ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

2000 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 Intermediate strokes are available. *1 Please consult

AS

Connection thread size NPT, R1/8 5.2 to 6.6 (7 to 9) NPT, R1/4 8.9 to 10.3 (12 to 14) NPT, R3/8 16.2 to 17.7 (22 to 24) 2. Chamfer dimension for female thread of the NPT, R1/2 20.7 to 22.1 (28 to 30) connection thread M5, 10-32 UNF 2.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

VQZ 1 (P) 5 (R1) 3 (R2) Port plug mounting port VQD 3 position exhaust center (A) 4 (B) 2 Nil A B 4 None Port 4(A) 1 (P) 5 (R1) 3 (R2) Port 2(B) 3 position pressure center (A) 4 (B) 2 5 Cylinder port 1 (P) 5 (R1) 3 (R2) C3 C4 C6 M5 L3 L4 L6 L5 One-touch fitting for 3.2 4 position dual 3 port valve One-touch fitting for 4 (2) (A) 4 (B) 2 Side ported A One-touch fitting for 6 5 (R1) 3 (R2)

2-Color Display High Precision

Lead wire length 3 m M12 4-pin pre-wired connector (Lead wire length 100 mm) Symbol X501 Rated pressure range Option 2 ZSE40A ZSE40AF 0.00 to 14.69 psi 14.50 to 14.50 psi Symbol Nil K Calibration certificate Piping specifications X531 R1/8, NPT1/8 R1/8 (With M5 female thread) Option 1 01 Refer to page 17 for details.

VZ3000

actuation VFN VZ314--01 (Piping: 6 x 1 m) Speed controller/Silencer AS3301F-02-06/AN110-01 Bore size Series CA1 Pressure 0.5 MPa Load factor 50% Stroke 400 mm Average speed (mm/s) Series 100 40 50 63 80 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ314--01 (Piping: 6 x 1 m) Speed controller/Silencer AS3301F-02-06/AN110-01 800 700 600 500 400 300 200

PSxx-OMM0006CN

UL1585 2 30[Vrms] 42.4[V ]2 UL (100 ) JIS B 8392-1 1.1.21.6.2:2003 () -5No.PS-OMM0006CN-E * (16 ) / / FG (49 N ) () () M8(3 ) * 6 33 () () 10m DC(-)() ( ) -6No.PS-OMM0006CN-E * ( ) () CE CE -550 (5 ) * ON , 1015 10 /1 2351 LCD -7No.PS-OMM0006CN-E * -8No.PS-OMM0006CN-E (M8(3 )11 ) 01 X M ISE40A 2 K ISE40A -0.11.000 MPa ZSE40A 0.0-101.3 kPa ZSE40AF -100.0100 kPa 1 01 R1

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

actuation b Cv VF 2 position VZS3150 1200 18 or less Single 0.22 1 4 0.53 0.09 2.4 0.58 0.17 2.6 VZS3250 1200 13 or less Double 0.27 1 4 0.53 0.09 2.4 0.58 0.17 2.6 VFR Closed center Exhaust center Pressure center VZS3350 500 26 or less 0.28 0.52 0.11 2.4 0.56 0.17 2.5 1 4 VP4 3 position VZS3450 500 26 or less 0.28 0.49 0.11 2.4 0.56 0.17 2.5 1 4 VZS VZS3550 500 26 or less 0.28 0.53 0.16

XL

For further details on solenoid valves, refer to the SMC solenoid valve catalog "SYJ 300, 500, 700" (E143-B). Note 3) Solenoid valves are shipped facing downward (flange side), but can be rotated to face upward.

AHC System Series MA

Nil S 1 2 When using an air gripper for AHC, use tool adapter MA3 0-AM3 MHY Tool stand 90 reverse unit MHW MA310 Y59A S1 MA310 90A R1 -X MRHQ Tool stand 90 reverse unit Lead wire length MA Auto switch type Nil L Grommet With 0.5 m lead wire With 3 m lead wire DNil 90 90A Without auto switch D-90 (2 pcs.) D-90A (2 pcs.)

OMR0032

Controller USB cable Communication 120.3 120.3 mm mm 200 200 mm/s mm/s (type A to mini-B) cable 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN3 PC (PC is prepared by the user.) 20 - 4.4 CN4: Counter connector (option) Connect the controller to the Multi-counter (CEU5) using the counter cable (LATH3-). Refer to section 6.2 Counter plug wiring (P.24).

No more element replacement!

How to Order N M X0 149 FND100 10 Nominal filtration rating Seal material Symbol Nominal filtration rating Symbol N V NBR Material 149 149 m FKM Element type Symbol M Gold mesh Type Port size Symbol Port size 10 R1 Specifications FND100V-10-M149X0 Model FND100N-10-M149X0 R1 Port size Bowl & Cover Stainless steel 304 O-ring Material NBR FKM Element Stainless steel 304 149 m Element nominal

Speed Controller with Indicator

Connection Female Thread: Rc, NPT, NPTF Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 Connection thread size Proper tightening torque [Nm] NPT, R1/8 3 to 5 NPT, R1/4 8 to 12 NPT, R3/8 15 to 20 NPT, R1/2 20 to 25 Connection Female Thread: G Chamfered area for female

Plate Cylinder

Single Knuckle Joint Double Knuckle Joint Sphere R(R1) (mm) (mm) NDH10 A1 E1 L1 MM A1 E1 L1 MM Part no. Size Size Part no.

Silencer Series AN

Tightening Torque (Metal type) Applicable tightening torque Nm Connection thread R 3/4 R1 R1 1/4 R1 1/2 R2 Selection 28 to 30 36 to 38 40 to 42 48 to 50 48 to 50 Caution 1. When selecting the silencer, the sonic conductance (including combined sonic conductance) of the silencer should be larger than that of the solenoid valve.

Digital Pressure Switch

ZSE10 ZSE10F ISE10 (vacuum) (compound) (positive pressure) Rated pressure range 0.0 to -101.0 kPa -100.0 to 100.0 kPa -0.100 to 1.000 MPa Set pressure range 10.0 to -105.0 kPa -105.0 to 105.0 kPa -0.105 to 1.050 MPa Withstand pressure 500 kPa 500 kPa 1.5 MPa Minimum display unit 0.1 kPa 0.1 kPa 0.001 MPa Applicable fluid Air, inert gases and incombustible gases Power supply voltage 12 to

Table of Contents

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200

MLU

CD-MU02 CD-MU03 CD-MU04 CD-MU05 R1 3 4 5 6 NZ 18 22 26 32 NX 9 11 13 16 NO 21 24 27 39 NL 8 10 10 16 R1 8.5 10 11 16 NDH10 NL 8.5 10 11 16 NX 9 11 13 16 NO 19.5 24 26 36 U1 11 14 15 20 U1 13 14 17 23 Part no. Y-MU02 Y-MU03 Y-MU04 Y-MU05 Part no. I-MU02 I-MU03 I-MU04 I-MU05 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 MLGP RLQ Knuckle pin and snap ring are included.

20

L1 (Extension nozzle length) Width across flats 14 R1/4 D L L2 H1 diameter Outside 4 Series VMG Dimensios: Nozzle Cover Cover for male thread nozzle (mm) Nozzle cover part no.

Exhaust Cleaner for Vacuum Pump AMV Series

150 175 AMV3-10 AMV6-14 AMV15-20 AMV37-20 AMV75-30 AMV160-40 R1 R1 1/2 R2 R2 80 (3B) JIS 10K FF flange 100 (4B) JIS 10K FF flange 789

20

L1 (Extension nozzle length) Width across flats 14 R1/4 D L L2 H1 Outside diameter 4 Series VMG Dimensios: Nozzle Cover Cover for male thread nozzle [mm] Nozzle cover part no.