Multi-Axis Step Motor Controller

Controller side PLC side For 4 Axes JXC73/83 L JXC C2 (Terminal no.) (R1.25-4) 40 20 39 (7.5) 40 20 Cable length (L) [m] 50.8 1 1.5 3 3 5 5 2 21 1 21 1 Pin no. Wire color Pin no. Wire color Pin no. Wire color Pin no.

High Vacuum Angle Valve

K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.

Sensor Range: 3 [For Compound Pressure (-100~100.kPa)], Port Size: 01 [R 1/8 (w/M5 Female Thread)], Output Specification: 28 [Current Output (4~20mA) Type]

Sensor Range: 3 [For Compound Pressure (-100~100.kPa)], Port Size: 01 [R 1/8 (w/M5 Female Thread)], Output Specification: 28 [Current Output (4~20mA) Type], Option: -

Mechanically Jointed Rodless Cylinder Series MY1

M14 x 2 11 200 2 128 15 M8 x 1.25 47 43.5 MY1C50 84.5 29 100 230 19 12.5 29.5 27.5 39.5 130 32 M16 x 2 13.5 230 5.5 152 16 M10 x 1.5 50 60 MY1C63 104 32.5 115 (mm) XX Z NW PA PB PG Q PP QW QQ RR SS TT UU W WW Model NF NH VV W1 118 120 90 10 380 26 90 28 35 10 35 24 144 22 MY1C50 83.5 400 81 28 74 128 142 140 110 12 436 42 110 30 49 13 43 28 168 25 MY1C63 92 460 103 105 30 152 Y 2 x d R WX

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

28 Bore size With air cushion Air cushion type is not available for 21-/22-CJ2.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

28 Bore size 11 11 10-0.022 0 12-0.027 0 With air cushion With air cushion type is not available for 21-/22-CJ2.

MY1

M14 x 2 11 200 2 128 15 M8 x 1.25 47 43.5 MY1C50 29 100 84.5 230 19 12.5 29.5 27.5 39.5 130 32 M16 x 2 13.5 230 5.5 152 16 M10 x 1.5 50 56 MY1C63 32.5 115 104 (mm) W1 NW PA PB PG Q PP QW QQ RR SS TT UU W WW Model NF NH VV XX Z 118 120 90 10 380 26 90 28 35 10 35 24 144 22 MY1C50 128 81 28 74 400 83.5 142 140 110 12 436 42 110 30 49 13 43 28 168 25 MY1C63 152 103 30 92 460 105 Y 2-d R WX

Electric Actuator

Description Material Note 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 No.

Sensor Range: 3 [For Compound Pressure (-100~100.kPa)], Port Size: 01 [R 1/8 (w/M5 Female Thread)], Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 3 [For Compound Pressure (-100~100.kPa)], Port Size: 01 [R 1/8 (w/M5 Female Thread)], Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Precautions 1

8 5 41 13 8 26 13 40 15.5 18 Up to 300 76.5 40 3.2 102 28 6.8 4 5.5 33.5 8 6 45 13 10 32 17 47 19.5 22 Up to 300 78.8 40 3.2 104 28 6.8 4 5.5 37.5 8 6 45 13 12 32 17 47 19.5 22 Up to 300 84.8 55 3.2 134 30 7 4 7 46.5 10 8 50 16 14 41 22 54 21 24 Up to 300 (mm) ZZ Z Y X S MM LZ NN NA N Bore size (mm) 20 25 32 40 131 21 8 20 62 M8 x 1.25 M20 x 1.5 24 55 15 135 25 8 20 62 M26 x 1.5 30 55 15

Electric Actuator

(Red l Green j Red) 5, 12, 24 VDC (4.5 to 28 V) Power supply voltage 10 mA or less Current consumption 28 VDC or less 24 VDC (10 to 28 VDC) Load voltage 40 mA or less 2.5 to 40 mA Load current AC Servo Motor 0.8 V or less at 10 mA (2 V or less at 40 mA) 4 V or less Internal voltage drop 100 A or less at 24 VDC 0.8 mA or less Leakage current Operating range . Red LED lights up.

MXW Series Long Stroke Slide Table

My Mp W W L2 B2 W C2: Correction value for moment center distance L1 A2 L3 C2 My (mm) A2: Correction value for moment center distance MXW 8 MXW12 MXW16 MXW20 MXW25 23 29 37 49 63 B2: Correction value for moment center distance (mm) Mr (mm) W Mp 10 10 14 20 28 W MXW 8 MXW12 MXW16 MXW20 MXW25 39 48 58 75 97 MXW 8 MXW12 MXW16 MXW20 MXW25 W Dynamic moment Moment due to impact of load at end

Environment

B2 LECSB2/Pulse input (Absolute encoder) 200 V to 230 V C2 LECSC2/CC-Link (Absolute encoder) 200 V to 230 V !

CV/MVGQ

8 18 15 13 5 8 C J G5-S 32 M10 x 1.25 55 76.5 40 3.2 28 6.8 4 45 47 5.5 13 19.5 30 33.5 10 22 15 17 6 8 32 M10 x 1.25 55 78.8 40 3.2 28 6.8 4 45 47 5.5 13 19.5 34.5 37.5 12 22 15 17 6 8 CV 41 75 84.8 55 3.2 30 7 4 50 54 7 16 21 42.5 46.5 14 24 21.5 22 8 10 M14 x 1.5 Dimensions by Stroke MVGQ Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore size (mm) Z Y X NN Bore (mm) Symbol

Pin Cylinders Series CJP2/CJP

CJP FZ CJ2 Foot: C(D)JP2L6 to 16 CM2 Foot LX (mm) CG1 2 x LC Symbol Bore size X Y LC LH LT LW LX LZ MB X Y 6 10 16 6.5 7 10 10.5 12 16.5 3.4 4.5 5.5 11 13 18 1.6 1.6 2.3 21.5 25 32.5 20 24 30 28 33 43 MB1 Foot Other dimensions are the same as basic mounting.

MXW

Mr My Mp W L2 B2 W W C2: Moment center position distance compensation amount My L1 A2 L3 C2 (mm) B2: Moment center position distance compensation amount MXW8 MXW12 MXW16 MXW20 MXW25 23 29 37 49 63 A2: Moment center position distance compensation amount Mr (mm) (mm) W Mp MXW8 MXW12 MXW16 MXW20 MXW25 39 48 58 75 97 MXW8 MXW12 MXW16 MXW20 MXW25 10 10 14 20 28 W W 8-7-2 3 Long Stroke Slide Table

Air Slide Table Series MXW

Mr My Mp W L2 B2 W W C2: Moment center position distance compensation amount (mm) L1 A2 My L3 C2 A2: Moment center position distance compensation amount (mm) B2: Moment center position distance compensation amount (mm) MXW8 MXW12 MXW16 MXW20 MXW25 23 29 37 49 63 Mr W MXW8 MXW12 MXW16 MXW20 MXW25 39 48 58 75 97 Mp MXW8 MXW12 MXW16 MXW20 MXW25 10 10 14 20 28 W W 148 Series MXW Air Slide Table

Aluminum High Vacuum Angle Valve

K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.