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New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

Air Checker:

For Positive Residual Pressure Compact/lightweight electronic pressure switch Addition of vacuum range (14.5 to 0 psi) (100 to 0 kPa) Easy adjustment of pressure setting trimmer New New Positive pressure adjustment range 220n 0 psi (0 MPa) Vacuum adjustment 30 range 0 psi 14.5 psi 14.5 psi 65 psi/ 58 psi AIRCHECKER PS1000-R06L (0 kPa) + 13 (100 kPa) (0.1 MPa) (0.45 MPa/0.4 MPa) PS1000/1100

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242 342 402 452 115 230 400 560 242 342 402 452 115 230 400 560 850 1100 23 Series HRG Operation Panel Display HRG001/002/005 No.

ø 40, ø 50, ø 63, ø 80, ø 100 CE2 Series Stroke Reading Cylinder with Brake Note) CE-compliant: When connecting to a multi-counter (CEU5  -D, power supply voltage 24 VDC). Refer to the counter operation manual for details. Note)

Bore size (mm) Standard stroke (mm) Range of manufacturable stroke* Without rod boot With rod boot Without rod boot With rod boot 40 25 to 850 25 to 700 Up to 1200 Up to 950 50 25 to 800 25 to 650 Up to 1150 Up to 900 63 25 to 800 25 to 650 Up to 1150 Up to 900 80 25 to 750 25 to 600 Up to 1100 Up to 900 100 25 to 750 25 to 600 Up to 1100 Up to 850 Refer to pages 692 to 697 for cylinders

Thermo-chiller Series HRS Compact Type (Except HRS050)

Thermo-chiller Series HRS Compact Type (Except HRS050) RoHS How to Order HRS 018 A 10 Single-phase 100/115 VAC Option Symbol Nil B J M Cooling capacity 012 018 Cooling capacity 1100/1300 W (50/60 Hz) Cooling capacity 1500/1700 W (50/60 Hz) Option CE/UL None With earth leakage breaker With automatic water supply function Applicable to DI water (deionized water) piping Note) UL standards: Applicable

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Flow-rate Characteristics Note) Values when the main valve is fully open Male thread nozzle High efficiency nozzle 1L = 0.035 SCFM 1L = 0.035 SCFM 14.5 29.0 43.5 58.0 72.5 87.0 102 116 131 145 psi 14.5 29.0 43.5 58.0 72.5 87.0 102 116 131 145 psi 1500 1400 1300 1200 1100 1000 900 800 700 600 500 400 300 200 100 400 VMG1-R02-400:4 KNH-R02-200 VMG1-R02-350:3.5 350 VMG1-R02-300:3 Flow rate [

Modular/F.R.L. Units Series AC

1100 Polycarbonate Bowl material AL Semi-standard Standard Bowl guard Relieving type Regulator construction AW 0.74 0.88 0.95 1.76 1.83 Mass (kg) AG Note 1) Pressure gauge connection threads are not available for F.R.L. unit with a square embedded type pressure gauge or with a digital pressure switch (AC20C to AC40C).

Mist Separator Series AFM20/30/40

200 450 1100 0.3 m (95% filtered particle size) Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2) Nominal filtration rating Outlet side oil mist concentration Bowl material Bowl guard Drain capacity (cm3) Weight (kg) Polycarbonate Option 8 0.18 Standard 45 0.44 AFM30 45 0.49 25 0.22 Note 1) When the inlet pressure is 0.7 MPa.

Compact Hydraulic Cylinder

Theoretical output (N) = Pressure (MPa) x Piston area (mm2) Mass Unit: g Male thread additional mass 5 Cylinder stroke (mm) Bore size (mm) 10 15 20 25 30 35 40 45 50 75 100 20 32 40 50 63 80 100 180 200 220 240 260 280 300 320 340 360 10 610 710 330 350 370 390 410 430 450 470 490 510 52 760 860 480 500 520 540 560 580 600 620 640 660 52 1250 1400 860 890 920 950 980 1010 1040 1070 1100

Basic type / Direct mount type Series CY3B/CY3R

Caution Symbol Specifications Theoretical Cylinder Thrust Head resistant cylinder (10 to 150C) XB6 XB9 Low-speed cylinder (15 to 50mm/s) 6, 10 15, 20, 25, 32, 40 XB11 Long stroke type XB13 Low-speed cylinder (7 to 50mm/s) 1200 100 XC24 With magnetic shielding plate 40 40 1100 90 XC57 With floating joint 1000 900 Bore size 10 Bore size 10 Theoretical thrust (N) Theoretical thrust (N) 80 X116

Refrigerated Air Dryers Series IDF/IDU

11.5 8.7 4.1 5.9 50 Hz 13.0 10.2 4.5 6.4 60 Hz Inlet air pressure 0.7 (MPa) Inlet air temperature 55 (C) Ambient temperature 32 (C) 10 Outlet air pressure dew point (C) Power supply voltage (frequency) Three-phase: 200 VAC (50 Hz) Three-phase: 200/220 VAC (60 Hz) Power consumption (W) 50/60 Hz Operating current (A) 50/60 Hz Applicable circuit breaker capacity Note 4) 1530/2000 2200/2850 1100

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

AC Servo Motor Driver (CC-Link Type)

When using signal of the servo on (SON) by the I/O signal (CN6) . 0100 4 in HEX 0 0 in HEX 1100 C in HEX 0 0 in HEX When using signal of the Automatic/manual selection (MD0) by the I/O signal (CN6) 0001 1 in HEX 0 0 in HEX 1000 8 in HEX -44- * Enabling Servo-on (SON) and Automatic/manual selection (MD0) Signals Set PD12 to 0C04 and PD14 to 0801 in the I/O setting tab.

AC Servo Motor Driver (CC-Link Type)

When using signal of the servo on (SON) by the I/O signal (CN6) . 0100 4 in HEX 0 0 in HEX 1100 C in HEX 0 0 in HEX When using signal of the Automatic/manual selection (MD0) by the I/O signal (CN6) 0001 1 in HEX 0 0 in HEX 1000 8 in HEX -49- * Enabling Servo-on (SON) and Automatic/manual selection (MD0) Signals Set PD12 to 0C04 and PD14 to 0801 in the I/O setting tab.

OMU0023

Modbus RTU protocol (Hexadecimal notation) Request data 01 08 0 1234 ED7C Response data (normal response) 01 08 0 1234 ED7C (Binary notation) Response data 0001 1000 0 0 0001 0010 0011 0100 1110 1101 0111 1100 Response data (normal response) 0001 1000 0 0 0001 0010 0011 0100 1110 1101 0111 1100 For correspondence between ASCII notation and ASCII hexadecimal notation, refer to the 8.4 ASCII

Modular F.R.L. Unit

AC30C Air filter AF40 AF40-06 AF30 AF20 AF30 Mist separator AFM40 AFM40-06 AFM30 AFM20 AFM30 Component Regulator AR40 1/4 3/8 1/2 1/4 AR40-06 AR25 AR20 AR30 1/4 1/8 1/4 3/4 Port sizes 3/8 1/4 3/8 Note 1) 1/4 1/8 1/8 1/8 Air Pressure gauge port size Fluid Proof pressure Maximum operating pressure 1.5MPa 1.0MPa 0.05MPa Minimum operating pressure Set pressure range 0.05 to 0.85MPa Note 2) 1100

Modular Type Air Filter Series AF

200 450 1100 0.3m (95% filtered particle size) Maximum 1.0mg/m3 (ANR) (approx. 0.8ppm) Note 2) Nominal filtration rating Outlet side oil mist concentration Bowl material Bowl guard Drain capacity (cm3) Weight (kg) AFM30 Polycarbonate option 8 0.18 Standard 45 0.44 45 0.49 25 0.22 Note 1) When the inlet pressure is 0.7MPa.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Theoretical Cylinder Thrust Symbol Specifications 1200 -XB11 -XB13 -X116 -X132 -X160 -X168 -X206 -X210 -X322 -X324 -XC57 Long stroke (2001mm and up) Low speed specifications (7 to 50mm/s) 1100 Hydro specifications 40 40 Axial ports 1000 High speed specifications Helical insert thread specifications 900 Added mounting tap positions for slider Oil-free exterior specifications Theoretical thrust

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solen1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

Heavy Duty Stopper Cylinder Series RSH/RS1H

RSH20, 32 Graphq Graphw 1.0 RSH20 RSH32 0.9 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 Operating pressure P [MPa] 0.8 1300 1300 80 0.7 1200 1200 0.6 1100 1100 0.5 1000 1000 0.4 900 900 0.3 63 80 Load weight m [kg] Load weight m [kg] Load weight m [kg] Load weight m [kg] 0.2 800 800 50 0.1 700 700 600 600 0 500 100 200 300 400 63 Lateral load F [N] 500 500 50 400 400 RS1H50, 63,