Aluminum High Vacuum Angle Valve N P R Port P (Pressure port) In case of double solenoid valve Port R (Exhaust port) Q K L M B EB EA P A In case of single solenoid valve Port R (Exhaust port) (mm) P K L M N Q R Model XLCV-50 XLCV-63 XLCV-80 12.5 9.5 9.5 1 1 23.5 52.6 17.4 9.5 9.5 1 1 18.6 62.3 23.5 9.5 9.5 1 1 12.4 70.8 Other dimensions are the same as the XLC.
A R 04 Z A q w e r u t y N Common Supply Type 1.
stations) Regulator (Except manifold) (80 x n) + 23 (79 x n) + 25 (188 x n) + 43 (187 x n) + 45 Common IN Individual IN Common IN Individual IN 1 8 1 8 1 4 1 8 1 8 1 8 1 8 1 8 ARM1000 57 ARM2000 136 How to Order Option ARM 1000 A1 5 01 G 1 1 0.2 MPa setting Note 1) Pressure gauge for 1.0 MPa is used.
stations) Regulator (Except manifold) (80 x n) + 23 (79 x n) + 25 (188 x n) + 43 (187 x n) + 45 Common IN Individual IN Common IN Individual IN 1 8 1 8 1 4 1 8 1 8 1 8 1 8 1 8 ARM1000 57 ARM2000 136 How to Order Option ARM 1000 A1 5 01 G 1 1 0.2 MPa setting Note 1) Pressure gauge for 1.0 MPa is used.
Size 4 6 5/32 1/4 Size 6 8 1/4 5/16 Symbol C4 C6 N3 N7 Symbol C6 C8 N7 N9 Straight type Elbow type Straight type Elbow type V R W X S T Y U One-touch fittings for regulator block One-touch fittings for centralized supply block Fitting size Elbow W Elbow X Elbow Y Straight V Fitting size Elbow S Elbow T Elbow U Straight R 4, 5/32 2.5 6 11 35.5 4, 5/32 6 3 6.5 11 36 6 3 12.5 19 35.5 1/4 6.5
(Station 1) Light/Surge voltage suppressor Side A: Orange Side B: Green 18.9 (DIN rail dimension) (62.4) ON ON 43.5 OFF OFF (7.5) 34.2 Switch (when equipped with switch) Internal pilot manifold L: Dimensions n: Stations (n1 + n2) External pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 110.5 100 81 15 L n 2 123 112.5 91.5 16 3 123 112.5 91.5 16 4 135.5 125 102 17 5 148 137.5 112.5
8 C4, C6 C4, C6 Rc 1/8 VZ215VZ225Base mounted (Without sub-plate) VVZ200-31A-2 VVZ200-32A-2 M5 x 0.8 Rc 1/8 VZ212--M5 VZ222--M5 Body ported VP Port size Applicable valve model VG VV3Z2-20-061 VP Blanking plate VVZ200-32A-1 VVZ200-31A-1 S070 Screws and Gasket Assembly Part No.
Material Aluminum die-casted Note Platinum silver q Description Sub-plate Platinum silver Solenoid assembly Common with Series VZ 000 1 5 Thread type Nil: Rc F : G N: NPT T : NPTF u Aluminum die-casted DXT192-14-1P Piston plate Body DXT170-CEpoxy/Stainless steel Resin Resin Black i w e Piston Spool valve NBR 13 x 11 x 1 O-ring o r Aluminum, HNBR t Resin End cover y Stainless steel Spool
1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !
Speed regulation range (s/90) CRB1 0.082 J 0.12 J 0.398 J 0.6 J 0.112 J 0.16 J 0.54 J 0.811 J Allowable kinetic energy 245 N 390 N 490 N 588 N 245 N 390 N 490 N 588 N Allowable radial load Shaft load MSU 196 N 340 N 490 N 539 N 196 N 340 N 490 N 539 N Allowable thrust load Bearing Bearing CRJ Side ported or Axial ported Port location Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Side ported CRA1 Size Rc 1/
1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !
Single vane type Double vane type 90 180 270 90 r a n n o n a g r e g ti n 2 e a o n r a o n 7 ti t g ti 1 a o 0 e a t 8 o r 9 t +4 0 r 0 o 0 y y r e +4 0 +4 0 e Key y K K e K Key Key +4 0 (45) 0 Standard Optional Key 9 e g n ra n o ti a t o r (90) y e K (45) (45) A port A port A port A port B port B port B port B port 100 190 280 100 a r n n g a r n n o g e io e ti at r n a 1 o a n 1
7 @4 @1 e u !9 !8 @5 @3 w !6 !5 !1 !2 !0 Actuators !3 !
7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I
(21 mA) 24 VDC 12 VDC Power consumption (Current) 1 W DC (83 mA), 0.5 W DC (42 mA) Note 1) Use dry air to prevent condensation at low temperatures.
Example PSS5YJ5-20-03 1 pc. (Manifold base) SYJ5120-5G-M5 2 pcs. (Valve) SYJ5000-21-1A 1 pc. (Blank plate ass'y) PSS5YJ5-43-03-C4 1 pc. (Manifold base) SYJ5140-5LZ 1 pc. (Valve) SYJ5240-5LZ 1 pc. (Valve) SYJ5000-21-1A 1 pc.
-42Stations -C4, C6 (Pitch) 2 x 4.5 Manual override (Non-locking) (Mounting hole) 300 (Lead wire length) 4 x Rc 1/8 (P, R port) (Station n) (Station 1) 300 (Lead wire length) 2 x 4.5 VV061 Max.5.5 (Pitch) (Mounting hole) Manual override (Non-locking) VV100 V100 (Station 1) (Station n) S070 (Pitch) n x Rc 1/8 (A port) VQD VQD-V (Pitch) n x One-touch fitting C4: Applicable tubing T0425 C6:
side of A port Nil 1 8 01 Rc VFN Nil Rc G NPT NPTF C4 4 cassette P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 F N T Same side of A port S C6 6 cassette Valve stations Type S42 (Solenoids on the same side of A port) 01 1 station 20 20 stations P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH How to Order Type 21: Body ported (A port top ported) Applicable solenoid valve
01/(N)02/F01 -59No.PF-OMJ0006-J PFM7-(N)01L/(N)02L/F01L -60No.PF-OMJ0006-J PFM7S-(N)01/(N)02/F01 -61No.PF-OMJ0006-J PFM7S-(N)01L/(N)02L/F01L -62No.PF-OMJ0006-J PFM7-F02 -63No.PF-OMJ0006-J PFM7-F02L -64No.PF-OMJ0006-J PFM7S-F02 -65No.PF-OMJ0006-J PFM7S-F02L -66No.PF-OMJ0006-J PFM7-C4/C6/C8/N7 -67No.PF-OMJ0006-J PFM7-C4L/C6L/C8L/N7L -68No.PF-OMJ0006-J PFM7S-C4/C6/C8/N7 -69No.PF-OMJ0006-J PFM7S-C4L
Series 10-VQD1000 [Option] 4 Port Direct Operated Poppet Solenoid Valve How to Order Valve Clean series Valve option Nil Standard (2 W) V Vacuum (2 W) U For large flow (3.2 W) W For large flow, Vacuum (3.2 W) Energy saving type Rated voltage 5 24 VDC 6 12 VDC Body type 2 Body ported (Single unit) 3 Body ported (Manifold) 5 Base mounted 10 V Q D 1 1 5 1 U 5 L M5 Electrical entry