Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment Valve

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment Valve

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: S (Bracket for w/Flow Adjustment Valve)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 2 PNP Outputs, Unit Specification: Unit Switching Function, Instruction Manual: None, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment Valve

Flow Rate Range: 50 [1 to 50 (25 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 2 PNP Outputs, Unit Specification: Unit Switching Function, Instruction Manual: None, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment Valve

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment Valve

5 Port Solenoid Valve Series SY3000/5000/7000/9000

16.2 VQZ (20) 15 EA P EB 28.1 [35.1] SQ 32.5 For manifold gasket positioning 2 x 2.2 die-cast hole (P, EA, EB port) 1/8 27.2 20.5 23 VFS VFR L plug connector (L): SY5120-L(-F ) 1 2 C4, N3 C6, N7 C8, N9 M plug connector (M): SY5120-M(-F ) DIN terminal (D, Y): C4, N3 C6, N7 C8, N9 SY5120-WO(-F ) 1 2 M8 connector (WO): C4, N3 C6, N7 C8, N9 VQ7 1 2 C4, N3 C6, N7 C8, N9 D Y 1 2 SY5120(-F ) 60.9

1

35 + 25 (n 2) (n = 2, 3, 4, 5) CJ2 D-A9lV 5 10 35 10 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 25 (n 2) (n = 2, 3, 4, 5) CM2 Band mounting CG1 D-H7l/H7lW D-H7BA D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 22.5 (n 2) (n = 2, 3, 4, 5) MB D-C7l D-C80 10 15 50 15 + 40(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 20 (n 2) (n = 2, 3, 4, 5) CA2 D-H7C D-C73C D-C80C 10 15 65 15 + 50(n 2)

SY

SS5Y5-45S2DStations U. 2 3 4 5 6 7 8 9 10 Stations n L1 L2 L3 L4 335.5 323 310.5 298 273 260.5 248 223 210.5 325 312.5 300 287.5 262.5 250 237.5 212.5 200 233 217 201 185 169 153 137 121 105 12 14 15.5 17.5 13 14.5 16.5 12 13.5 C4 C6 C8 SS5Y5-45S2UStations BNote) Dimensions L1 to L4 of SS5Y5-45S2UC4 C6 C8 C4 C6 C8 Stations Bare the same as SS5Y545S2DStations B. 2 3 4 5 6 7 8 9 Stations n

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

C4 C6 C8 Stations n L1 L2 L3 L4 2 3 4 5 6 7 8 9 10 135.5 148 160.5 185.5 198 210.5 235.5 248 260.5 125 137.5 150 175 187.5 200 225 237.5 250 105 121 137 153 169 185 201 217 233 15 13.5 11.5 16 14.5 12.5 17 15.5 13.5 C4 C6 C8 SS5Y5-45FUStations B-Q 2 3 4 5 6 7 8 9 10 Stations n L1 L2 L3 L4 148 173 185.5 198 210.5 235.5 248 260.5 285.5 137.5 162.5 175 187.5 200 225 237.5 250 275 123 139 155

Metal Seal/Rubber Seal Series VQ Body Ported

9.5) 45 65.5 (41.5) (33) (59.5) 58 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting for 6 Residual pressure release manual override C8: One-touch fitting for 8 C8: One-touch fitting assembly for 8 C6: One-touch fitting for 6 2-Rc 1/8, 1/4, C6, C8 B B B 2 2 2 A A A 4 4 4 25 B 2 (1.5) 37.5 17.5 A Dimensions Formula L1 = 22n + 24 n: Station 7.5 4 L n 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 46 75

SX

-42 Rc 0.75 0.75 1.8 1.9 3.0 0.19 0.20 0.23 0.20 0.25 0.18 0.18 0.44 0.46 0.75 0.81 0.82 1.9 1.9 3.0 0.23 0.20 0.16 0.12 0.12 0.20 0.20 0.45 0.43 0.66 C6 C6 C8 C8 C10 P N 1 8 Rc Rc P N P N P N Note) The value is for manifold base with 5 stations and individually operated 2 position type. 1 4 1 4 1 4 Rc Rc Internal Wiring of Manifold Station 12 Station 4 Station 3 Station 2 Station 1 Coil

Base Mounted Metal Seal/Rubber Seal Series VQ

3 n (41.5) (33) (59.5) 58 Residual pressure release manual override 2-Rc1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 C8: One-touch fitting assembly for 8 C8: One-touch fitting assembly for 8 C6: One-touch fitting assembly for 6 2-Rc 1/8, 1/4, C6, C8 B B B 2 2 2 A A A 45 65.5 4 4 4 B 25 2 (1.5) 37.5 17.5 A 1 2 3 4 5 6 7 8 10 11 12 L n 13 14 15 16 Dimensions Formula L1 = 22n + 24

5 Port Solenoid Valve Series SV1000/2000/3000/4000

double (24 VDC) SY3230-5U1-C6 (1 set) 2-position single (24 VDC) SY3130-5U1-C6 (2 sets) SS5Y3-12SNAN-04D 1 set (Type 12 4-station manifold base part no.)

0.4

59.5) 58 Residual pressure release manual override 2 x Rc 1/8, 1/4, C6, C8 C6: 6 one-touch fitting assembly (41.5) C8: 8 one-touch fitting assembly C8: 8 one-touch fitting assembly C6: 6 one-touch fitting assembly 2 x Rc 1/8, 1/4, C6, C8 L n Dimensions Formula L1 = 22n + 24 n: Station B B B 2 2 2 A A A 1 46 75 85.5 2 68 87.5 98 3 90 112.5 123 4 112 137.5 148 5 134 162.5 173 6 156 175 185.5

4/5 Port Solenoid Valve

40 2 Base mounted Port size Thread type Type of actuation Nil Rc G NPT NPTF Without sub-plate Nil 4 3 2 position double 2 position single 2 1 1/8 With sub-plate 01 F N T JIS Symbol Body ported 3 position closed center 1/4 With sub-plate 02 3 position exhaust center 2 position single 2 position double 5 3 position pressure center (B) 2 (A) 4 (B) 2 (A) 4 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (

Valve Single Unit

How to Order Valves 5 L N SX 5 1 20 01 Thread type Series A, B port size Nil Applicable series Rc Symbol Port size M5 x 0.8 3 SX3000 5 SX5000 G F M5 One-touch fitting for 4 C4 N 7 SX7000 NPT SX3000 One-touch fitting for 6 C6 NPTF T Type of actuation 1 8 01 1 2 position single One-touch fitting for 4 C4 Rated voltage SX5000 2 2 position double One-touch fitting for 6 C6 5 24 VDC 6 12 VDC 3

Valve Single Unit

How to Order Valves 5 L N SX 5 1 20 01 Thread type Series A, B port size Nil Applicable series Rc Symbol Port size M5 x 0.8 3 SX3000 5 SX5000 G F M5 One-touch fitting for 4 C4 N 7 SX7000 NPT SX3000 One-touch fitting for 6 C6 NPTF T Type of actuation 1 8 01 1 2 position single One-touch fitting for 4 C4 Rated voltage SX5000 2 2 position double One-touch fitting for 6 C6 5 24 VDC 6 12 VDC 3

SQ1000/2000

Stations 1 2 3 4 5 6 7 8 n Lead wire length: L0/Approx. 600mm L1/Approx. 1500mm L2/Approx. 3000mm C8: SUP port C8: EXH port For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 (49.5) 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 44 29.5 2n-C3, C4, C6, M5 (A, B port) C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 threads Formulas: L1 = 11.5n + 44.5, L2 = 11.5n + 59 n:

V100

VFN 4-14-13 Body Ported 14 Series VQZ100/200/300 Dimensions: VQZ100 VV3QZ12Stations C Grommet (G) (5.5) (35) (11) 27.5 2-4.5 mounting hole n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread (4.5) (7.5) 20 DIN rail clamp screw 5.5 U side n Manual override 5 A 2 A 2 A 2 A 2 4 P = 10.5 (L4) (L3) L1 L2 3 2 1 16.5 Stations Courtesy