Fieldbus System

valve (A) (A) 4 (B) 2 (A) 4 (B) 2 Note) A 1 5 (R1) 3 (R2) 1 (P) 3 (R2) 5 (R1) 1 (P) N.C.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

B A B A A A A A A 2.PUSH 2.PUSH B B B B 1.TURN 1.TURN VQZ 28 5.5 35 74.5 SMC VQD 13 2-M4 clamp screw EXH outlet M5: External pilot port 9 D side U side Stations 1 2 3 4 5 6 7 8 n C8: 3(R) port Lead wire length: L0, 600 mm L1, 1500 mm L2, 3000 mm C8: 1 (P) port 9 For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 (49.5) 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 44 29.5 2n-C3, C4, C6, M5 (4(A),

Manifold Specifications

A/B) 4/2 5/3 (A/B R) Port size Manifold C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port VV5Z5-20-01 VV5Z5-20-C6 VV5Z5-20-C8 VV5Z5-21-01 VV5Z5-21-C6 VV5Z5-21-C8 1/8 C6 C8 1/8 C6 C8 0.55 0.49 0.51 0.54 0.50 0.50 0.26 0.25 0.25 0.26 0.24 0.20 2.3 2.0 2.1 2.3 2.1 2.1 0.57 0.37 0.45 0.55 0.36 0.50 0.35 0.32 0.38 0.36 0.32 0.37 2.2 1.4 1.7 2.1 1.4 1.8 1/8 1/8 1/8 1

SZ3000

3-20 21 Cassette Type Manifold Plug-in Type Series SZ3000 Dimensions: SZ3000 Plug-in 1 2 SS5Z3-60FD Stations BWith external pilot 4One-touch fitting [1(P), 3(R) port] Applicable tubing O.D.: 8 13.3 (Pitch) P = 10.5 24 13.3 24 SV 36.7 16.2 17 34 SZ 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 SY A 4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2One-touch fitting

SZ3000

3-20 Cassette Type Manifold Plug-in Type Series SZ3000 Dimensions: SZ3000 Plug-in 1 2 SS5Z3-60FD Stations BWith external pilot 4One-touch fitting [1(P), 3(R) port] Applicable tubing O.D.: 8 13.3 (Pitch) P = 10.5 24 13.3 24 SV 36.7 16.2 17 34 SZ 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 SY A 4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2One-touch fitting [4

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

P), 3(R) port] Applicable tubing O.D.: 8, 5/16" 13.3 (Pitch) P = 10.5 24 13.3 24 36.7 16.2 34 16.2 17 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 P 1 A 4 A 4 A 4 A 4 A 4 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4" M5 x 0.8 [4(A), 2(B) port] Applicable

Fieldbus System

8 D side U side Station 7 6 5 4 3 2 1 n DIN rail clamping screw C8: 8 One-touch fitting C8 [3(R) EXH port] DIN rail clamping screw (12) 30 56.6 8 R R 11.5 63.5 62.5 3 3 12 X 12 X 40.5 B B B B B B B B P P 25 1 A 1 A A A A A A A 18.5 7.5 9.5 7.5 C3, C4, C6, M5 [4(A), 2(B) port] C8: 8 One-touch fitting C8 [1(P) SUP port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting

4/5 Port Air Operated Valve Series SYJA3000

Location A, B port Porting specifications Direction SX 1/8 1/8 1/4 1/8, C6 (One-touch fitting for 6) P, R port M5 x 0.8, Port size C4 (One-touch fitting for 4) C4 (One-touch fitting for 4) A, B port C6 (One-touch fitting for 6) M5 x 0.8 Flow Characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(

Manifold Specifications

2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations Rc 1/4 1 8 Rc Nil F N Z NPTE 01 Rc C6 One-touch fitting for 6 4(A), 2(B) port G 20 20 stations 1(P) port Rc 1/8, C6 NPT B7 One-touch fitting for 1/4" Rc 1/4 How to Order Type 43 VV5Z3 05 43 1 C4 1(P), 3/5(R) port thread type 4(A), 2(B) port size Stations 02 2 stations 3/5(R) port Nil F N Z NPTE Rc C4 One-touch fitting

VFR

2n-Rc 1/8, 1/4 C6, C8 (A, B port) VZS D side VFS C6, C8 Light/Surge voltage suppressor (At FZ) VS4 Plug assembly: VVFS2000-30AOption: Refer to page 3-5-8.

42

kit) C 38 1/8" PE. port 18 18 17.2 PE 41.7 R2 R1 5 P 1 3 SMC 1/2" 1(P), 5(R1), 3(R2) port 106.5 1/8" External pilot port 178.5 (3-position) 3.5 10.7 164.4 (Double) 96.2 155.4 (Single) M5 x 0.8 Ground screw 71.7 62.5 106 58.2 49.7 9 9 U side 27 12 X n 4 A 2 B 8 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port 4 A 2 B A A B A B A B A B A B A SMC SMC SMC SMC SMC SMC SMC 7 A A A A A

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

B 1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken lines indicate DIN

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

SYJ300/500/700

Type 41 Applicable solenoid valve SYJ514SYJ514MSYJ524SYJ524MHow to Order SS3YJ5 41 05 C6 R port 1/8 Stations P, R port thread type A port size 02 : 20 P port 1/8 2 stations : 20 stations A A M5 01 C4 C6 N3 N7 M5 x 0.8 1/8 Nil Rc G NPT NPTF Applicable blanking plate assembly SYJ500-10-3A F N T 4 One-touch fitting 6 One-touch fitting A port M5 x 0.8, 1/8, C4, C6 5/32" One-touch fitting 1/4"

3 Port Air Operated Valve Series SYJA300

Type 41 Applicable solenoid valve SYJ514SYJ514MSYJ524SYJ524MHow to Order SS3YJ5 41 05 C6 R port 1/8 Stations P, R port thread type A port size 02 : 20 P port 1/8 2 stations : 20 stations A A M5 01 C4 C6 N3 N7 M5 x 0.8 1/8 Nil Rc G NPT NPTF Applicable blanking plate assembly SYJ500-10-3A F N T 4 One-touch fitting 6 One-touch fitting A port M5 x 0.8, 1/8, C4, C6 5/32" One-touch fitting 1/4"

VZS

Side 4(A), 2(B) D side 1 16 VS4 16 stations Max. 16 stations.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

B port Porting specifications Direction 1/8 1/8 1/4 1/8, C6 (One-touch fitting for 6) P, R port M5 x 0.8, Port size C4 (One-touch fitting for 4) C4 (One-touch fitting for 4) A, B port C6 (One-touch fitting for 6) M5 x 0.8 Flow Characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port M5 x 0.8

5 Port Air Operated Valve Series SYA3000/5000/7000 1

(A) 4 (A) 4 (B) 2 (B) 2 (Example) SS5YJA7-41-03-01 1 pc. SYJA7140 1 pc. SYJA7240 1 pc. SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

4 (B) 2 (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 5(EA) 3(EB) 1(P) JIS symbol 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 5(EA) 3(EB) 1(P) JIS symbol 3 position closed center 3 position closed center/exhaust center/pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 3 position exhaust center (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 3 position pressure center (A)

Rubber seal 5 Port Solenoid Valve Series SYJ7000

1 (P) (A) 4 (B) 2 3 position exhaust center (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 3 position pressure center (A) 4 (B) 2 i 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) (This figure shows a closed center type.)