Environment

rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line 200 W /60 (Motor rotation speed) (3750 rpm) (2400 rpm) A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63 Motor mounting position: Top/Parallel, In-line 400 W /60 (Motor rotation speed) (3000 rpm) (2400 rpm) (1800 rpm) (1500 rpm) L* 2.86 70 (Motor rotation speed) (1470 rpm) * Top/Parallel

15

rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line 200 W equivalent (Motor rotation speed) (3750 rpm) (2400 rpm) A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63l 400 W equivalent (Motor rotation speed) (3000 rpm) (2400 rpm) (1800 rpm) (1500 rpm) L 2.86* 70 (Motor rotation speed) (1470 rpm) * Equivalent lead which includes the screw lead

Environment

rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line 200 W /60 (Motor rotation speed) (3750 rpm) (2400 rpm) A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63 Motor mounting position: Top/Parallel, In-line 400 W /60 (Motor rotation speed) (3000 rpm) (2400 rpm) (1800 rpm) (1500 rpm) L* 2.86 70 (Motor rotation speed) (1470 rpm) * Top/Parallel

Table of Contents

Select the communication speed from 1200, 2400, 4800, 9600 or 19200 with the UP/DOWN keys. Store the setting with the SET key. The SEL. key only shifts the cursor without storing the setting. UP J DOWN DFUNC. FUNC. SEL. key 3-8 -X Unit no. 20Data The unit number registration mode is selected by pressing the SEL. key while UNIT is flashing.

HRX-OM-W002

R410A(HFC) Quantity of refrigerant Kg 0.36 0.36 0.38 0.38 0.47 0.47 Control method PID control Ambient temperature andhumidity and altitude 1 Temperature:5 to 40,Humidity:30 to 70%,Altitude: Less than 3000m Circulating fluid2 Tap water, Ethylene glycol aqueous solution 15% Operating temperature range1 5 to 3520 Cooling capacity(50/60Hz) 3 W 1000/1200 1600/1800 1000/1200 1600/1800 2000/2400

A-HEC-OM-J004

-232C SG 6-9 Unused Unused Communication connector D-sub 9 pin (female) 7.3 Specifications of Connectors 7-7 A_HEC-OM-J004-4 Chapter 7 Appendix 7.4 Communication 7.4.1 Specifications Table 7-2 Communication Communication type HEBC002-WA10 HEBC002-WB10 Protocol RS-485 RS-232C Circuit type Half duplex Half duplex Communication type Asynchronous Asynchronous Communication speed (BPS) 1200/2400

High Vacuum L Type Valve

H5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XL-OMY0001

/150 XL1A25-60S-3 XL1A25-60S-2 1 2 H5 AC100V 600/130 800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17

High Vacuum L Type Valve

H5 Initial power / 100 VAC 200/40 400/70 400/80 600/130 800/180 Power 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

High Vacuum L Type Valve

H5 Initial power / Power 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XLA Series

H 4 S y m b o l Initial power/ Power 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 consumption (W) Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

XLA- ∗ -F7NJ ∗ - ∗ Series

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

XL-OMV0002

1 2 3 H4 AC100V 600/150 800/220 1200/350 / AC200V 2400/150 3200/220 4800/350 Ass'y XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 Ass'y 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1)/ 2)16 PTC() 200V 200 PTC 150 100V PTC Ass'y 0 5 10 15 20 25 30 Ass'y ( Ass'y 30 8 XL-OMV0002 4 4-1.162540 Assy SUS304 SUS316L ( SUS304) ( A6063) C D C E E (

XL-OMY0002

/130 XLD-80 XLD-100 XLD-160 AC90240V XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 1 2 3 H4 AC100V 600/150 800/220 1200/350 / AC200V 2400/150 3200/220 4800/350 XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0002 . 1 S 12 ( SUS304 M 3

AC Servo Motor Driver (Pulse input type/Positioning type ）

Doc no. LEC*-OMY0114-A PRODUCT NAME AC Servo Motor Driver (Pulse input type/Positioning type MODEL/ Series LECSB2-T Series This product can be used by adding a dedicated file (pushing operation extension file) to the setup software (MR Configurator2TM: LEC-MRC2E). Please download the dedicated file from SMC website. LECSB2-T Series / Driver 1. Safety Instructions These safety instructions

XLF Series

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

High Vacuum L Type Valve

H 4 S y m b o l Initial power/ Power 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 consumption (W) Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

XLG Series

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

CLS

Non-lube) Type Air Fluid 1.57 MPa 1.2 MPa Proof pressure 0.97 MPa 0.7 MPa CLJ2 Max. operating pressure CLM2 0.08 MPa Min. operating pressure 50 to 500 mm/s Piston speed CLG1 Yes Cushion CL1 Without auto switch: 0C to 70C With auto swiatch: 0C to 60C Ambient and fluid temperature (with no freezing) MLGC to 250: +1.0 , 251 to 1000: +1.4 , 1001 to 1500: +1.8 , 1501 to 2000: +2.2 , 2001 to 2400

Thermo-chiller/

Thermo-chiller/ Rack Mount Type HRR Series How to Order Option U Air-cooled Refrigeration HRR A 20 012 (UL Standards) Cooling capacity Option 012 1000/1200 W (50/60 Hz) 018 1600/1800 W (50/60 Hz) 024 2000/2400 W (50/60 Hz) 030 2500/3000 W (50/60 Hz) Nil None DM With electric conductivity control function, Applicable to DI water piping M Applicable to DI water piping T High-pressure pump mounted