Ionizer Series IZS31

Bar type Bar length Sensor Emitter cartridge type/Emitter material Bar length 300 mm 380 mm 620 mm 780 mm 1100 mm 1260 mm 1500 mm 1900 mm 2300 mm Symbol 300 380 620 780 1100 1260 1500 1900 2300 Without sensor Autobalance sensor [Body-mounting type] Nil E F G Symbol Nil C S J K Emitter cartridge type Emitter material With feedback sensor Autobalance sensor [High-precision type] Tungsten Silicon

Modular F.R.L. Units

1100 200 450 Rated flow (L/min (ANR)) Note 1) Polycarbonate Bowl material Bowl guard Standard (Polycarbonate) Semi-standard (Steel) Relieving type Regulator construction 0.82 1.26 1.42 0.38 0.67 Weight (kg) Note 1) Conditions: Mist separator inlet pressure: 0.7 MPa; The rated flow varies depending on the inlet pressure.

Single Axis Electric Actuator Series LJ1H

Applicable strokes: 250, 350, 450, 550, 650, 700, 750, 850, 900, 950, 1050, 1100, 1150, 1250, 1300, 1350, 1400, 1450 Example) LJ1H3031PD-250-F2-X2 Allowable Moment (Nm) Allowable static moment Allowable dynamic moment Pitching Rolling Yawing Mounting orientation Load movement direction 117 137 123 Model LJ1H30 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a Mep a = 1000 2000 L1

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

) (1100) (1100) 40 40 (1200) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1MW25 MY1CW25 l l MY1CW25 MY1CW25 30 30 (1000) (1000) (1000) MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000) (900) (1000) (900) MY1CW20 MY1CW20 MY1CW16 MY1MW16 MY1MW16 MY1MW16 MY1CW16 MY1CW16 (900) (900) (900) Caution 20 20 10 10 1.

Air Slide Table Series MXQ

1100 1100 1200 1400 2350 2650 2900 1750 130 65 80 310 166 + 0.5S 110 140 180 220 1750 1750 1750 1950 2400 3450 4300 4700 2750 200 110 130 560 240 + 0.5S Option Specifications Stroke Adjustment Range of Adjuster Options (Identical for extension and retraction ends) Type Stroke adjustment range Optional wide adjustment range adjusters are available with rubber stopper and metal stopper.

IZx-OMT0049

50 to 2000 50 to 2000 20 150 to 250 150 to 1300 100 to 2000 50 to 2000 50 to 125 50 to 1100 50 to 2000 50 to 2000 30 50 to 200 50 to 1300 50 to 2000 50 to 2000 50 to 125 50 to 1100 50 to 2000 50 to 2000 effect before installing. 3-1-5.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Weight [g] LE-CA-1 220 LE-CA-3 420 LE-CA-5 700 LE-CA-8 1100 LE-CA-A 1370 LE-CA-B 2050 LE-CA-C 2720 Connector B terminal no.

LJ1H

Applicable strokes: 250, 350, 450, 550, 650, 700, 750, 850, 900, 950, 1050, 1100, 1150, 1250, 1300, 1350, 1400, 1450 Example) LJ1H3031PD-250-F2-X2 Allowable Moment (Nm) Allowable static moment Allowable dynamic moment Pitching Rolling Yawing Mounting orientation Load movement direction 117 137 123 Model LJ1H30 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a Mep a = 1000 2000 L1

Modular F.R.L. Units

Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 Pressure gauge port size [AR] 1 1/8 Fluid Air Ambient and fluid temperature 2 5 to 60C (with no freezing) Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Set pressure range [AR] 0.05 to 0.85 MPa Nominal filtration rating [AF/AFM] AF: 5 m, AFM: 0.3 m (99.9% filtered particle size) Rated flow [L/min(ANR)] [AFM] 3 200 450 450 1100

33

Refrigerant charge kg 0.32 0.33 0.34 Control method Compressor ON/OFF Ambient temperature/Humidity/Altitude Note 1), 11) Temperature: 5 to 40C, Humidity: 30 to 70%, Altitude: less than 3000 m HRW HECR HEC Circulating fluid Note 2) Tap water, 15% ethylene glycol aqueous solution Set temperature range Note 1) C 10 to 30 Cooling capacity (50/60 Hz) Note 3), 11) W 1000/1200 For option -T: 900/1100

Refrigerated Air Dryer

Outlet air pressure dew point Model Rated inlet condition Air flow capacity (m3/h [ANR]) Port size IDFA100F-38 IDFA125F-38 IDFA150F-38 IDFA100F-40 IDFA125F-40 IDFA150F-40 960 1210 1500 860 1100 1340 R 2 R 2 1/2 DIN flange 80 R 2 R 2 1/2 DIN flange 80 40C 0.7 MPa 10C 35C 0.7 MPa 3C 89 A INDEX 1.

Modular Design with Uniform Body Style

[AF/AFM] 0.1 MPa Set pressure range [AR] 0.05 to 0.85 MPa Max. flow capacity*3 [AFM] 200 L/min (ANR) 450 L/min (ANR) 1100 L/min (ANR) Nominal filtration rating*4 [AF] 5 m [AFM] 0.3 m (99.9% filtered particle size) Outlet side oil mist concentration*5, *6 [AFM] Max. 1.0 mg/m3 ( 0.8 ppm) Compressed air purity class*7 ISO 8573-1:2010 [ 3 : 4 : 3 ]*8 Drain capacity [AF/AFM] 8 cm3 25 cm3 45 cm3

Environment

Operating condition Model LC3F2 A LEC-MR-RB-032 B LEC-MR-RB-12 Allowable Stroke Speed [mm/s] Model AC servo motor Lead Stroke [mm] Symbol [mm] Up to 100 Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 700 Up to 800 Up to 900 Up to 1000 Up to 1100 Up to 1200 H 20 1500 1200 900 700 550 A 12 900 720 540 420 330 B 6 450 360 270 210 160 LEFS25 100 W /l40 (Motor rotation speed) (4500 rpm

MY1

) (1100) (1100) 40 40 (1200) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1MW25 MY1CW25 l l MY1CW25 MY1CW25 30 30 (1000) (1000) (1000) MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000) (900) (1000) (900) MY1CW20 MY1CW20 MY1CW16 MY1MW16 MY1MW16 MY1MW16 MY1CW16 MY1CW16 (900) (900) (900) Caution 20 20 10 10 1.

smcmaintenancepartslist

(Low speed cylinder 5 to 50 mm/s) XC8 (Adjustable stroke cylinder/Adjustable extension type) XC9 (Adjustable stroke cylinder/Adjustable retraction type) 12 MGP12-XB13-PS MGP12-XC8-PS MGP12-XC9-PS 16 MGP16-XB13-PS MGP16-XC8-PS MGP16-XC9-PS 20 MGP20-XB13-PS MGP20-XC8-PS MGP20-XC9-PS 25 MGP25-XB13-PS MGP25-XC8-PS MGP25-XC9-PS 32 MGP32-XB13-PS MGP32-XC8-PS MGP32-XC9-PS 40 MGP40-XB13-PS MGP40

CJ2X/CUX/CQSX/CQ2X/CM2X

Data 10-3-17 Made to Order Specifications: -XB13: Low Speed Cylinder 5 to 50 mm/s (CY1: 7 to 50 mm/s) Symbol Low Speed Cylinder -XB13 CJ2 Standard model no. XB13 CY1 Standard model no. XB13 M L XB13 CM2 XB13 MGP Standard model no. Mounting style Bore size Stroke XB13 MGGM Standard model no. XB13 CG1 Standard model no. XB13 MGCM Standard model no. XB13 MB Standard model no.

CJ2X/CUX/CQSX/CQ2X/CM2X

Data 10-3-17 17 Made to Order Specifications: -XB13: Low Speed Cylinder 5 to 50 mm/s (CY1: 7 to 50 mm/s) Symbol Low Speed Cylinder -XB13 CJ2 Standard model no. XB13 CY1 Standard model no. XB13 M L XB13 CM2 XB13 MGP Standard model no. Mounting style Bore size Stroke XB13 MGGM Standard model no. XB13 CG1 Standard model no. XB13 MGCM Standard model no. XB13 MB Standard model no.

CJ2X/CUX/CQSX/CQ2X/CM2X

Data 10-3-17 17 Made to Order Specifications: -XB13: Low Speed Cylinder 5 to 50 mm/s (CY1: 7 to 50 mm/s) Symbol Low Speed Cylinder -XB13 CJ2 Standard model no. XB13 CY1 Standard model no. XB13 M L XB13 CM2 XB13 MGP Standard model no. Mounting style Bore size Stroke XB13 MGGM Standard model no. XB13 CG1 Standard model no. XB13 MGCM Standard model no. XB13 MB Standard model no.

Microspeed Cylinder

number XB13 CG1 Standard part number XB13 MGCM Standard part number XB13 MB Standard part number XB13 CX2 Standard part number XB13 CU Standard part number M L XB13 CQ2 Standard part number XB13 CXW Standard part number M L XB13 CQS Standard part number XB13 CXS Standard part number Microspeed cylinder XB13 MXU Standard part number M L XB13 CXT Standard part number Note 1) Avoid operating

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

MGGM Standard part number XB13 CG1 Standard part number XB13 MGCM Standard part number XB13 MB Standard part number XB13 CX2 Standard part number XB13 CU Standard part number M L XB13 CQ2 Standard part number XB13 CXW Standard part number M L XB13 CQS Standard part number XB13 CXS Standard part number Microspeed cylinder XB13 MXU Standard part number Note) Avoid operating this cylinder with