IDU/IDF

l/min (ANR) 4 4 Based on condition ; Based on condition ; IDU4D is selected as the model to process an air flow larger than 412 l/min IDF11C is selected as the model to process an air flow larger than 1400 l/min (ANR) with a 60Hz power supply, according to data D-2.

CNA

Long stroke (mm) MXS Stroke range (mm) RT Bore (mm) RY 501 to 800 40 MXQ 601 to 1000 RY 50 1001 to 1200 30 76 MXF 4-LD LH 601 to 1000 63 1001 to 1200 40 92 LT MXW Y X RT Y X LS + Stroke ZZ + Stroke Z 751 to 1000 80 1001 to 1400 45 112 MXP 751 to 1000 100 1001 to 1500 50 136 MG MGP (mm) Bore (mm) Stroke range (mm) A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 J K KA MGQ 40

Hygienic Design Cylinder Series HY

402 563 C M 32 With auto switch (Built-in magnet) IN 207 346 484 Unit: kg Stroke (mm) OUT 378 630 882 Bore size (mm) 25 40 IN 318 530 742 50 75 100 125 150 175 200 300 250 20 OUT 588 980 1370 0.15 0.17 0.19 0.21 0.22 0.24 0.26 0.28 50 25 IN 495 825 1160 0.20 0.22 0.25 0.27 0.29 0.32 0.34 0.36 0.46 0.41 32 OUT 936 1560 2180 0.28 0.31 0.33 0.36 0.39 0.42 0.45 0.60 0.48 0.54 63 40 IN 840 1400

Mechanically Jointed Rodless Cylinders

Piston Speed Standard Stroke Bore size (mm) 16 25 40 63 20 32 50 Bore size (mm) Max. manufacturable stroke (mm) Standard stroke (mm) 80 to 500 mm/s Without stroke adjustment unit (MY3A) 80 to 1000 mm/s Without stroke adjustment unit (MY3B) 16, 20, 25 32, 40, 50 63 100, 200, 300, 400, 500, 600 700, 800, 900, 1000, 1200 1400, 1600, 1800, 2000 3000 80 to 1000 mm/s (16, 20 L unit: 80 to 800 mm

Single Axis Electric Actuator Series LJ1H

Applicable strokes: 250, 350, 450, 550, 650, 700, 750, 850, 900, 950, 1050, 1100, 1150, 1250, 1300, 1350, 1400, 1450 Example) LJ1H3031PD-250-F2-X2 Allowable Moment (Nm) Allowable static moment Allowable dynamic moment Pitching Rolling Yawing Mounting orientation Load movement direction 117 137 123 Model LJ1H30 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a Mep a = 1000 2000 L1

IZx-OMP0064

250 to 2000 300 to 2000 10 200 to 300 200 to 1400 200 to 2000 200 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 15 200 to 300 200 to 1400 150 to 2000 100 to 2000 50 to 125 50 to 1100 50 to 2000 50 to 2000 20 150 to 250 150 to 1300 100 to 2000 50 to 2000 50 to 125 50 to 1100 50 to 2000 50 to 2000 30 50 to 200 50 to 1300 50 to 2000 50 to 2000 50 to 125 50 to 1100 50 to 2000 50 to 2000

LJ1H

Applicable strokes: 250, 350, 450, 550, 650, 700, 750, 850, 900, 950, 1050, 1100, 1150, 1250, 1300, 1350, 1400, 1450 Example) LJ1H3031PD-250-F2-X2 Allowable Moment (Nm) Allowable static moment Allowable dynamic moment Pitching Rolling Yawing Mounting orientation Load movement direction 117 137 123 Model LJ1H30 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a Mep a = 1000 2000 L1

Integrated Controller

3000 mm/s2 2 Work load: W [kg] Work load: W [kg] 3000 mm/s2 1.5 1 0.5 5000 mm/s2 10 mm/s2 0 1400 200 400 600 800 1000 1200 0 Speed: V [mm/s] Speed: V [mm/s] EQFS25HA/Ball Screw Drive Horizontal/Lead 12 Vertical/Lead 12 35 9 8 7 6 5 4 3 2 1 0 3000 mm/s2 30 Work load: W [kg] Work load: W [kg] 3000 mm/s2 25 20 15 10 10 mm/s2 5000 mm/s2 5 0 0 0 Speed: V [mm/s] 100 200 300 400 500 600 700 900

A_HEC-OM-K001

temp. oC Fig.9-10 Heating capacity (HED005) 9.5 Performance Chart 9-15 A_HEC-OM-K001-1.7 Chapter 9 Appendix 9.5.3 Performance of HED007 Conditions; Recirculating fluid: water (flow rate 15L/min), Facility water flow rate: 5L/min, Ambient temp.: 25oC 1) Cooling capacity 1600 1400 Facility water 10oC Facility water 25oC 1200 Cooling capacity W 1000 Facility water 35oC 800 600 400 200 0 0 10

Step Motor Driver （ Pulse input type ）

direction 2 2 2 2 ORIG mode 1 1 1 1 Return to origin parameter default ORIG limit 100 100 100 100 ORIG time 100 100 100 100 ORIG speed 30 30 30 30 ORIG ACC/DEC 1000 1000 1000 1000 Creep speed 10 10 10 10 ORIG sensor 0 0 0 0 ORIG SW Dir 0 0 0 0 Undefined parameter21 0 0 0 0 LEFB Step data default Model LEFB16 LEFB25 LEFB32 Lead [mm] 48 48 48 No. 0 0 0 Movement MOD ABS ABS ABS Speed 1100 1400

EXxx-OMK0006

The parameters that can be saved in internal EEPROM of the SI unit are as follows:Index Sub-Index Name 1005 COB ID, SYNC 1006 Communication cycle period 100C guard time 100D life time factor 1016 1 to 9 Consumer heartbeat time 1017 Producer heartbeat time 1029 1 Communication error 1400 1to 2 1st receive PDO parameter 1600 0 to 8 1st receive PDO mapping 1800 1 to 3,5 COB-ID used by PDO 1A00

A_HEC-OM-I009

degC Fig. 6-1 Cooling capacity 2) Heating capacity Fluid: water Fluid: water 1000 2000 900 Ambient 35C 1800 Ambient 30C 800 1600 Ambient 25C Heating capacity W Heating capacity W 700 1400 600 Ambient 20C 1200 500 Ambient 15C 1000 400 800 300 Ambient 15C 600 200 400 100 0 200 10 15 20 25 30 35 40 45 50 10 15 20 25 30 35 40 45 50 Circulating fluid temperature degC Fluid temperature degC Fig

E-MY2_E_D

Heavy load Standard load Medium load Light load 1 10 50 100 200 1 0.25 0.49 0.98 1.96 2 20 2 0.49 75 200 400 0.74 1.47 2.94 3 30 3 0.74 100 300 600 0.98 1.96 3.92 4 40 125 400 800 4 0.98 1.23 2.45 4.90 5 50 5 1.23 150 500 1000 1.47 2.94 5.88 6 75 200 600 1200 6 1.47 1.96 3.92 7.84 7 100 250 700 1400 7 1.72 2.45 4.90 9.80 8 300 300 800 1600 8 1.96 2.94 5.88 11.76 9 500 500 900 1800 9 2.21

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

) 119 (124) 18 (28) 130 (164) 76 (84) 160 (198) 53 (59) 204 (215) 0.040 0.073 80 1400 750 750 750 25 116 112 102 112 31.5 110 13.5 13.5 140 45 61 129 204 4.5 44 16 27 247 48 28 235 255 192 194 65 76 45 20 34 20 205 1000 (1001 to 1500) 133 (140) 18 (29) 150 (180) 92 (100) 180 (220) 54 (60) 215 (227) 0.040 0.073 100 1500 750 750 750 25 133 136 116 136 35.5 130 13.5 13.5 162 50 64 135 212 6.0

CLK1

-050 BMA2-063 BMA2-040 D-H7A1, H7A2, H7B, H7C D-H7NW, H7PW, H7BW D-H7LF, H7NF 378 504 630 756 OUT 1260 Solid state switch 16 40 318 424 530 636 IN 1060 588 784 980 1180 OUT 1960 Reed switch D-B53, B54, B64, B59W 20 50 BA-32 BA-04 BA-05 BA-06 495 660 825 990 IN 1650 Solid state switch D-G5NTL 934 1250 1560 1870 OUT 3120 Reed switch D-A33, A34, A44 20 63 BD1-04M BD1-05M BD1-06M 840 1120 1400

Stainless Steel Heat

Based on condition y; IDFS11E is selected as the model to process an air flow larger than 1400 l/min (ANR) with a 60Hz power supply, according to data D-2. 4 4 Note) l/min (ANR) is for reference conditions of 20C, 1 ATM and 65% relative humidity. Data A Correction factor for temperature (Series IDUS) Inlet air temp. (C) Outlet air press. dew point (C) Ambient temp.

IR1000/2000/3000

100 200 300 400 500 Flow rate l/min (ANR) Relief flow rate l/min (ANR) Supply pressure P1 MPa IR2020-02 IR2020-02 IR2020-02 Conditions: Supply pressure 1.0MPa Conditions: Back pressure 1.0MPa 1.0 0.8 0.204 0.9 0.7 Set pressure P2 MPa Set pressure MPa 0.8 Set pressure MPa 0.6 0.202 0.7 Setting point 0.5 0.6 0.200 0.5 0.4 0.4 0.3 0.3 0.198 0.2 0.2 0.1 0.1 0.196 0 200 400 600 800 1000 1200 1400

Ozone Resistant

test results> NBR Speed control valve Flow rate uncontrollable NBR Regulator Malfunction NBR Solenoid valve Malfunction AT Air tank AR Regulator Ozonizer Specimen CP Compressor IDF Refrigerated air dryer AFF Main line filter AM Mist separator Control panel Ozone resistance evaluation Models Operating frequency Conditions Series AS-F AS1000, 1400

MGG

288 330 371 412 412 IN 161 241 322 402 482 563 643 724 804 804 OUT 32 12 138 207 276 346 415 484 553 622 691 691 IN 252 378 504 630 756 882 1010 1130 1260 1260 OUT 40 16 212 318 424 530 636 742 848 954 1060 1060 IN 392 588 784 980 1180 1370 1570 1760 1960 1960 OUT 50 20 330 495 660 825 990 1160 1320 1490 1650 1650 IN 624 936 1250 1560 1870 2180 2500 2810 3120 3120 OUT 63 20 560 840 1120 1400

Thomas Oil-less Rotary Vane Compressor / Vacuum Pump Flow Rate: 33 LPM , 33 LPM, Max Pressure: 20.3 PSIG / 1400 mbar , 20.3 PSIG / 1400 mbar, Max Vacuum: 27.5 in HgV / -930 mbar , 27.5 in HgV / -930 mbar, Voltage (DC): 12, DC Motor Type: Standard, Item Dimensions: Length: 8.27 in / 210 mm Width: 2.32 in / 59 mm Height: 2.32 in / 59 mm , Length