Vacuum Pad

ZP2A-TF1 ZP40H ZP50H ZP40HB ZP50HB ZP2A-XF1 ZP40H ZP50H ZP40HB ZP50HB M14 x 1 M14 x 1 Width across flat 19 (Hexagon) Width across flat 19 (Hexagon) Rc1/8 Width across flat 19 (Hexagon) Width across flat 19 (Hexagon) 5 5 21 5 5 21 59.5 3 x M3 x 0.5 47.5 3 x M3 x 0.5 32 21.5 21.5 7 7 30 30 7.3 14.5 14.5 7.3 30 18 2 2 M5 x 0.8 18 30 With three M3 bolts With three M3 bolts Applicable pad part

SV

L Dimension n: Stations L n 2 123 112.5 90.5 19.5 63 3 135.5 125 101 20.5 73.5 4 148 137.5 111.5 21.5 84 5 160.5 150 122 22.5 94.5 6 173 162.5 132.5 23.5 105 7 173 162.5 143 18 115.5 8 185.5 175 153.5 19 126 9 198 187.5 164 20 136.5 10 210.5 200 174.5 21 147 11 223 212.5 185 22 157.5 12 235.5 225 195.5 23 168 13 235.5 225 206 18 178.9 14 248 237.5 216.5 19 189 15 260.5 250 227 20 199.5 16

Vacuum Module Series ZX

RESET button 3.6(Mounting hole) SET button 18.7 19 10 1 22.6 ZMA 2 x R1.8 3.6 2 x R1.8 (Mounting hole) (Mounting hole) (Mounting hole) 17.8 1 10 ZQ 19 Pilot valve for supply Release valve ZH Adsorption confirmation switch ZU Release flow rate 2 x 3.3 (Mounting hole) Interface plate adjusting needle A Vacuum port (V) ZL A Vacuum port (V) M5 (or M6) ZY Pitch = 10 M2.5 x 63 Philips screw Air

MXQ

19 19 19 27 47 47 47 47 57 36 66 84 75 84 75 75 Note) Use the average speed when calculating static moment.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

override 14 L2 4 x 4.5 (For mounting) 32.5 19 85.9 [88.1] 85.1 [87.3] 107.4 [111.8] 62.9 (DIN: 64.2) R P R B B B B B 63.7 (DIN: 65) R P R 18.5 18 59.9 (4.9) 19 21.9 31.4 A A A A A (DIN: 15.2) 1/4 (P, R port) 13.9 (Pitch) P = 19 29 (Station n) (Station 1) (Light/surge voltage suppressor) + + + 74 [81] A 58.6 A 42 8.5 29.5 B B 8 (Pitch) P = 19 25 One-touch fitting (A, B port) Applicable tubing

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Non-locking) 55.5 [62] 43.1 36.5 25.5 49 A A 19 9.5 21 (Pitch) n-Rc (PT)1/8 P=17 21 (A port) A A 19 9.5 18.5 (Pitch) n-M5 X 0.8 P=16 16 (A port) [ ] for AC Other dimensions are the same as the M5.

VQC

For example, changing from F Kit (D-sub connector) to S Kit (serial transmission) is achieved by simply changing the kit piece. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring (Refer to the connector wiring diagram) Printed circuit board patterns between connectors are shifted at every station

4/5 Port Air Operated Valve Series SYJA3000

) Manual override L1 14 L2 4-4.5 (For mounting) 32.5 SV 19 85.9 [88.1] 85.1 [87.3] 107.4 [111.8] 62.9 (DIN 64.2) SZ R P R 63.7 (DIN 65) B B B B B R P R 18.5 18 59.9 (4.9) 19 21.9 31.4 SY A A A A A (DIN: 15.2) SYJ 1/4 (P, R port) 13.9 SX (Pitch) P = 19 29 (Station n) (Station 1) (Light/Surge voltage suppressor) + + + 74 [81] 58.6 A A 42 29.5 8.5 B B 8 (Pitch) P = 19 25 One-touch fitting (A

24

[mm] A B DA FB 30 st or less Over 30 st and up to 100 st Over 100 st and up to 200 st Over 200 st Bore size [mm] DA 12 56 68 97.5 97.5 55 (6) 19 16 62 78 107.5 107.5 59 (8) 19 20 72 89 113 130.5 66 (10) 21 25 78.5 94.5 113.5 130.5 66.5 (10) 20 *: For bore size 12 and 16, only M5 x 0.8 port is available. *: For bore size 20 or more, choice of Rc, NPT, G port is available.

44

19 19 1/2" (12.7) 3/8" (9.53) KQG2 KFG2F1395-N03 42 19 3/8 31.6 15.6 8.5 8.5 51 19 KG KFG2 KFG2 Union Nut: KFG2N MS Weight (g) H (Width across flat) Applicable tubing O.D.

SYJ300/500/700

/Surge voltage suppressor) (Light/Surge voltage suppressor) + + + + 67 [74] + + + + 51.6 67 [74] A A 9.5 35 51.6 35 A A 8.5 (Pitch) P=19 21 One-touch fitting (A port) Applicable tubing O.D.: 6, 1/4", 8, 5/16" (Pitch) P=19 21 1/8 (A port) DIN terminal (D) M8 connector (WO) L plug connector (L) M plug connector (M) 63.5 63.5 63.5 63.5 71.3 [73.5] 81.1 [83.3] 66.3 72.8 80.2 90.2 Max. 10 91.1

Air Slide Table

19 19 19 27 84 75 84 75 84 75 36 47 47 47 47 66 57 Note) Use the average speed when calculating static moment.

ZP

Form w 1 Material e Vacuum inlet r Width across flats J A Connection thread Width across flats L 10 A8 37.5 12.5 10 2 M8 x 1 15 12 4 12 10 2 13 16 38 13 10.5 N S U F GN GS 20 25 A10 48.5 15.5 12.5 2 M10 x 1 20 14 3 16 12 3 32 49 16 13 40 A14 51.5 18.5 12.5 2.5 M14 x 1 20 19 4 21 19 5 50 52.5 19.5 13.5 ZP T F B5 D2 Width across flats K 30 (Rotating angle) 1 N: NBR, S: Silicone rubber, U:

SYJ3000/5000/7000

[111.8] R P R 63.8 (DIN 65.1) 63 (DIN 64.3) R P R B B B B B 122 [126.4] 19 19 19 60 31.5 22 A A A A A 1/4 (P, R port) 13.8 (For DIN: 15.1) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-4.5 (For mounting) (Pitch) P = 20 29 Manual override (Station n) (Station

CG5-S

40 44 to 800 M14 x 1.5 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 50 55 to 1200 M18 x 1.5 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 63 69 to 1200 M18 x 1.5 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 80 80 to 1400 M22 x 1.5 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth

MNB

24 26 26 20 22 28 40 40 30 40 50 60 60 M10 x 1.25 16 19 24 34 34 M10 x 1.25 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 ML1C 12.5 M14 x 1.5 M14 x 1.5 16.5 M18 x 1.5 M18 x 1.5 D23.5 M22 x 1.5 M22 x 1.5 23.5 M26 x 1.5 M26 x 1.5 -X 20Data 9-6-19 20 Series MNB Proper Auto Switch Mounting Position (Detection at stroke

3 Port Air Operated Valve Series SYJA300

67 [74] 51.6 35 27 8 24 (Pitch) P=19 21 1/8 (A port) 4-4-52

Fieldbus System

L1 = 19 x n1 + 166.2 + 47 x n2 L2 = 19 x n1 + 56 L4 = L3 10.5 L5 = (L3 L1)/2 L6 = 47 x n2 + 81.7 n1: Valve stations n2: I/O Unit stations L3: DIN Rail Overall Length [mm] Valve stations I/O (n1) unit stations (n2) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 0 235.5 248 273 285.5 310.5 323 348 360.5 385.5 410.5 423 448 460.5 485.5 498 523 535.5 560.5 573 598 610.5 635.5

Compact Manifold Regulator Series ARM5

19 20 6 6 8, 5/16 8, 5/16 3 11.5 19.5 20 23 1/4 1/4 10, 3/8 10, 3/8 7 11.5 22 22 26 1/4 1/4 19 20.5 515 Series ARM11A/B End Block Pressure Gauge ARM11E L Part no.

7.5

21.5 18 20.5 23 19 21.5 18 20.5 23 19 21.5 18 20.5 23 19 21.5 18 20.5 23 19 14 Series SJ2000/3000 D-sub Connector / Flat Ribbon Cable / PC Wiring Plug-in Connector Type Dimensions: SJ3000 for D-sub Connector SS5J3-60FD U (S, R, RS) 1 2 Stations (Pitch) P = 10 [External pilot spec.] 23.6 12.8 32.1 15.4 15.6 3/5 3/5 2 2 2 2 2 2 2 31 46.2 54.5 1 1 58.2 4 4 4 4 4 4 4 D D D M5 x 0.8 [4(A), 2(