Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

With external pilot specifications (Pitch) 48.6 21.3 P = 20.5 18 11 23.5 11.8 11.6 13.5 36.1 37.6 60.3 3 5 E 3 5 E 4 A 4 A 4 A 4 A 4 A 36 76.8 3 5 3 5 E E 59.5 4 A 4 A 4 A 4 A 4 A 2 B 2 B 2 B 2 B 2 B 1 P 1 P C2 2 B 2 B 2 B 2 B 2 B 1 P C2 1 P X PE X PE C1 2 x M12 C1 One-touch fitting [X: External pilot port] Applicable tubing O.D.: 6 1/4" One-touch fitting [PE: Pilot EXH port] Applicable tubing

MY1

4 C-14 MYM16-15AK0500 GMY16 MYB16-15-A7163 P12 4 x 1.8 x 1.1 7 x 4 x 1.5 MYM20-15AK0501 GMY20 MYB20-15-A7164 P16 5.1 x 3 x 1.05 7 x 4 x 1.5 MYM25-15AA5903 GMY25 RCS-8 TMY-25 7.15 x 3.75 x 1.7 C-6 MYM32-15AA5904 GMY32 RCS-10 TMY-32 8.3 x 4.5 x 1.9 C-7 MYM40-15AA5905 GMY40 RCS-12 TMY-40 C-4 C-9 MYM50-15AK0502 GMY50 MC-16 P44 C-4 C-11.2 2 2 2 2 2 4 Note) Two types of dust seal band are available

Base Mounted Metal Seal/Rubber Seal Series VQ

VQ0 L VQ4 kit VQ5 VQZ VQD P. 2-4-146 P. 2-4-150 P. 2-4-154 Terminal block box L Enclosure IP65 compliant kit Enclosure IP65 compliant Enclosure IP65 compliant W type only P. 2-4-146 P. 2-4-150 P. 2-4-154 P. 2-4-158 C kit P. 2-4-196 P. 2-4-200 P. 2-4-204 Terminal block C kit P. 2-4-196 P. 2-4-200 P. 2-4-204 Terminal block 2-4-117 2-4-118 Cylinder Speed Chart Use as a guide for selection.

Vacuum Pad

W Dimensions: With Adapter ZP2-T W-B5 ZP2-T 20 W-B5 7 7 20 8 12 11 M5 x 0.8 M5 x 0.8 4 4 6 6 A (14) (14) 8 8 Y Y a A a C C b B 20 21 Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y Model ZP2-T3507W-B5 ZP2-T4010W-B5 ZP2-T5010W-B5 ZP2-T6010W-B5 ZP2-T4020W-B5 ZP2-T5020W-B5 ZP2-T6020W-B5 ZP2-T8020W-B5 2 x 1.5 0.5 0.5 10 11 2.5 0.8 ZP2

Vacuum Pad

W Dimensions: With Adapter ZP2-T W-B5 ZP2-T 20 W-B5 7 7 20 8 12 11 M5 x 0.8 M5 x 0.8 4 4 6 6 A (14) (14) 8 8 Y Y a A a C C b B 20 21 Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y Model ZP2-T3507W-B5 ZP2-T4010W-B5 ZP2-T5010W-B5 ZP2-T6010W-B5 ZP2-T4020W-B5 ZP2-T5020W-B5 ZP2-T6020W-B5 ZP2-T8020W-B5 2 x 1.5 0.5 0.5 10 11 2.5 0.8 ZP2

Vacuum Pad

W Dimensions: With Adapter ZP2-T W-B5 ZP2-T 20 W-B5 7 7 20 8 12 11 M5 x 0.8 M5 x 0.8 4 4 6 6 A (14) (14) 8 8 Y Y a A a C C b B 20 21 Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y Model ZP2-T3507W-B5 ZP2-T4010W-B5 ZP2-T5010W-B5 ZP2-T6010W-B5 ZP2-T4020W-B5 ZP2-T5020W-B5 ZP2-T6020W-B5 ZP2-T8020W-B5 2 x 1.5 0.5 0.5 10 11 2.5 0.8 ZP2

Vacuum Pad

W Dimensions: With Adapter ZP2-T W-B5 ZP2-T 20 W-B5 7 7 20 8 12 11 M5 x 0.8 M5 x 0.8 4 4 6 6 A (14) (14) 8 8 Y Y a A a C C b B 20 21 Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y Model ZP2-T3507W-B5 ZP2-T4010W-B5 ZP2-T5010W-B5 ZP2-T6010W-B5 ZP2-T4020W-B5 ZP2-T5020W-B5 ZP2-T6020W-B5 ZP2-T8020W-B5 2 x 1.5 0.5 0.5 10 11 2.5 0.8 ZP2

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

dimensions AXT100-FC1 2 3 1 11 VZ1000 Refer to the table below for dimension L.

42

SYJ Bottom 1/2 SZ n: Stations VF Flow Rate Characteristics at the Number of Manifold Stations (Operated individually) VP4 Model Passage/Stations Station 1 Station 5 Station 10 C [dm3/(sbar)] 11 11 11 VQ 1/2 1 4/2 (P A/B) b 0.24 0.24 0.24 Cv 2.7 2.7 2.7 2-position metal seal VQ5 1 200 VQ 4/5 VQ 4/5 C [dm3/(sbar)] 12 12 12 4/2 5/3 (A/B EA/EB) b 0.14 0.14 0.14 VQC 1/2 Cv 2.9 2.9 2.9 C [dm3

XL

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

Electric Actuator/Slider Type

5 A-A t y @2 C B e @1 !0 C B r w C-C B-B !4 !2 Body Table !3 Component Parts No. Description Material Note No.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

-7-11 to 11-7-12 for other specifications. 11-7-5 6 Series CRA1 Shaft Variations (Size 30) Shaft Type: S, X, Y, Z Mounting Shaft type 30 Rotating angle C RA1 Refer to How to Order on pages 11-7-2 to 11-7-13.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

-7-11 to 11-7-12 for other specifications. 11-7-5 6 Series CRA1 Shaft Variations (Size 30) Shaft Type: S, X, Y, Z Mounting Shaft type 30 Rotating angle C RA1 Refer to How to Order on pages 11-7-2 to 11-7-13.

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

Electric Slide Tables

7 @6 r w @9 @7 @8 e u @0 i y D A A D C-C D-D B-B !5 !1 !9 @3 #0 q @4 E C C E !4 !2 !0 !8 @1 !6 t o @2 @5 !3 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 No.

Programless Controller Series LECP1

Connector C Actuator side (8) (Terminal no.) 1 2 5 6 (14) (18) A1 B1 (13.5) Cable length (L)[m] 1 3 5 8 A B C (17.7) (17.7) 1 2 1.5 3 5 8 A6 B6 (30.7) Connector A 15 16 (14.7) Connector D L (11) (10) 10 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) Controller side 15 (14.2) Connector C (Terminal no.) 1 2 5 6 20 (5.5) (6.3) Actuator side (14) (18) (Terminal

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

SV

With External Pilot Specifications Ground terminal 46.5 (Pitch) 23.5 21.3 P = 20.5 18 11 16.5 2-M12 17.7 11.6 13.5 SV 36.1 83.8 5 37.6 42.7 3 3 PWR 3 3 3 5 PWR T T 3 5 E E 3 5 E 3 5 4 A E 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 60.3 2 2 2 2 76.8 SZ 1 1 1 1 BUS 4632 BUS 4632 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 4632 4632 1 P 1 P 1 P 1 P One-touch fitting [1(P), 3/5(E) port] Applicable tubing

Battery-less

Brown 12 Black 13 Red 7 Black 6 Orange 9 Black 8 Yellow 11 Black 10 Black 3 Robotic cable A B-2 A A-2 B B-3 B A-3 SD+ (RX) B-4 SD (TX) A-4 Signal Connector C terminal no.

Basic type / Direct mount type Series CY3B/CY3R

1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R20 CY3R63 1000 200 Allowable driving force Fn (N) Allowable driving force Fn (N) 100 500 400 50 300 30 200 100 10 20 30 40 50 Usable range 5 Usable range 1 0 1 2 3 4 5 6 10 7 8 9 10 11 12 13 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15