Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N02 (NPT1/4), Piping Entry Direction: L (Bottom), Output Specification: 2 [Analog Output (4 to 20 mA)]

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N02 (NPT1/4), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)]

m), Handling Instructions: With Instruction Manual (Japanese and English), Calibration Certificate included: Without calibration certificate, Flow rate control valve: Available, Custom-made Specifications: None, Rating Flow Range(L/min): 2 to 100 (50), Accessory: None, Option: None, Analog Current Output(mA): 4 to 20

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: NPT1/4, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None)

Structure: IP40, Lead Wire: With lead wire with connector (2 m), Handling Instructions: No Instruction Manual, Calibration Certificate included: Without calibration certificate, Flow rate control valve: Available, Custom-made Specifications: None, Rating Flow Range(L/min): 2 to 100 (50), Accessory: None, Option: None, Analog Current Output(mA): None

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate)

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: S (Bracket for w/Flow Adjustment Valve

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: -, Option: -

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment Valve

VQZ1000/2000/3000

VQZ2000 28 (11) 20 (7.5) VV5QZ22Stations C (35) (5.5) 44.5 mounting hole DIN rail clamp screw n-C4, C6, M5 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread Grommet (G) n 5 Manual override VQC B 4 4 SMC SMC 2 A SQ (L4) (L3) L2 L1 5 18 P = 16 B 4 3 SMC SMC 2 A VQ0 B 4 2 SMC SMC 2 A B 4 VQ4 SMC 1 SMC 2 A VQ5 Stations Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

Plug-in Unit

A A A A A A A 143 163 PWR COM series EX500 9 B B SI unit B B B 10 1 2 3 4 5 6 7 8 n Stations D-side U-side Formulas L1 = 25n + 106 (Maximum 16 single wiring stations) n: Stations n L L1 L2 1 131 177 2 156 202 3 181 227 4 206 252 5 231 277 6 256 302 7 281 327 8 306 352 9 331 377 10 356 402 11 381 427 12 406 452 13 431 477 14 456 502 15 481 527 16 506 552 2-2-28 Base Mounted Series VQC VQC1000

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

ass'y for 6 C8: One-touch fitting ass'y for 8 Residual pressure release manual override (33) (41.5) 1.5 2-Rc(PT)1/8, 1/4, C6, C8 C6: One-touch fitting ass'y for 6 C8: One-touch fitting ass'y for 8 B B B 2 2 2 A A A 45 65.5 4 4 4 B 25 2 A Dimensions Equation L1=22n+24 n: Station 17.5 37.5 (1.5) 7.5 4 L n 13 1 2 14 16 3 4 5 6 7 8 9 11 15 10 12 46 68 310 332 376 90 112 134 156 178 200 222 266

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VS7 C6: Onetouch fitting for 6 VVQZ200010A2 VV5QZ2205C 1.12-19 VQZ1000/2000/3000 Body Ported Dimensions: VQZ1000 VV5QZ12 C Station Grommet (G) 27.5 (11) (35) 44.5 Mounting holes (5.5) n-C3, C4, C6, M5 C3: One-touch fittings for 3.2 C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread 20 (7.5) DIN rail clamp screw U side n 5 4 4 4 4 4 SMC SMC 14 P=10.5 2 2 2 2 (L4) (L3)

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

C6 :One-touch fitting 6 VVQZ200-10A-5 2.10-33 VQZ100/200/300 Base Mounted Dimensions: VQZ100 VV3QZ15C Station Port size (35) 27 (11) Grommet(G) C6: One-touch fitting for 6 C4: One-touch fitting for 4 C3: One-touch fitting for 3.2 n-C3,C4,C6,M5 (5.5) 20 (7.5) 2-4.5 Mounting holes (4.5) 11.7 M5: M5 thread DIN rail clamp screw U side n Maual override 5.5 A 2 A 2 5 A 2 A 2 A 2 A 2 4 P=10.5 (L4

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

C6: One-touch fitting for 6 VVQZ200-10A-2 VV3QZ22-05C 2.10-13 VQZ100/200/300 Body Ported Dimensions: VQZ100 VV3QZ12C Station (5.5) (35) Grommet (G) (11) 27 2-4.5 Mounting holes n-C3, C4, C6, M5 C3: One-touch fittings for 3.2 C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread (4.5) (7.5) 20 DIN rail clamp screw 5.5 U side n Manual override 5 A 2 A 2 A 2 A 2 4 P=10.5 (L4

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VS VFN C6: One-touch fitting for 6 VVQZ200-10A-5 4-14-35 Base Mounted 36 Series VQZ100/200/300 Dimensions: VQZ100 VV3QZ15Stations Port size C Grommet (G) (35) 27.5 (11) C6: One-touch fitting for 6 C4: One-touch fitting for 4 C3: One-touch fitting for 3.2 n-C3, C4, C6, M5 (5.5) 2-4.5 mounting hole 20 (7.5) (4.5) 11.7 M5: M5 thread DIN rail clamp screw U side n Manual override 5.5 A 2 A 2 5

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VFN 4-14-13 Body Ported 14 Series VQZ100/200/300 Dimensions: VQZ100 VV3QZ12Stations C Grommet (G) (5.5) (35) (11) 27.5 2-4.5 mounting hole n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread (4.5) (7.5) 20 DIN rail clamp screw 5.5 U side n Manual override 5 A 2 A 2 A 2 A 2 4 P = 10.5 (L4) (L3) L1 L2 3 2 1 16.5 Stations Courtesy

Flow Sensor Series PFMV

x M5 x 0.8 15.2 18 15 7.1 3 2 x 3.4 14 Both-side bracket One-side bracket 10 x n pcs. + 24 (n = 1 to 5) (25.7) 10 x n pcs. + 14 (n = 1 to 5) 12 10 10 2 x 4.5 5 2 x 4.5 PFM PFMV PF2A PF2W 24 34 34 24 PF2D IF L-type bracket (Tapped finish) L-type bracket (Tapped finish) 20 20 9.1 9.1 2 1 1 2 L-type bracket (Through hole) The dimensions show the PFMV5-1.

Vacuum Regulator

P601010-2 P601020-2 Valve assembly 2 HNBR, etc.