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Note 3) Note 4) 1.10-92 Single Unit How to Order Valve 0 Y 6 1 5 L C6 VQ1 Sub-plate SUP, Cylinder ports Series VQ1000 C3 C4 C6 M5 One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 M5 thread Configuration 2 position single 1 2 2 position double (latching) SY 3 position closed center 3 4 5 Note 1) See Options on p.1.10-91 for inch-size One-touch fittings.

One-touch fitting: SYJ5120-l llG H C4 C6 10 10.6 2-M3 X 0.5 (Mounting screw) 3.5 4 11 2-2.6 15 (Mounting holes) 19.5 58.2 16 3.5 62.3 (GZ, GS: 63.3) [63.3] A B 10.6 2-One-touch fitting (A, B port) Apricable tube C4: T0425 C6: T0604 R1 P C4: (3) C6: (3.2) 32.3 R2 21 5-M5 X 0.8 (Piping port) [ ] for AC Other dimensions are the same as the grommet style

Exhaust center: 4/2 5/3, Pressure center: 1 4/2 Note 2) ( ): Without sub-plate Note 3) For DC voltages.

C VV5QZ 1(P), 3/5(R) 4(A), 2(B) Weight g Rc(PT) C3(3.2) Top 2 Stations: 64 VQZ120 2 VQZ1000 VV5QZ121/8 C4(4) Addition VQZ121 to S E R I E S C6(6) per 20 1 VQZ1000 2 VQZ2000 3 VQZ3000 M5(M5Thread) Station: 18 Stations Rc(PT) C4(4) Top 2 Stations: 86 VQZ220 2 VQZ2000 VV5QZ221/8 C6(6) Addition VQZ221 to 2 Body Ported M A N I F O L D T Y P E M5(M5Thread) per 20 Station: 26 Stations C Connector

size C4 (4 Onetouch fitting) C4 (4 One-touch fitting) A, B port C6 (6 One-touch fitting) M5 x 0.8 Flow Rate Characteristics Flow rate characteristics Port size 1 4/2 (P A/B) 4/2 5/3 (A/B R) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8 1/8 1/8 1/8 1/4 1/4 1/8 0.46 0.62 0.79 0.55 0.59 0.74 0.71 0.55

Stations...3 2 1 Serial unit (D side mounting) SS5Z3-60SRID-05U-C6 . 1 set (manifold part number) SZ3160-5LOZ-C6. 2 sets (single solenoid part number) SZ3260-5LOZ-C6. 3 sets (double solenoid part number) The symbol indicates built-in.

fitting Applicable tubing O.D.: 6 C6 2 stations are needed to mount control unit.

One-touch fitting for 4 C4 SY3000 2 position double One-touch fitting for 6 C6 One-touch fitting for 4 C4 2 One-touch fitting for 6 C6 For DC SY5000 One-touch fitting for 8 C8 5 24 VDC 6 12 VDC SY9000 has no bracket.

: With One-touch fittings for 6 P, R ports Thread type Single solenoid (24 VDC) Series Stations SX3120-5G-C6 (2 set) Double solenoid (24 VDC) 3 SX3000 5 SX5000 02 Nil 2 stations Rc Blanking plate assembly SY3000-26-9A (1 set) Manifold base G 00F SX3220-5G-C6 (2 set) 7 SX7000 20 00N 20 stations NPT SS5X3-20-05 (5 stations) NPTF 00T Stations3 2 1 Connector assembly for L and M types Refer

Port size 1(P), 3(R) 2(A) 2 stations: 83 Addition per station: 19 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) Rc 1/8 Side/Top VV3QZ15-lll VQZ115 VQZ100 2 to 20 stations 2 stations: 126 Addition per station: 38 C4 (for 4) C6 (for 6) C8 (for 8) Rc 1/8 Rc 1/4 Side VV3QZ25-lll VQZ2l5 VQZ200 2 to 20 stations 1(P) port Rc 3/8 3(R) port Rc 1/4 2 stations: 209 Addition per station: 60 C6 (

2 to 20 stations Valve Rc Rc Rc 1 4 1(P), 3/5(R) port 4(A), 2(B) port 1 8 , C6, C8 1 8 Port size Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size Manifold C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port VV5Z5-20-01 VV5Z5-20-C6 VV5Z5-20-C8 VV5Z5-21-01 VV5Z5-21-C6 VV5Z5-21-C8 1/8 C6 C8 1/8 C6 C8 0.55 0.49 0.51 0.54 0.50 0.50

C VV5QZ 1(P), 3/5(R) 4(A), 2(B) Weight g Rc(PT) C3(3.2) Top 2 Stations: 64 VQZ120 2 VQZ1000 VV5QZ121/8 C4(4) Addition VQZ121 to S E R I E S C6(6) per 20 1 VQZ1000 2 VQZ2000 3 VQZ3000 M5(M5Thread) Station: 18 Stations Rc(PT) C4(4) Top 2 Stations: 86 VQZ220 2 VQZ2000 VV5QZ221/8 C6(6) Addition VQZ221 to 2 Body Ported M A N I F O L D T Y P E M5(M5Thread) per 20 Station: 26 Stations C Connector

fitting for 4) A, B port C6 (One-touch fitting for 6) M5 x 0.8 Flow Characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8 1/8 1/8 1/8 1/4 1/4 1/8 0.46 0.62 0.79 0.55 0.59 0.74 0.71 0.55 0.39 0.33 0.36 0.35 0.35 0.22 0.24 0.29 0.12 0.16 0.21

Blanking plate VVQ1000-10A-1 Individual SUP spacer VVQ1000-P-1-C6 SUP shutoff position: Specify 2 positions. Individual EXH spacer VVQ1000-R-1-C6 EXH shutoff position: Specify 2 positions.

C6: One-touch fitting for 6 VVQZ200-10A-2 VV3QZ22-05C 2.10-13 VQZ100/200/300 Body Ported Dimensions: VQZ100 VV3QZ12C Station (5.5) (35) Grommet (G) (11) 27 2-4.5 Mounting holes n-C3, C4, C6, M5 C3: One-touch fittings for 3.2 C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread (4.5) (7.5) 20 DIN rail clamp screw 5.5 U side n Manual override 5 A 2 A 2 A 2 A 2 4 P=10.5 (L4

double (24 VDC) SY3230-5U1-C6 (1 set) 2-position single (24 VDC) SY3130-5U1-C6 (2 sets) SS5Y3-12SNAN-04D 1 set (Type 12 4-station manifold base part no.)

Effective area (Cv) (1) 0.8MPa 0.15MPa 5 to 50C 18mm2 (1.0) 180 c.p.m SUP side pressure (P1) To CYL port Note 1) As per JISB8375-1981 (Supply pressure: 0.5MPa) Max. operating frequency Dimensions 17.5 37.5 (1.5) Valve Manifold 25 45 4 4 4 2 2 2 A A A 4 B B B 2 A 2-Rc(PT)1/8, 1/4, C6, C8 C6: One-touch fitting ass'y for 6 C8: One-touch fitting ass'y for 8 B 2-Rc(PT)1/8, 1/4, C6, C8 C6: One-touch

SUP/Common EXH 2 to 20 stations Valve Rc 1 8 Model Manifold type P(SUP)/R(EXH) Valve stations 4(A), 2(B) port location Port size 1(P), 3/5(R) port 4(A), 2(B) port M5 x 0.8, C4, C6 Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size 1(P), 5/3(R) port Manifold 2 (B), 4(A) port C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1/8 1/8 1/8 M5 x 0.8 C4 C6 0.46 0.62 0.79

(g) Applicable valve model Applicable stations Series Base model Port size Port location 1(P), 3(R) 2(A) C3 (For 3.2) C4 (For 4) C6 (For 6) M5 (M5 thread) 2 stations: 83 Addition per/station: 19 2 to 20 stations VV3QZ12VQZ115 Rc 1/8 VQZ100 Top V100 2 stations: 68 Addition per/station: 20 C4 (For 4) C6 (For 6) M5 (M5 thread) 2 to 20 stations VV3QZ22VQZ200 Rc 1/8 Top VQZ22 SY SYJ C6 (For 6

(Manifold base) SYJ512-5LZ-M5 .2 pcs. (Valve) SYJ500-10-1A .1 pc. (Blank plate ass'y) VQ SS3YJ5-41R-03-C6 .1 pc. (Manifold base) SYJ514R-5G .2 pcs. (Valve) SYJ500-10-3A . 1 pc.