REA/REB

High Precision Guide Type REAH Weights (kg) Model Standard stroke mm 150 200 300 400 500 600 800 1000 Max.

Compact Cylinder Series CQS

, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 12 16 20 25 CQM MU 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20, 25 30, 35, 40, 45, 50 Double rod CQSW 560 12 16 20 25 5, 10 Double acting Single acting Return/Extend CQS 567 12, 16 20, 25 Non-rotating Rod Single rod CQSK 575 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20, 25 30, 35, 40, 45, 50 Double rod CQSKW 582 Anti-lateral Load

Parallel Style Air Gripper Series MHZ

0.4 MPa 10 0.4 MPa 0.3 MPa 0.2 MPa 0.3 MPa 100 L MHZ 0.2 MPa 5 50 MHF 0 10 20 30 40 50 0 50 100 150 MHL Gripping point L (mm) Gripping point L (mm) MHZ2-16D/MHZL2-16D MHR MHZ2-40D 400 Pressure 0.7 MPa MHK Pressure 0.7 MPa 50 350 0.6 MPa 0.6 MPa 300 Gripping force (N) MHS 40 0.5 MPa 0.5 MPa 250 0.4 MPa 0.4 MPa 30 MHC 200 0.3 MPa 0.3 MPa 20 150 0.2 MPa MHT 0.2 MPa 100 10 50 MHY 0 10 20 30

Magnet: D (Built-in), Mounting: D (Double Clevis), Bore Size: Ø16 (5/8"), Stroke: 100 (1"), Port Location: Perpendicular, Auto Switch: C73C--Reed, DC Volt >5 <24, LED, Connector, 0.5M

Magnet: D (Built-in), Mounting: D (Double Clevis), Bore Size: Ø16 (5/8"), Stroke: 200 (2"), Port Location: Perpendicular, Auto Switch: C73C--Reed, DC Volt >5 <24, LED, Connector, 0.5M

Magnet: D (Built-in), Mounting: D (Double Clevis), Bore Size: Ø16 (5/8"), Stroke: 800 (8"), Port Location: Perpendicular, Auto Switch: C73C--Reed, DC Volt >5 <24, LED, Connector, 0.5M

Magnet: D (Built-in), Mounting: D (Double Clevis), Bore Size: Ø16 (5/8"), Stroke: 300 (3"), Port Location: Perpendicular, Auto Switch: C73C--Reed, DC Volt >5 <24, LED, Connector, 0.5M

Magnet: D (Built-in), Mounting: D (Double Clevis), Bore: Ø16 (5/8 Inch), Stroke: 500 (5 Inch), Action: T (Spring Extend), Port Location: Perpendicular, Auto Switch: C73C--Reed, DC Volt >5 <24, LED, Connector

Magnet: Built-in, Mounting: Double Clevis, Bore: Ø16 (5/8 Inch), Stroke: 5 Inch, Action: Spring Extend, Port Location: Perpendicular, Auto Switch: C73C--Reed, DC Volt >5 <24, LED, Connector, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Mounting: Double Clevis, Bore Size: Ø16 (5/8"), Stroke: 1", Port Location: Perpendicular, Auto Switch: C73C--Reed, DC Volt >5 <24, LED, Connector, 0.5M, Number: -

Magnet: Built-in, Mounting: Double Clevis, Bore Size: Ø16 (5/8"), Stroke: 2", Port Location: Perpendicular, Auto Switch: C73C--Reed, DC Volt >5 <24, LED, Connector, 0.5M, Number: -

Magnet: Built-in, Mounting: Double Clevis, Bore Size: Ø16 (5/8"), Stroke: 8", Port Location: Perpendicular, Auto Switch: C73C--Reed, DC Volt >5 <24, LED, Connector, 0.5M, Number: -

Magnet: Built-in, Mounting: Double Clevis, Bore Size: Ø16 (5/8"), Stroke: 3", Port Location: Perpendicular, Auto Switch: C73C--Reed, DC Volt >5 <24, LED, Connector, 0.5M, Number: -

CE

DATA OUT 1 2 3 SET 1 2 SET MONOSASHI-KUN AC100V OUT1 COM OUT2 COM COM OUT3 Series Guide Series CE1 Bore size (mm) Available stroke range Standard stroke (mm) Series CEP1 Standard stroke (mm) Bore size (mm) 12 equiv. 250 400 500 300 175 200 150 125 100 75 50 100 25 75 50 25 12 25 to 150 20 equiv. 20 25 to 300 32 25 to 400 40 25 to 600 50 25 to 600 63 25 to 600 CEU1 CEU5 Output transistor system

CLJ2

Lead wire length symbols: 0.5 m Nil(Example) C73C 1 m L (Example) C73CL 5 m Z (Example) C73CZ None N (Example) C73CN Since there are other applicable auto switches than listed, refer to page 9-2-16 for details. For details about auto switches with pre-wire connector, refer to page 9-15-66. 9-2-10

Rotary Table/Rack & Pinion Style Series MSQ

MSZ Mass CRQ2X MSQX (g) MRQ 1 2 3 7 Size Basic type 75 105 150 250 High precision type 80 115 165 265 Note) Excluding the mass of auto switches Clean Series Prevents dispersion of the particles generated inside of the product into the clean room by sucking them out of the vacuum port on the body side.

Rotary Cylinder Series MRQ

Graph (2) Cylinder Output on the Retracting Side (Double acting) 1500 150 Tube bore size [mm] 1000 100 40 Side load Balance weight 400 500 40 50 32 200 250 300 20 25 30 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 150 15 Allowable Side Load on the Piston End (Nm) 100 10 Stroke of linear part Size 40 40 50 4 5 100 75 50 40 30 25 20 15 10 5 32 32 40 9 10 11 12 12 13 13 13

Compact Rotary Actuator Series CRQ2

150 D100 100 100 80 60 40 20 0 50 40 30 20 10 0 Load (N) Load (N) 329 Series MSQX Construction o i w@3 r !

Sine Cylinder Series REC ø20, ø25, ø32, ø40 How to Order 25 B C RE 150 M9BW Sine cylinder Number of auto switches Nil 2 pcs. Rod type S 1 pc. n “n” pcs. Mounting style B C Basic style Single clevis style Auto switch L D Axial foot style Double clevis st

Up to 700 25 150 Up to 700 1500 150 32 Up to 1000 40 200 Up to 1000 Note 1) The cylinder performance may not as expected when stroke is longer than recommended stroke even they are available.

Air Cylinder: Standard Type Double Acting, Single Rod Series CM2 ø20, ø25, ø32, ø40 How to Order Mounting style Cylinder stroke (mm) T B Basic style (Refer to “Standard Stroke” on page 129.) Head side trunnion style Clevis integrated style Axial foot styl

CM2 L A 40 150 M9BW With auto switch CDM2 L A 150 40 Number of auto switches Rod boot With auto switch (Built-in magnet) Type None Nil J K Nil H 2 pcs. Nil S n Pneumatic Nylon tarpaulin Air-hydro 1 pc. Port thread type Heat resistant tarpaulin n pcs.