7ND9071en

Valve series MBV QMBV 1) Valve size T5, QT5 QXT5 T25, QT25 QXT25 R, QR E RSOFT 3) FL MBV QMBV 2) D, P, C 4) ZX mm in Dead angle, % 15 1/2 15 20 3/4 15 25 1 14 25.5 19.5 15 25.5 27 12.5 25/1 1/1 11 25/2 1/2 11 25/3 1/3 10 40 1 1/2 12 24.5 12.5 12 16 21 12.5 50 2 10 9 13.5 24.5 12.5 18 8 17 20.5 23 12.5 65 2 1/2 9 13 18 80 3 10 8 12 18 8 16.5 8.5 9 8.5 15.5 100 4 10 8 12 16.5 8.5 16 9 8 7 14.5

MGG

9 is type L only. r!1!6!7!8!9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

Modular F.R.L. Units

3.5 29 AC25B-B 1/4, 3/8 1/8 110.2 115.1 28 30 55.1 35 27.5 0 41 35 7 14 4 41 AC30B-B 1/4, 3/8 1/8 110.2 115.1 30.7 30 55.1 35 29.4 3.5 41 35 7 14 4 41 AC40B-B 1/4, 3/8, 1/2 1/8 145.2 147.1 35.8 38.4 72.6 40 33.8 3.5 50 40 9 18 5 48 AC40B-06-B 3/4 1/8 155.2 149.1 35.8 38.4 77.6 40 33.8 3 50 40 9 18 5 48 AC50B-B 3/4, 1 1/8 186.2 220.1 43 93.1 30 43.3 3.2 70 50 11 20 6 60 AC55B-B 1 1/8

VQ4000

1 A SMC A 4 2 Indicator light R4.5 Stations 12 X (External pilot port) Rc 1/8 9 9 12 106 10 16.5 163 43.5 96.5 1(P), 5(R1), 3(R2) port 3-Rc 1/2 (Pilot EXH port) Rc 1/8 SMC 1 P 5 3 R2 R1 42 17.5 PE 18 18 38 72 L n Dimensions Formula L1 = 25n + 63, L2 = 25n + 198 n: Stations In the case of DI unit, 1 pc., 54 mm is added per 1 pc. 9 288 423 10 313 448 7 238 373 11 338 473 6 213 348 12 363

VQ5000

1) 02 2 stations W Note 1) Combination of [C ] and [S ] is not possible.

AC Servo Motor Driver (CC-Link Type)

The station number that may be set is any of 1 to 64 in decimal. In the initial status, the station number is set to station 1. Driver Driver Servo amplifier X10 STATION No. X1 5 5 6 6 4 4 3 3 7 7 2 2 8 8 1 1 9 9 0 0 Set the units. (initial value: 1) Set the tens. (initial value: 0) POINT Be sure to set the station numbers within the range of 1 to 64.

AC Servo Motor Driver (CC-Link Type)

The station number that may be set is any of 1 to 64 in decimal. In the initial status, the station number is set to station 1. Driver Driver Servo amplifier X10 STATION No. X1 5 5 6 6 4 4 3 3 7 7 2 2 8 8 1 1 9 9 0 0 Set the units. (initial value: 1) Set the tens. (initial value: 0) POINT Be sure to set the station numbers within the range of 1 to 64.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 @6 @7 Description No. Part no.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

9 @3 !9 @0 !7 @1 e r t !1 !2 @8 !6 o A !5 @7 A !0 @2 @4 @5 @6 !4 !3 A-A w * Motor bottom mounting type is the same. Component Parts No. Description Material Note No.

HRX-OM-W060

A 20 HRL Cooling capacity CH1 CH2 100 9 kw 1 kw 200 19 kw 1 kw 300 26 kw 1 kw Cooling method A Air-cooled refrigeration Piping thread type Nil Rc F G (Rc-G thread adapter set is included) N NPT (Rc-NPT thread adapter set is included) Power supply 20 AC200V/200-230V(50/60Hz) 3phase Fig. 2-1 Product model number HRL Series 2.1 Model Number of Product 2-1 HRX-OM-W060 Chapter 2 Name and Function

HEC_W-E

1 -8-3 TABLE 8-2 AVAILABLE MODE IN LEVEL 2 -8-4 TABLE 8-3 AVAILABLE MODE IN LEVEL 3 -8-5 TABLE 9-1 ALARM INFORMATION -9-1 TABLE 9-2 RESET OF ALARM -9-3 TABLE 9-3 ALARM CODE LIST -9-3 TABLE 9-4 TROUBLESHOOTING -9-5 TABLE 10-1 SIGNAL AND STYLE OF CONNECTORS -10-1 TABLE 10-2 POWER SUPPLY CABLE -10-2 vii Contents Abbreviations Abbreviation (The order of ABC) Meaning AC Alternating Current AT

SV

Refer to Precautions 2 on page 1-2-9.

Cylinder with Lock

1 !7 @1@0 @2 @6 @3 @5@8 @4@9 #5 #7 #9 #8#6#4 #0#1 $1 $0 t !9 #3 #2 @7 Component Parts Component Parts No. Description Material Qty.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

27 COM3 18 COM3 18 N.C. 1 N.C. 1 8 8 COM3 19 COM3 19 N.C. 1 N.C. 1 COM3 38 COM3 38 28 28 COM4 20 COM4 20 N.C. 1 N.C. 1 9 9 COM4 39 COM4 39 N.C. 1 N.C. 1 29 29 COM4 40 COM4 40 1 Cannot be connected 1 Cannot be connected I/O 2 Input Signal I/O 2 Output Signal Name Details Name Details BUSY1 Busy signal for axis 1 +COM3 +COM4 Connects the power supply 24 V for input/output signal BUSY2 Busy

ZP

From the formula on the front matter 9, the average suction flow rate Q1 is as follows: Q1 = (1/2 to 1/3) x Ejector max. suction flow rate = (1/2 to 1/3) x 5 = 2.5 to 1.7 L/min (ANR) (2) Next, find the maximum flow rate Q2 of the piping. The conductance C is 0.22 from the Selection Graph (3).

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

To order connector cable only Conventional type Connector dimensions (Ground) 4 (Orange) Manual override Brown: 1Blue: 3 + B 9 A 1 3 Black: 4 Interface 33.9 L 35 10 Cable length (L) Part no. Pilot valve (10-SY114) Adapter plate 300mm V100-49-1-2 V100-49-1-1 500mm 1000mm 2000mm 5000mm V100-49-1-3 V100-49-1-4 V100-49-1-7 22 33.9 14 704

VQZ1000/2000/3000

port F G M3 x 0.5 (VQZ2000) M5 x 0.8 (VQZ3000) Note 1) 3(R2), 5(R1) port of VQZ2000 is only G 1/16.

VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

CNG

For details, refer to page 9-15-65. With pre-wire connector is available for D-G5NTL, G5NBL type, too. For details, refer to page 9-15-66. 9-5-22

Air Cylinder

14 12 (14) 1/4 14 12 (14) 1/4 35 32 76 27 32 20 30 2 9 9 58 58 11 58 M8 x 1.25 7 63 Up to 300 301 to 1500 14 12 (14) 1/4 14 12 (14) 1/4 35 32 92 27 38 20 32 2 11 9 70 58 11 72 M10 x 1.5 7 80 Up to 300 301 to 1500 20 16 (20) 3/8 17.5 16 (17.5) 3/8 40 37 104 32 50 25 40 3 11 11 82 71 13 89 M10 x 1.5 10 100 Up to 300 301 to 1500 20 16 (20) 1/2 17.5 16 (17.5) 1/2 40 37 128 41 60 30 50 3 14 14