Aluminum High Vacuum Angle Valve -10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.
r e w q r e w q VG VP S070 VQ VKF N.C.
Q H H1 K KA MM N NA NN P QY S TD TT TX TY TZ Z ZZ B2 I D G Bore size -X 8 1 20 18 41 5 6 15 24 14 62 8 10 32 32 52 36 103 13 5 28 26 8 M8 x 1.25 M20 x 1.5 15.5 19.8 8 1 25 22 22 45 5.5 8 15 30 14 62 9 10 40 40 60 40 107 17 6 32 10 M26 x 1.5 M10 x 1.25 33.5 19.5 Individual -X 8 1 32 22 9 45 5.5 10 15 16 64 9 10 40 40 60 40 109 17 6 32 12 M26 x 1.5 M10 x 1.25 19.5 37.5 34.5 25.8 4 1 40 24
Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 1000 1000 1000 L5 [mm] L5 [mm] L5 [mm] 500 500 500 Mey m 0 0 0 0 4 2 6 8 10 5 10 15 20 0 0 10 20 30 L5 Work load [kg] Work load [kg] Work load [kg] 10 Series LEFS Table Accuracy A side B side Traveling parallelism [mm] (Every 300 mm) Model q C side traveling parallelism to A side w D side traveling parallelism to B side q LEFS25
11 12 13 14 15 CN0 CN1 CN2 CN3 CN4 CN5 CN6 CN7 i 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 CN0 CN2 CN4 CN6 CN8 CN10 CN12 CN14 0 1 2 3 0 1 2 3 CN1 CN3 CN5 CN7 CN9 CN11 CN13 CN15 1 q 4 5 6 7 4 5 6 7 3 q 5 8 9 10 11 8 9 10 11 7 12 13 14 15 9 12 13 14 15 11 PWR 13 PWR e 15 e t y y t Shown with cover removed.
to 125)(UM/BM)lJB (10/30/50) q Stopper Form/Diameter Part no.
Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5
110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 5.5 6 6 7 7 9 9 9 11 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 10 10 10 10 10 10 10 10 10 1 8 1 4 3 8 AMG150 , , 1 4 3 8 , AMG250 1 2 3 8
$Applicable shaft type: W $Applicable shaft type: W (mm) Y L2 Size (mm) 10 X L1 Size 3 to 8 5-( 8-Y) to (Y-1) 15 10 3 to 9 6-( 9-Y) to (Y-1.5) 9-(14-X) to (X-3) 5 to 14 Y = L1 = 20 15 3 to 10 7-(10-Y) to (Y-1.5) 10-(18-X) to (X-4) 8 to 18 L2 = 30 20 5 to 13 8-(13-Y) to (Y-2) 10-(20-X) to (X-4.5) 10 to 20 X = 40 30 7 to 15 9-(15-Y) to (Y-2) 12-(22-X) to (X-5) 10 to 22 Symbol: A11 The long
Rubber VQZ200 Rubber Metal VQZ300 Rubber Metal Note: The base mounted and body ported manifolds for the VQZ 100/200/300 are stocked in inch porting as part of the P.O.P. 7 Q Q Q Base Mounted Q Q Series VQZ100200300 Q Q Q Q Q Q Q Specifications Q Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .page 10 Manifold . . . . . .
ZYX3000: Flat Ribbon Cable 10 Polar Type DIN rail manifold Customer name Contact person Sheet number P .O. number Equipment Quantity set(s) Date required Manifold Specification Sheet Please fill in the order of q to r. q How to Order Manifold Fill in the blanks below with symbols of necessary specifications.
10 10 10 10 10 20 20 20 20 20 20 30 30 30 30 30 30 40 40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke
Torr (mmHg) 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 3. Mount a valve with its coil position upward, not downward. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.
Purchasing order is available in units of 10 pieces. KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 16 18 32 35 39 43 16 18 32 35 39 43 6 8 10 12 6 8.5 10 20.5 22 20.5 22 11.5 Port plug VVQ1000-58A The plug is used to block the cylinder port.
Special cap bolt Double Clevis CD hole H10 axis d9 [mm] Stroke range (mm) A CL CD CT size 10 to 100 160.5 150.5 25 10 5 101 to 200 185.5 175.5 CU RR CW L CL + Stroke A + Stroke +0.4 +0.2 CX 10 to 100 180.5 170.5 32 10 6 0.1 0.3 CZ 101 to 200 210.5 200.5 Stroke range (mm) CW CX CZ L RR CU size 10 to 100 25 14 20 18 36 14.5 10 101 to 200 10 to 100 32 14 22 18 36 18.5 10 101 to 200 Material:
Critical pressure 0.6 0.5 Sonic 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 JSXD30 Port size 1/4 JSXD30 Port sizes 3/8, 1/2 JSXD40 Port size 3/8 JSXD40 Port size 1/2 JSXD50 Port size 3/4 JSXD60 Port size 1 10 1000 2000 3000 10 1000 2000 3000 4000 15 2000 4000 6000 8000 15 2500 5000 7500 10 20 5000 10 15000 25 5000 10 15000 20 Flow rate Q [L/min (ANR)] For Air (Orifice diameter: 35 mm, 40 mm, 50 mm
1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 #0 @7 #1 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 10 Component Parts Material No. Description Note No.
W Horizontal lifting 13-11-99 Series ZPT/ZPR Component Parts Series ZPT Series ZPR Pad Diameter: 10 to 32 Pad Diameter: 10 to 32 r Buffer r Buffer t Adaptor e Adaptor q Pad q Pad With buffer With buffer Pad Diameter: 40, 50 Pad Diameter: 40, 50 r Buffer r Buffer e Adaptor t Adaptor w Lock ring w Lock ring q Pad q Pad With Buffer With Buffer Description Material Note Compornent Parts No.
25 80 D V S 50.2 10 7 20 38.5 110 60 10 7 20 38.5 110 LVQ60 available only as V.