Series VQ Base Mounted Metal Seal/Rubber Seal

R port. 2.

Rotary Clamp Cylinders

149 185 245 300 400 525 625 825 980 1400 1560 0.7 56 77 105 140 139 208 258 341 418 557 731 870 1149 1365 1950 2172 1.0 80 110 150 200 200 298 370 490 600 800 1050 1250 1648 1961 2801 3121 R H R H R H R H R H R H R H R H 12 6 16 8 Clamp part 20 12 Non-rotating accuracy 0.7 to 1.4 During clamping (Retraction end) 25 12 32 16 Made to Order (For details, refer to page 40.) 40 16 50 20 XB6 Head

0.55

Use O terminal when a ground terminal is used. + R D LED LED: Light emitting diode D: Protective diode R: Resistor R LED LED: Light emitting diode R: Resistor AC (;Z) circuit diagram Note) The 24 VAC specification is the same as those in the DC (;U) circuit diagram. R NL NL: Neon light, R: Resistor 50 Series VF Specific Product Precautions 4 Be sure to read before handling.

REA/REB

15 Auto switch model Bore size (mm) D-A9 A dimension D-M9 B dimension C dimension D dimension D-A9 D-M9 D-A9 D-M9 D-A9 D-M9 21.5 76.5 72.5 56.5 60.5 17.5 15 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 A dimension D-Y5 D-Y6 D-Y7 B dimension C dimension D dimension Auto switch model D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8

REA/REB

case of 15. 25, 32 A dimension D-Y5 D-Y6 D-Y7 B dimension C dimension D dimension Auto switch model D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 22 103 103 47 47 78 78 22 32 30.5 117.5 117.5 55.5 55.5 92.5 92.5 30.5 Operating Range Bore size (mm) Auto switch model 32 25 15 D-A9 8 D-M9 3 D-Z7/Z8 9 9 D-Y5/Y6/Y7 6 7 Since this

AC Servo Motor Driver

W Model D T D Max.

VFR

3 Non plug-in type (For 10) (3) Plug-in type With terminal block (3) For 01T 01T1 AXT625-3A-20 End plate (D side) assembly End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball !2 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

Aluminum High Vacuum Angle Valve

Symbol Nil Auto switch model r Auto switch type t Number of auto switches/Mounting position Mounting position Valve open/closed Valve open Valve closed Quantity Remarks Without auto switch (without built-in magnet) Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Without auto switch 2 pcs. 1 pc. 1 pc.

Valve Single Unit

P, R port SX3000 (Metric size) With One-touch fitting for 8 (Inch size) With One-touch fittings for 5/16" P, R port SX5000 (Metric size) With One-touch fitting for 10 (Inch size) With One-touch fittings for 3/8" For D side r End block assembly L SX3000-53-1A SX5000-53-1A For U side (Metric size) SX5000-51-1A (Inch size) SX3000-51-15A SX5000-52-1A (Metric size) SX3000-51-1A (Inch size) SX3000

SYJ300/500/700

terminal (D) M8 connector (WO) 63.5 63.5 63.5 63.5 X X X X P P P P 71.3 [73.5] 81.1 [83.3] 66.3 72.8 80.2 R R R R 90.2 Max. 10 91.1 Pg7 78.1 [85.1] Approx. 300 (Lead wire length) 54 71.5 M8 x 1 81.7 51.6 Approx. 300 (Lead wire length) 93 67 [74] 100.5 Refer to page 4-4-61 for dimensions with connector cable.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Option Manifold Plug-in unit 1 Symbol Option None Nil Stations 10 Clean series 2 B Note 2) D D0 D Note 5) K Note 3) N R Note 4) 200/220 VAC models (F/L kit only) With back pressure check valve DIN rail mounting With DIN rail bracket (Without DIN rail) With ejector unit Special wiring spec.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Option Manifold Plug-in unit 1 Symbol Option None Nil Stations 10 Clean series 2 B Note 2) D D0 D Note 5) K Note 3) N R Note 4) 200/220 VAC models (F/L kit only) With back pressure check valve DIN rail mounting With DIN rail bracket (Without DIN rail) With ejector unit Special wiring spec.

MGP

33 11 M5 X 0.8 M5 X 0.8 M5 X 0.8 15 10 19 MGC 53 37 10.5 M5 X 0.8 M5 X 0.8 Rc1/8 12.5 10.5 25 53.5 37.5 11.5 M6 X 1.0 M6 X 1.0 Rc1/8 12.5 13.5 28.5 MGF WA WB Bore (mm) Q R S T U VA VB X XA XB YY YL Z 30st 30st< 100st 300st< 30st 30st< 100st 23 24 28 34 100st< 200st 200 200 200 200 200st< 300st 100st< 200st 105 105 117 117 200st< 300st 300st< 60 60 77 77 14 48 54 70 78 22 25 30 38 20 24 24

AC Servo Motor Driver (CC-Link Type ）

H T E (Note)L d W D T Max.

New

Q F D Q F z 300 z300 R E C C R E Water For Air For Medium A 2 x P Port size 2 P Port size A B1 B1 B B Vacuum For Oil Construction Dimensions Construction Dimensions DIN terminal Conduit terminal F Q Cable 6 to 12 D D S G1/2 Qp2 F 34 (44) 31.5 25 T C C R R E G1/2 E 2 x P Port size A 2 x P Port size A B1 Sp2 B B1 B Conduit Faston type D G1/2 Q F D Q F 11 z 280 VX2 23 R C C R E E 2 x P Port

Secondary Batteries

-900, D-M9BWSDPC-900 and D-A90L-900.

Valve Single Unit

Poor wiring could cause damage to PLC, power source, etc. as well as manifold and valve. 1-6-91 SX5000: D-sub Connector/Plug-in C4 C6 C8 SS5X5-45FUStations D(Pitch) P = 16 DIN rail release button Note) The L1 to L4 dimensions of SS5X5-45FUStations Uare identical to those of SS5X545FUStations D-. 2n-One-touch fittings 2-One-touch fittings (A, B port) (P , R port) Applicable tubing O.D.: 10

VQZ1000/2000/3000

AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC Circuit with Indicator Light AC circuit DC circuit 1 2 1 2 NL R R LED NL: Neon light R: Resister LED: Emitting diode R: Resister 2-7-33 Base Mounted 34 34 Series VQZ1000/2000/3000 Be sure to read before handling.

IDU/IDF

37 5200 R 1 1/2 9000 IDU55C 55 7650 50C R 2 12400 IDU75C 75 10500 35C 0.75 100 IDF1D 120 Series IDF Standard inlet air temperature type Rated temperature of 35 to 40C 1.5 200 IDF2D 235 Rc 3/8 2.2 300 IDF3D 350 R134a 9 to 12 40C 3.7 430 IDF4D 500 R 1/2 5.5 640 IDF6D 750 R 3/4 7.5 850 IDF8D 1000 1300 IDF11D R134a 11 R 3/4 1500 1300 IDF11C 15 2400 2050 IDF15C/15C1 R 1 22 3700 3150 IDF22C/22C1

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

2 t r @2 @1 #3 #4 #1 @9 #2 D-X @5 @7 @4 @6 20Data @3 CY1H10-B CY1H10-BS @8 #0 t CY1H10CY1H10 Material Note Component Parts No. q w e r No. !8 !