Bore Size: 12mm, Stroke: 150mm, Adjuster: Rubber Stopper, Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: M9NV--Solid State, Gen. Purpose, 3 Wire NPN, Vertical, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Bore Size: 12mm, Stroke: 150mm, Adjuster: Rubber Stopper, Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Bore Size: 12mm, Stroke: 150mm, Adjuster: Rubber Stopper, Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Bore Size: 12mm, Stroke: 150mm, Adjuster: Rubber Stopper, Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Bore Size: 12mm, Stroke: 150mm, Adjuster: Rubber Stopper, Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Bore Size: 12mm, Stroke: 150mm, Adjuster: Rubber Stopper, Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: A96--Reed, DC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Bore Size: 12mm, Stroke: 150mm, Adjuster: Rubber Stopper, Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Bore Size: 12mm, Stroke: 150mm, Adjuster: Rubber Stopper, Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: M9NV--Solid State, Gen. Purpose, 3 Wire NPN, Vertical, Lead Wire or Prewired Connector: L (3m), Number: S (1 pc.)

Bore Size: 12mm, Stroke: 150mm, Adjuster: Rubber Stopper, Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: M9NV--Solid State, Gen. Purpose, 3 Wire NPN, Vertical, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Bore Size: 12mm, Stroke: 150mm, Adjuster: Rubber Stopper, Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

Bore Size: 12mm, Stroke: 150mm, Adjuster: Rubber Stopper, Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Bore Size: 12mm, Stroke: 150mm, Adjuster: Rubber Stopper, Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

10

125 150 89 102 114 127 152 177 202 227 63 64 51 25 12.5 25 37.5 50 75 100 125 150 89 102 114 127 152 177 202 227 80 68 56 29 12.5 25 37.5 50 75 100 125 150 175 200 101 114 126 139 164 189 214 239 264 289 100 76 61 29 12.5 25 37.5 50 75 100 125 150 175 200 101 114 126 139 164 189 214 239 264 289 125 82 75 27 10 20 30 40 60 80 100 120 140 160 180 200 120 130 140 150 170 190 210 230

MY1

Wn 111 210 X-axis Xn Y-axis Yn Z-axis Zn Z Wa 0.88 kg 0 mm 5 mm 65 mm Y Wb 4.35 kg 0 mm 42.5 mm 150 mm Wc 0.795 kg 111 mm 42.5 mm 150 mm X Wd 0.5 kg 210 mm 42.5 mm 150 mm 65 150 n = a, b, c, d 3.

MHZ

0.5 MPa 0.5 MPa 6 MHY 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 0.35 MPa 100 0.35 MPa 4 0.3 MPa 0.3 MPa MHW 50 2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

MHZ

0.5 MPa 0.5 MPa 6 MHY 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 0.35 MPa 100 0.35 MPa 4 0.3 MPa 0.3 MPa MHW 50 2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt C' D' 45 50 55 60 65 70 50 55 60 65 70 75 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 125 150 D 40 45 50 55 60 65 45 50 55 60 65 70 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 60 65 70 75 80 85 90 95 100 105 130 155 D 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 65 70

Air Slide Table

40 ST 150 ST 150 0.400 Table displacement [mm] Table displacement [mm] Table displacement [mm] 0.020 ST 50, 75 0.350 0.015 ST 100 ST 125 ST 125 0.300 ST 10 to 100 0.015 ST 40, 50, 75 0.250 ST 125 ST 100 0.010 0.200 ST 100 0.010 0.150 ST 10 to 50 ST 125, 150 ST 10 to 30 0.005 ST 75 ST 150 0.100 0.005 0.050 0.000 0.000 0.000 0 50 100 0 50 100 0 50 100 Load [N] Load [N] Load [N] ST = Stroke

e-Rodless Actuator

(Wn) Weight (mn) Y-axis Yn Z-axis Zn X-axis Xn Z X Wa 5 mm 0.88 kg 0 mm 65 mm 111 Wb 42.5 mm 4.35 kg 0 mm 150 mm Y 210 Y Wc 42.5 mm 0.795 kg 111 mm 150 mm Wd 42.5 mm 1.0 kg 210 mm 150 mm n = a, b, c, d 3 Calculation of composite center of gravity m3 = mn = 0.88 + 4.35 + 0.795 + 1.0 = 7.025 kg 1 m3 X = x (mn x xn) 1 7.025 = (0.88 x 65 + 4.35 x 150 + 0.795 x 150 + 1.0 x 150) = 139.4 mm 1

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/