Compact Manifold Regulator Series ARM5

Panel cut dimension 2 x 3.2 16.5 14.5 11 8.2 20 2 x 3.2 2 x 3.2 M3 thread hole 8.2 8.2 P U P S U H S H L O L C O K C K R V R S W V X S W T 19 T X 19 L2=50+T+X L2=50+T+X L1=50+R+V 14 L1=50+R+V 14 Pressure gauge (Accessory) 50 Pressure gauge (Accessory) 50 55 (at handle locked) 55 (at handle locked) IN OUT IN OUT 41.5 43.5 U Y 4 25 6 25 U Y 14 14 SMC SMC 2 x 3.2 2 x 3.2 42 42 IN side OUT side

Intrinsically Safe Valve

(+) Insulator: Black () 0.3 mm2 4.1 34.5 37.2 Terminal type (TT) 53-SY5140(R)-TT-02 Max. 10 L (Lead wire length) 120.8 Lead wire marking No. 1 (+), No. 2 () 0.75 mm2 5.9 23 Base Mounted Series 53-SY5000/7000/9000 Dimensions: 53-SY5000 2-position double, 4-position dual 3 port L-type plug connector (L) 19 18 9.5 2 A B C 53-SY5 40(R)-L-02 37.2 15.5 15.5 48 4 2 x 4.3 (For mounting) M5 x 0.8

VQ20/30

VX B 1 2 1 2 VX3 A VXA B NL R VN R LED B NL: Neon light R: Resistor LED: Light emitting diode R: Resistor LVC Caution LVA Valve Mounting After confirming the gasket is correctly placed under the valve, tighten the mounting screws with the appropriate torque (0.2 to 0.23 Nm).

3 Port Solenoid Valve Metal Seal Series VZ200 1

BG-VZ202 BG-VZ203 VQ VKF VV3Z2-50-061-C6 BG-VZ205 VQZ How to Order Manifold Base VZ 1 08 30 VV3Z2 VS 2(A) port size on base side Series VZ200 Manifold VFN Model Symbol VV3Z2-50 VV3Z2-S50 Symbol Stations Porting specifications 2(A) Passage Specifications Without 2(A) port (Body ported type 20, 30) Nil Applicable base 02 2 stations 3(R) 1(P) Symbol M5 01 M5 x 0.8 Rc 1/8 Built-in One-touch

3 Port Solenoid Valve

2 t JIS symbol 2a 2a (N.C.) 3 1 2a (N.O.) 1 3 Double r w u e y q i !0 !1 r w u e y q i !0 !1 o o !2 !3 !2 !3 JIS symbol 2a 2b t t 2a SOL.b SOL.a (N.C.) 1 3 2b 2a 2b SOL.a SOL.b (N.O.) 3 1 Replacement Parts One-touch Fitting (Metric Size) Description No. Material Component Parts Port Port size Part no. No.

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

2n1-M5 x 0.8 [4(A), 2(B) port] [With external pilot] 13.3 (Pitch) P = 10.5 13.3 24 24 16.2 16.2 17 36.7 34 34 B 2 B 2 B 2 B 2 B 2 2 B 2 2 B 2 B B R B 2 PE R 3 3 R 3 R 3 1 P 1 P P 1 P 1 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 4-One-touch fitting [1(P), 3(R) port] Applicable tube O.D.: 8 2-One-touch fitting (X, PE port) Applicable tube O.D.: 6 2n-One-touch fitting [4(A), 2(B) port] Applicable

New

X U1 U1 X1 X1 2 x 0.13 Mounting hole 2 x 0.13 Mounting hole z 11 Q F D 0.44 Q F D G1/2 0.90 R C C R E E 2 x P Port size 2 x P Port size B1 B1 B B Terminal part Faston connector 250 Series 0.44 0.36 0.26 0.59 (inch) Electrical entry Size Mounting bracket dimensions One-touch B B1 C D E F Conduit Faston type fitting P Q Q R R U U1 W X X1 Y 1 2 3 C6, C8 2.11 2.60 2.68 1.14 1.42 1.46 2.58 3.01

Manifold Specifications

fitting Applicable tubing O.D.: 6 C6 2 stations are needed to mount control unit.

Manifold Specifications

Body type Plug-in type VVZS2000-10A-1 Non plug-in type VVZS2000-10A-2 Part no. Throttle valve spacer Needle valve set on the manifold block can control cylinder speed by throttling exhaust. Rc1 8 VVZS2000-R-01-1 VVZS2000-R-01-2 Body type Plug-in type VVZS2000-20A-1 Non plug-in type VVZS2000-20A-2 Part no.

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

pilot operating pressure range MPa SY3000 SY5000 Air 0.15 to 0.7 2 position single 2 position double 3 position 0.1 to 0.7 0.2 to 0.7 100kPa to 0.7 2 to 16 stations Location Direction P/R ports Base Side C8 (8 One-touch fitting) C10 (10 One-touch fitting) C4 (4 One-touch fitting)/C6 (6 One-touch fitting) C4 (4 One-touch fitting) C6 (6 One-touch fitting)/C8 (8 One-touch fitting) C6: PA/B

Table of Contents

Data MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

Proposals for Energy Saving

R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK3S-01MS -02MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Body size Port size Part no. Body size Port size Part no.

VZ3000

VFS F: With foot bracket (2 position single type only) 1 VS4 Body option 0: Individual exhaust for the pilot valve VQ7 U: With silencer 2 position double EVS 2 K: With foot bracket and silencer (2 position single only) VFN 3(R) port PE port 3 position closed center 3: Common exhaust type for main and pilot valve Note) The bracket and silencer are not assembled. 3 4(A), 2(B) port size M5

4/5 Port Air Operated Valve SYJA3000 Series

(P) 3(R) 1 (P) (R)3 5(R) How to Order Manifold Base 2 position double 2 position double 4(A) (B)2 4(A) (B)2 Same manifolds as SYJ3000 series are prepared. 5(R) 1 (P) (R)3 3(R) 1 (P) SS5YJA3 Fill the same as SS5YJ3 (Refer to page 166.) 3 position closed center 3 position closed center 4(A) (B)2 4(A) (B)2 Instruct by specifying the valves and blanking plate assembly to be mounted on the manifold

4/5 Port Air Operated Valve Series SYJA3000 1

5 port 4 port 3 position exhaust center 5 3 position pressure center 2 position single 2 position single (B) 2 (B) 2 (A) 4 (A) 4 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) How to Order Manifold Base 2 position double 2 position double (B) 2 (A) 4 (B) 2 (A) 4 Same manifolds as series SYJ3000 are prepared. 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) SS5YJA3 Fill the same as SS5YJ3 3 position closed center 3 position

VZ5000

PE port 3(R) port NPT T NPTF 3 position exhaust center 4 Rated voltage 4(A), 2(B) port size 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 1 2 3 Rc 1 8 01 C6 C8 One-touch fitting for 6 One-touch fitting for 8 3 position pressure center 4 Note) P , R1, R2 port: Rc 1/8 5 24 VDC 12 VDC 5 6 9 Manual override Other Option Electrical entry Nil: Non-locking push type

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Install the ejector body gasket for manifold t into the gasket groove of each vacuum pump system assembly r. 2. Install the ejector body gasket for manifold t into the gasket groove of the end block R w. 3. Align the ejector assemblies r, end block (L) w, and end block (R) e using positioning pins (at the two a positions) and fasten with clamp rods q (2 pcs.)

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

exhaust center 3 position pressure center 2 3 4 5 5 24VDC Rated voltage 2 1 Station U side D side Pilot type 24VDC -COM SMC Nil R Internal pilot External pilot SS5X3-45GD-05U-C6 .1 set (manifold part number) SX3140-5LOZ ... 3 sets (single solenoid part number) SX3240-5LOZ ... 2 sets (double solenoid part number) The "" symbol indicates mounting.

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment Valve

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/o Flow Adjustment Valve: ZS-33-