bracket Mounting Example Mounting Example G G D1 D2 Za2 Za1 Ea Ea Ea Ea C1 C2 K2 (Screw length) B2 F2 B1 F1 K1 (Screw length) Detail drawing of Za2
To the communication connector ( C2 ) or ( 1 ) of SI unit, connect the branch cable with M12 connector from GW. To the communication connector ( C1 ) or ( 0 ), connect the branch cable with M12 connector from Input unit. To the communication connector of Input unit, connect the branch cable with M12 connector from SI unit.
Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage
Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.
Controller side PLC side For 4 Axes JXC73/83 L JXC C2 (Terminal no.) (R1.25-4) 40 20 39 (7.5) 40 20 Cable length (L) [m] 50.8 1 1.5 3 3 5 5 2 21 1 21 1 Pin no. Wire color Pin no. Wire color Pin no. Wire color Pin no.
B L1 W M2 B side Inch Size 6 4 Model A side B side B C1 C2 E1 E2 H1 H2 L1 L2 M1 M2 Min. port size W Applicable tubing O.D.
1 I/O cable length [m]*3 Compatible driver Power supply voltage [V] Size 25 32 40 Nil Without driver A1 LECSA1-S100 to 120 A2 LECSA2-S200 to 230 B1 LECSB1-S100 to 120 B2 LECSB2-S200 to 230 C1 LECSC1-S100 to 120 C2 LECSC2-S200 to 230 S1 LECSS1-S100 to 120 S2 LECSS2-S200 to 230 *3 When Without driver is selected for driver type, only Nil: Without cable can be selected.
Applicable shaft types: J, X, Z d1 = d1 = d1 = d1 = L2 = Y = C2 J axis X axis D2 = C2 = C K axis T axis (mm) (mm) (mm) d1 Size 30 50 63 80 100 d1 Size 30 50 63 80 100 Y 3 to 25 1 to 36 1 to 41 1 to 50 1 to 60 L2 max Y 2 Y Y Y Y D2 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 Size 30 50 63 80 100 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 11-7
Applicable shaft types: J, X, Z d1 = d1 = d1 = d1 = Y = C2 J axis X axis K axis T axis D2 = C2 = C L2 = [mm] [mm] [mm] Size Y L2max D2 30 3 to 25 Y-2 5 to 7.9 50 1 to 36 Y 5 to 14.9 63 1 to 41 Y 5 to 16.9 80 1 to 50 Y 8 to 19.9 100 1 to 60 Y 8 to 24.9 Size d1 30 2.5 50 4 to 7.5 63 4 to 8 80 6.8 to 11 100 6.8 to 13 Size d1 30 2.5 50 4 to 7.5 63 4 to 8 80 6.8 to 11 100 6.8 to 13 218
K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.
K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.