SZ3000

SZ Port size 4(A), 2(B) port C4, C6, M5 Made to Order Specifications (For details, refer to page 1-3-38.)

SZ3000

Port size 4(A), 2(B) port C4, C6, M5 Made to Order Specifications (For details, refer to page 1-3-38.)

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

1 (A) 4 (B) 2 (A) 4 (B) 2 4(A) SOL.a SOL.b SOL.a SOL.b 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 2(B) o 5(EA)/3(EB) 1(P) SJ3C60 [N.C., N.O. valve x 1 (each)] SJ3C60K with back pressure check valve SJ3C60 [N.C. valve, N.O. valve x 1 (each)] !0 y t r q e u w !2 i !

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

per/station: 19 2 stations: 126 Addition per/station: 38 2 stations: 209 Addition per/station: 60 C3 (For 3.2) C4 (For 4) C6 (For 6) M5 (M5 thread) Side Top 2 to 20 stations Rc 1/8 VV3QZ15VQZ100 VQZ115 V100 C4 (For 4) C6 (For 6) C8 (For 8) Rc 1/8 2 to 20 stations VV3QZ25VQZ200 Rc 1/4 Side VQZ25 SY SYJ 1(P) port Rc 3/8 3(R) port Rc 1/4 C6 (For 6) C8 (For 8) C10 (For 10) Rc 1/4 2 to 20 stations

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Rc(PT) 1/8 SY C4 (for 4) C6 (for 6) C8 (for 8) Rc(PT)1/8 Rc(PT) 1/4 Side VV3QZ25-lll VQZ2l5 VQZ200 2 to 20 2 stations:126 Additional station:38 SYJ VK C6 (for 6) C8 (for 8) C10 (for 10) Rc(PT)1/4 1(P)port Rc(PT)3/8 3(R)port Rc(PT)1/4 Side VV3QZ35-lll VQZ3l5 VQZ300 2 to 20 2 stations:209 Additional station:60 VZ VT Note 1) Threaded port style.

Manifold Specifications

Passage Porting specifications Symbol 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common 1 Non Plug-in Type: Stacking Type Manifold Base Wiring for every valve VV5ZS2 C4 06 51 1 Thread type Series VZS2000 Manifold Standard Nil NPT Rc N T F Non plug-in type Stacking type manifold base NPTF G Option Port size Rc 1 8 01 Embedded type One-touch fitting Applicable tubing O.D.: 4 Stations C4 02 2

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

1 1 1 1 2 1 1 2 1 1 1 2 1 2 2 1 1 1 1 1 3 2 3 VCC12-1A-1 (for VCC12-00) 1 set unit VCC12(D)-00 (dedicated) Orifice body assembly VCC12D-1A-1 (for VCC12D-00) 1 set unit O-ring assembly 1 set unit VCC12-OR-1 O-ring assembly Orifice assembly 1 set unit VCC12-OR-4 1 set unit VCC13-1A-1 VCC13-00 (dedicated) 1 set unit O-ring assembly VCC13-OR-1 O-ring assembly 1 set unit VCC13-OR-2 Mounting nut

PFxx-OMJ0005CN

7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I

SY3000/5000/7000/9000 Series (Pilot Valve:V100)

Applied voltage When connecting fittings to valves, tighten as indicated below. 1) M3, M5 types 1. When using SMC fitting, follow the guidelines below. After tightening by hand, tighten an additional 1/4 (M3), 1/6 (M5) turn with a tightening tool. However, if miniature fittings are used, tighten an additional 1/4 turn with a tightening tool after tightening by hand.

VZ3000

M5 x 0.8 C4 C6 One-touch fitting for 4 One-touch fitting for 6 3 position exhaust center 3(R) port PE port Note) 1(P), 5(R1), 3(R2) port: M5 x 0.8 4 Rated voltage Manual override 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz Nil: Non-locking push type C: Locking type C (Manual) 3 position pressure center 4 5 24 VDC 12 VDC B: Locking type B (Slotted) 5 6 9 Other

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4 C6 Type SS3YJ5-41R-C6 Note) Value at manifold

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

How to Order Valves How to Order Manifold Assemblies Example 4 0 5 SY 3 1 FU Single solenoid 2 position single Supply/Exhaust block (U side mounting) SY3140-5FU (3 sets) Double solenoid 5 FU Double/3 position 5 SY 3 2 4 SY3245-5FU (1 set) Series 3 SY3000 5 SY5000 Type of actuation 2 2 position double 3 3 position closed center 24VDC +COM + 1 2 3 Stations D side U side 4 3 position exhaust

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

SOL.b 14 1 SOL.a Station 1 1 SOL.a Station 1 SOL.a 1 The common polarity should be the same as the common specifications of the valve to be used.

2-Color Display High Precision

--F Panel mounting + Front protective cover 44.7 29.2 7.5 40 51.2 Panel thickness 1 to 5 38.6 11 Series ZSE40A(F)/ISE40A Dimensions ZSE40A(F)/ISE40A-C4-E ZSE40A(F)/ISE40A-C6-E Panel mounting 41.2 40 29.2 4 43.6 40 Panel thickness 1 to 5 38.6 ZSE40A(F)/ISE40A-C4-F ZSE40A(F)/ISE40A-C6-F Panel mounting + Front protective cover 44.7 40 7.5 29.2 51.2 Panel thickness 1 to 5 38.6 12 Series ZSE40A

VZ100/300/500

pilot VV3Z3-20-1 VZ32 1 8 0.47 0.43 0.13 0.74 0.32 0.19 M5 x 0.8 1 8 M5 x 0.8 0.71 0.98 0.71 1.00 0.68 1.00 0.52 0.36 0.49 0.37 0.35 0.27 0.21 0.25 0.2 0.26 0.17 0.25 0.81 0.92 0.80 0.96 1.00 1.00 0.28 0.24 0.23 0.25 0.25 0.30 0.20 0.22 0.19 0.24 0.24 0.26 VV3Z3-40-2 1 8 1 8 Base mounted For internal pilot 1 8 M5 x 0.8 VZ34 1 8 1 8 VV3Z3-40-1 1 8 1 8 C4 C6 Body ported For external pilot

Digital Flow Switch (Integrated display type)

Bit offset Item Notes 0 OUT1 output 0: OFF 1: ON 1 OUT2 output 0: OFF 1: ON 8 Measurement diagnostics 0: Within range 1: Out of range (HHH/LLL) 14 Fixed output 0: Normal output 1: Fixed output 15 Error Diagnosis 0: Error not generated 1: Error generated 16 to 31 Flow measurement value With sign: 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Flow measurement value

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: 01 (Rc1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: W [Lead Wire w/Connector (2m) + Rubber Cover]

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: V (Panel Mount Adapter for w/Flow Adjustment Valve)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Lead Wire w/Connector (2 m), Option: S (Bracket for w/Flow Adjustment Valve)