CV/MVGQ 2, 3, 4 75 + 35 (n 2) n = 2, 4, 6, 8 80 + 35 (n 2) n = 2, 4, 6, 8 90 + 35 (n 2) n = 2, 4, 6, 8 55 + 50 (n 2) n = 2, 3, 4 75 + 50 (n 2) n = 2, 4, 6, 8 80 + 50 (n 2) n = 2, 4, 6, 8 90 + 50 (n 2) n = 2, 4, 6, 8 Different sides RB D-A44C n Same side J 10 75 80 90 1 2 (Different sides, Same side), 1 D85 90 95 105 15 80 D-Z7/Z80 D-Y59/Y7P D-Y7W (n 2) 2 15 + 40 n = 2, 4, 6, 8 (n 4) 2 (
2 @1 @3 e u o t @2 !8 @0 @0 @3 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 q w r y !5 !6 i w i !
-DZ (Double acting) Bore size: 32, 40, 50 M E J 2 x P (Rc, NPT, G) T 0 0.1 D Q F Z Stroke M E J T 0 0.1 D Width across flats K A + 2 stroke B + Stroke V H + Stroke 2 x P (Rc, NPT, G) E M 4 x N through 8 x O counterbore Q F Z Stroke T 0 0.1 Width across flats K A + 2 stroke B + Stroke V H + Stroke D M E J E M 4 x N through 8 x O counterbore Width across flats K A + 2 stroke B + Stroke V H
or 15 r Rated voltage (Supply valve/Release valve) L V V Cannot be selected when t is N L1 None V L2 V None Cannot be selected when t is P or T L3 None None Symbol Voltage 5 24 VDC 6 12 VDC 4 For the connector length other than 300 mm, order the connector assembly on page 32 separately. t Pressure switch for vacuum/Pressure sensor Specifications NPN PNP With unit selection function3 2
AD48-6 AD38-6 Nylon AD27-6C AD27-6C C3SF-6J C4SF-6J C2SF-6J C3SF-6J C2SF-6J w C3SF-6W C4SF-6W C3SF-6W C2SF-6CJ C2SF-6CJ r C3SF-2 C4SF-2 C2SF-2 C3SF-2 C1SF-2 C2SF-2 AD37-2 AD47-2 AD27-2 AD37-2 AD17-2 AD27-2 e Metal AD38-2 AD48-2 AD38-2 C3SF-2J C4SF-2J t C3SF-2J C2SF-2J C2SF-2J C3LF-8 C4LF-8 C3LF-8 AD37-8 AD47-8 AD37-8 Metal bowl with level gauge AD38-8 AD48-8 AD38-8 C3LF-8J C4LF-8J C3LF
AD48-6 AD38-6 Nylon AD27-6C AD27-6C C3SF-6J C4SF-6J C2SF-6J C3SF-6J C2SF-6J w C3SF-6W C4SF-6W C3SF-6W C2SF-6CJ C2SF-6CJ r C3SF-2 C4SF-2 C2SF-2 C3SF-2 C1SF-2 C2SF-2 AD37-2 AD47-2 AD27-2 AD37-2 AD17-2 AD27-2 e Metal AD38-2 AD48-2 AD38-2 C3SF-2J C4SF-2J t C3SF-2J C2SF-2J C2SF-2J C3LF-8 C4LF-8 C3LF-8 AD37-8 AD47-8 AD37-8 Metal bowl with level gauge AD38-8 AD48-8 AD38-8 C3LF-8J C4LF-8J C3LF
S D Single Double How to Order Sub-plate VS7 2 A03 Specifications Thread type Port size Porting specifications Rc Nil A03 A04 A06 B03 B04 B06 Side ported Rc 3/8 Side ported Rc 1/2 Side ported Rc 3/4 Bottom ported Rc 3/8 Bottom ported Rc 1/2 Bottom ported Rc 3/4 Model Weight (kg) NPTF T G F Piping location Port size VS7-2-A03 VS7-2-A04 VS7-2-A06 VS7-2-B03 VS7-2-B04 VS7-2-B06 3/8 1/2 3/4 3/
side bracket Series One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 8 One-touch fitting for 10 SYA5000 3 SYA3000 5 SYA5000 SYA7000 7 SYA7000 SYA 5 1 C6 20 Body ported 40 SYA 5 1 Base mounted Series 3 SYA3000 5 7 SYA5000 SYA7000 P, R port thread type Type of actuation Nil Rc 2 position single (A)4 2(B) G F N NPT 1 NPTF T 1 (P) (EA)5 3(EB) Port size 2 position double
2 @5 !7 @1 !6 !5 w o !0 i e r y !3 !4 @0 !9 t !8 @2 @4 !
(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 80 BQ-2 32 BQ-2 BMU1-025 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts
(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 32 BQ-2 BMU1-025 80 BQ-2 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts
(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 80 BQ-2 32 BQ-2 BMU1-025 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts
surface)) Low-noise fan: 48 dB(A) (Measured at a distance of 300 mm from the workpiece), Rapid static neutralizing fan: 57 dB(A) Offset voltage (Ion balance): 13 V With alarms for Incorrect high voltage, Maintenance warning With flow rate adjustment function (IZF10R) Based on ANSI/ESD-STM3.1-2006 standards 6 C O N T E N T S IZF21/31 IZF10/IZF10R Technical Data IZF21/31 Series IZF10/IZF10R
01/(N)02/F01 17 2 -59No.PF-OMJ0005CN-I PFM7-(N)01L/(N)02L/F01L 2 17 -60No.PF-OMJ0005CN-I PFM7S-(N)01/(N)02/F01 17 2 -61No.PF-OMJ0005CN-I PFM7S-(N)01L/(N)02L/F01L 2 17 -62No.PF-OMJ0005CN-I PFM7-F02 21 2 -63No.PF-OMJ0005CN-I PFM7-F02L 2 21 -64No.PF-OMJ0005CN-I PFM7S-F02 21 2 -65No.PF-OMJ0005CN-I PFM7S-F02L 2 21 -66No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7 2 -67No.PF-OMJ0005CN-I PFM7-C4L/C6L/C8L/N7L
"n" pcs. Nil S n Stroke (mm) 12mm 16mm 20mm 25mm 2 pcs. 1 pc. "n" pcs.
Note Mounting position Without power supply terminals With power supply terminals 1: Perpendicular connector 2: Lateral connector P: Positive common N: Negative common 1 2 D side SZ3000-40-2A-D For D-sub connector 1 2 P N SZ3000-40-1A-D 1 2 1 2 P N D side SZ3000-40-4A-D For flat cable 26 pins SZ3000-40-3A-D Note) The assembly part numbers with power supply terminals are 24VDC specifications
Part No. of auto switch mounting bracket (including nut, screw and spacer) Bore size (mm) 12 BQ-1 Cylinder series 40 BQ-2 80 BQ-2 100 BQ-2 125 BQ-2 140 BQ-2 160 BQ-2 BQ-1 20 16 BQ-1 25 BQ-1 50 BQ-2 32 BQ-2 63 BQ-2 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BMU1-025 BMU1-025 BMU1-025 BMU1-025 BMU1-025 BQ-1 BQ-1 BQ-2 BQ-2 BQ-2 BQ-2 BQ-1 Mounting screw set (Stainless steel specification) Use the following