Refrigerated Air dryer Series IDU/IDF

Refrigerant Air connection 300 2.2 IDU3D 350 Series IDU High inlet air temperature type Rated temperature of 50 to 60C Rc 3/8 60C 430 3.7 IDU4D 500 Small Medium Small Medium Large R134a 1 to 4 R 1/2 640 5.5 IDU6D 750 55C R 3/4 Air cooled Air cooled 850 7.5 IDU8D 1000 IDU11D R134a 1300 11 R 3/4 1500 IDU11C 1300 55C 2400 IDU15C 15 2050 R 1 3700 IDU22C/22C1 22 3150 R22 5 to 8 6100 IDU37C/37C1

0.5

400 800 1200 1600 2000 2400 2800 Installation distance [mm] Installation distance [mm] With adjustable louver: Angle setting 5, Air flow level: 10 With adjustable louver: Angle setting 5, Air flow level: 10 IZF21-W IZF31-W 300 mm 300 mm 2 s 4 s 6 s 8 s 0 2 s 4 s 6 s 8 s 0 300 mm 300 mm 0 400 800 1200 1600 2000 0 400 800 1200 1600 2000 2400 2800 Installation distance [mm] Installation distance

Thermo-chiller/Rack Mount Type

50/60 Hz) Concentration meter HRR012 1000/1200 400/500 (100 V type) 450/500 (200 V type) Air-cooled refrigeration With electric conductivity control function, Applicable to DI water piping HRR018 1600/1800 Watercooled refrigeration Particle filter element for replacement (UL Standards) Applicable to DI water piping Air-cooled: Option U (Water-cooled: Standard) HRR024 2000/2400

MY1

The spacing of the side support must be no more than the values shown in the graphs at right. 200 200 190 190 (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) (2400) 130 130 l (1800) (1800) (1800) 120 120 Weight m (kg) Weight m (kg) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) 90 90 (1500) (1500) (1500) MY1CW63 MY1CW63 m 80 80

CEx-OMB0060

Communication specifications Standard RS-232C Line type Half duplex Transmission type Asynchronous Transmission speed Select from 1200, 2400, 4800, 9600, or 19200bps Letter code ASCII Parity Even parity Start bit 1 bit Data length 7 bit Stop bit 1 bit Block check Sum check 8-2.

IZx-OMR0035

2000 0 400 800 1200 1600 2000 2400 2800 Installation distance mm Installation distance mm IZ21-W IZF31-W 300 mm 300 mm 4sec 6sec 8sec 2sec 4sec 6sec 8sec 0 0 2sec -300 mm -300 mm 0 400 800 1200 1600 2000 2400 2800 0 400 800 1200 1600 2000 Installation distance mm Installation distance mm 2) Static neutralization area (Angle setting: 5, Air flow setting: 10, Discharge time from 1000 V to

MY1

MY1CW MY1MW 200 200 (kg) (kg) 190 190 (2100) (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) 130 130 L (1800) (1800) (1800) (1800) 120 120 Mass (m) Mass (m) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) 90 90 m L (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 MY1MW50 MY1MW50 80 80 m (1600) (1600) (1600) (1600) 70 70 MY1CW50 MY1CW50 MY1MW40

High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

MY1

The spacing (l) of the support must be no more than the values shown in the graph on the right. 180 170 l 160 150 140 (2400) (2400) (2400) (2400) 130 120 Weight m m l 110 Caution 100 m (2000) (2000) (2000) (2000) 1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting.

1

XC22 CG1 Fluororubber seal Symbol MB 11 With Hose Nipple -XC51 CA2 The one with hose nipple attached in order to save time for assembly at the time of shipment.

Multi-channel Digital Sensor Monitor ( compatible)

(page 77 to 78) Y S16 0x0960 0x04C4 (1220) 0x04C5 (1221) 0x04C6 (1222) 0x04C7 (1223) 4 R/W (2400) WH1 (Setting of OUT1 window comparator hysteresis) Setting of OUT1 window comparator hysteresis.

Digital Flow Switch ( compatible)

Setting of OUT1 output set value (Lower limit of window comparator) S16 1200 Y Setting range -200 to 4200 3 R/W 1220 0x04C4 P1H(n1H) (Upper limit of window comparator) Setting of OUT1 output set value (Upper limit of window comparator) S16 2400 Y Setting range -200 to 4200 4 R/W WH1 (Window comparator hysteresis) Setting of OUT1 hysteresis (Window comparator) S16 400 Y Setting range 0 to

Digital Flow Switch ( compatible)

Setting of OUT1 output set value (Lower limit of window comparator) S16 1200 Y Setting range -200 to 4200 3 R/W 1220 0x04C4 P1H(n1H) (Upper limit of window comparator) Setting of OUT1 output set value (Upper limit of window comparator) S16 2400 Y Setting range -200 to 4200 4 R/W WH1 (Window comparator hysteresis) Setting of OUT1 hysteresis (Window comparator) S16 400 Y Setting range 0 to

PFxx-OMX0002

(Page 82) P1H (n1H) (Upper limit of window comparator) Setting of OUT1 output set value (Upper limit of window comparator) 4 R/W S16 2400 Y Setting range Refer to "Settable range list".

PFxx-OMX0007

(Page 47) P1H (n1H) (Upper limit of window comparator) Setting of OUT1 output set value (Upper limit of window comparator) 4 R/W S16 2400 Y Setting range Refer to "Settable range list".

PFxx-OMY0005

hidden) 1 R/W Mes disp/hide_tEMP (Measurement display/ hide_temperature) U8 0 Y 0: diSP (displayed) 1: HidE (hidden) Measurement display/hide setting 2 R/W 2050 0x0802 Mes disp/hide_AC (Measurement display/ hide_accumulated flow rate) U8 0 Y 0: diSP (displayed) 1: HidE (hidden) 3 R/W SAvE (Accumulated flow value hold setting) 0: oFF (Not held) 1: 2.0min 2: 5.0min 2200 0x0898 0 R/W U8 0 Y 2400

A_HEC-OM-K001

. <2> Baud rate setting: Mode indication Baud Rate Default value: 1200 b/s Setting range 600, 1200, 2400, 4800, 9600, 19200 b/s Indicated contents Baud rate Baud Rate indicates that it is baud rate setting mode. B a u d R a t e Sets baud rate for communication. Setting value can be scrolled with the [] and [] keys.

Digital Flow Switches

Note 5) The analog output operates only for real-time flow rate, and does not operate for accumulated flow. 9 Series PF2A For Air Digital Flow Switch Flow Characteristics (Pressure Loss) PF2A703H PF2A706H PF2A712H 20 20 20 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 10 10 10 600 0 2400 4800 7200 9600 12000 150 0 600 1200 1800 2400 3000 300 0 1200 2400 3600 4800 6000 Flow rate

PF2A/PF2W

Note 5) The analog output operates only for real-time flow rate, and does not operate for accumulated flow. 16-11-14 11 Series PF2A Digital Flow Switch, High Flow Type For Air Flow Characteristics (Pressure loss) PF2A703H PF2A706H PF2A712H 20 20 20 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 10 10 10 ZSE ISE PSE Z I SE3 600 0 2400 4800 7200 9600 12000 150 0 600 1200 1800 2400

Table of Contents

Note 5) The analog output operates only for real-time flow rate, and does not operate for accumulated flow. 16-11-14 11 Series PF2A Digital Flow Switch, High Flow Type For Air Flow Characteristics (Pressure loss) PF2A703H PF2A706H PF2A712H 20 20 20 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 10 10 10 ZSE ISE PSE Z I SE3 600 0 2400 4800 7200 9600 12000 150 0 600 1200 1800 2400