5 Port Air Operated Valve Series SYA3000/5000/7000 1

mounted P, R port thread type Series 3 SYA3000 5 SYA5000 Nil Rc G F 40 SYA 7 1 Base mounted N NPT NPTF T P, R port thread type Type of actuation Nil Rc 2 position single G F Port size 1 N NPT Symbol Applicable series Nil Port size Without sub-plate NPTF T 2 position double 1 8 01 SYA3000 Port size With sub-plate 2 Symbol Nil Port size Without sub-plate Without sub-plate (Pilot port: Expect

SYA3000/5000/7000

side bracket Series SYA5000 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 8 One-touch fitting for 10 3 SYA3000 5 SYA5000 SYA7000 7 SYA7000 SYA 5 1 C6 20 Body ported 40 SYA 5 1 Base mounted P, R port thread type Series 3 SYA3000 5 SYA5000 Rc Nil G F 40 SYA 7 1 Base mounted N NPT NPTF T P, R port thread type Type of actuation Rc Nil 2 position single G F Port size 1

Serial Transmission System Series EX250 Series EX500

P, R ports Stations Note 4) K 01 1 station N R S T Note 5) Note 6) The maximum number of stations differs depending on the electrical entry.

Digital Flow Switch (Integrated display type)

(Page 74) 8010 0x1F4A 0 R PD conversion equation : b F32 N 8020 0x1F54 0 R Instantaneous flow peak value S16 N -200 to 4000 The conversion method from the communication value to the actual measurement value is the same as the method for process data. 8030 0x1F5E 0 R Instantaneous flow bottom value S16 N -200 to 4000 Accumulated flow value measured value (temporary value) S16 N 0 to 9 1 R

VZ3000

VFR Thread type 1 3 5 F Z Plug-in VZ3 4 VP4 Note) VZS 1 0 5 L Non plug-in VZ3 4 VFS Type of actuation Thread type VS4 2 position single Nil Rc F N T G NPT VQ7 1 Body option NPTF EVS 0: Individual exhaust for the pilot valve Port size 2 position double 1 8 Nil: Without sub-plate 01: Rc With sub-plate VFN 2 3(R) port PE port 3: Common exhaust type for main and pilot valve 3 position closed

3 Port Solenoid Valve Metal Seal Series VZ200 1

8 C4, C6 C4, C6 Rc 1/8 VZ215VZ225Base mounted (Without sub-plate) VVZ200-31A-2 VVZ200-32A-2 M5 x 0.8 Rc 1/8 VZ212--M5 VZ222--M5 Body ported VP Port size Applicable valve model VG VV3Z2-20-061 VP Blanking plate VVZ200-32A-1 VVZ200-31A-1 S070 Screws and Gasket Assembly Part No.

SY3000/5000/7000/9000 Series (Pilot Valve:V100)

Note A,B port SY3000(metric size) C4:With one-touch fitting for 4 C6:With one-touch fitting for6 (inch size) N3:With one-touch fitting for5/32 For 45(N)F (D-sub connector) SX3 5000-50-3AFor 45(N) (Flat ribbon cable) N7:With one-touch fitting for1/4 A,B port SY5000(metric size )C4:With one-touch fitting for4 C6:With one-touch fitting for6 C8:With one-touch fitting for8 (inch size) N3:With

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

to 12 stations 24 D side D-sub connector kit P kit Note 1) 1 to 12 stations 24 D side Flat ribbon cable connector kit 26P 20P ( ) 1 to 9 stations 18 J kit Flat ribbon cable (20P) PC wiring system compatible D side JD0 1 to 8 stations 16 Flat ribbon cable (20P) (PC wiring system compatible) D side U side D side U side D side U side LD0 (N) LU0 (N) LD1 (N) LU1 (N) LD2 (N) LU2 (N) SDF SDH

VK300

side of A port Nil 1 8 01 Rc VFN Nil Rc G NPT NPTF C4 4 cassette P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 F N T Same side of A port S C6 6 cassette Valve stations Type S42 (Solenoids on the same side of A port) 01 1 station 20 20 stations P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH How to Order Type 21: Body ported (A port top ported) Applicable solenoid valve

ZSE40/ISE40

SET [N] H (Fixed hysteresis) = 3 digits H H ON ISA2 Window comparator mode OFF OUT1: Selection of the output mode NO n-1 n-2 IS High pressure (for positive pressure/compound pressure) High vacuum (for vacuum pressure) ZSM Auto Preset (For adsorption confirmation) PF2 1. Auto preset mode 2. Preparation for auto preset 3. Auto preset of OUT1 IF Data SET Press the SET button.

5 Port Air Operated Valve SYA3000/5000/7000 Series

side bracket Series One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 8 One-touch fitting for 10 SYA5000 3 SYA3000 5 SYA5000 SYA7000 7 SYA7000 SYA 5 1 C6 20 Body ported 40 SYA 5 1 Base mounted Series 3 SYA3000 5 7 SYA5000 SYA7000 P, R port thread type Type of actuation Nil Rc 2 position single (A)4 2(B) G F N NPT 1 NPTF T 1 (P) (EA)5 3(EB) Port size 2 position double

VK300

-42Stations -C4, C6 (Pitch) 2 x 4.5 Manual override (Non-locking) (Mounting hole) 300 (Lead wire length) 4 x Rc 1/8 (P, R port) (Station n) (Station 1) 300 (Lead wire length) 2 x 4.5 VV061 Max.5.5 (Pitch) (Mounting hole) Manual override (Non-locking) VV100 V100 (Station 1) (Station n) S070 (Pitch) n x Rc 1/8 (A port) VQD VQD-V (Pitch) n x One-touch fitting C4: Applicable tubing T0425 C6:

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Note Mounting position Without power supply terminals With power supply terminals 1: Perpendicular connector 2: Lateral connector P: Positive common N: Negative common 1 2 D side SZ3000-40-2A-D For D-sub connector 1 2 P N SZ3000-40-1A-D 1 2 1 2 P N D side SZ3000-40-4A-D For flat cable 26 pins SZ3000-40-3A-D Note) The assembly part numbers with power supply terminals are 24VDC specifications

ZR

Nil F G Rc Example) Attached to the first and third stations ZR1-RV1-1 ZR1-RV1-3 ZR1-R1-A3 T NPTF Example) Attached to the first and third stations ZR1-R1-1 ZR1-R1-3 Example) ZZR106-R .1 pc. (Manifold base only) ZR120S1-K15MZ-EC ... 5 pcs. (Unit) ZR1-BM1 . 1 pc. (Blank plate) ZR1-R1-3 . 1 pc.

Compact Vacuum Unit

KJL04-C1-N Unit specifications Nil M P With unit switching function Note 1) SI unit only Note 2) !1 Filter element (10 pcs. in 1 set) With unit switching function (Initial value psi) Note 1) Note 1) The unit switching function is not available in Japan due to a new measurement law.

VK3000

direction 01 1 station Solenoid on same side of A and B port A port: Rc 1/8 B port: Rc 1/8 Nil P port: Rc 1/8 Thread type R port: Rc 1/8 20 Type S42 Solenoid on same side of A and B port 20 stations Type VK334 Nil F N T Rc S Port size Type VK3140 G P port: Rc 1/8 1 8 01 Rc C6 6 cassette NPT R port: Rc 1/8 NPTF B port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH Type 21: Body ported (

PFxx-OMJ0005CN

7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I

ZQ-OM01301

*Refer to the Operation Manual for details on setting the ZSE10 (for ZSE10 series). 5.2.2 Pressure switch for vacuum with energy saving function NPN (1 output) PNP (1 output) Pressure switch (NPN specifications) Pressure switch (PNP specifications) (PNP ) (NPN ) Brown + Brown + B r o w n Lord OUT1 Black Black Load OUT1 B l a c k Gr ay Main circuit Lord OUT2 M a i n c i r c u i t Main circuit

VK3000

Applicable blanking plate assembly VK3000-7-1A 01 1 station Solenoid on opposite side of A and B port P port: Rc 1/8 A port: M5 x 0.8 B port: M5 x 0.8 Nil R port: Rc 1/8 Thread type Type S41 20 20 stations Solenoid on same side of A and B port Type VK334 Type VK3140 P port: Rc 1/8 R port: Rc 1/8 S Nil Rc Port size Q CE-compliant Nil CE-compliant F N T G M5 M5 x 0.8 C4 4 cassette NPT B port

4 Port Solenoid Valve Series VQD1000

U side 1 2 3 4 5 n Direct manual override (Non-locking) 2n x C4, M5 4(A), 2(B) port C4: One-touch fitting for 4 M5: M5 thread 2(B) 2(B) 27.5 20 15 4(A) 4(A) 5 P = 11 12.5 (46) L plug connector (L) n: Stations Dimensions n L 11 138 130 10 127 119 L1 L2 2 39 31 3 50 42 4 61 53 5 72 64 6 83 75 7 94 86 8 105 97 9 116 108 12 149 141 13 160 152 14 171 163 15 182 174 16 193 185 17 204 196 18 215