Size: 32, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 3; LEY32, 4, Stroke: 50mm, Motor: w/Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 5m, Controller Type (LEC, JXC): w/o Controller, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication Plug Connector or

Size: 32, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 3; LEY32, 4, Stroke: 200mm, Motor: w/Lock, Rod End Thread: Rod End Male Thread, 1 Rod End Nut Included, Mounting: Ends Tapped (Standard), Actuator Cable Length: 5m, Controller Type (LEC, JXC): w/o Controller, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication

Size: 32, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 3; LEY32, 4, Stroke: 400mm, Motor: w/Lock, Rod End Thread: Rod End Male Thread, 1 Rod End Nut Included, Mounting: Ends Tapped (Standard), Actuator Cable Length: 5m, Controller Type (LEC, JXC): w/o Controller, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication

Size: 32, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 3; LEY32, 4, Stroke: 200mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 5m, Controller Type (LEC, JXC): w/o Controller, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication Plug Connector

Size: 32, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 3; LEY32, 4, Stroke: 500mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 5m, Controller Type (LEC, JXC): w/o Controller, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication Plug Connector

AHC System Series MA

M3 x 10 (4 pcs.) 11 14 15 20 740 AHC System Series MA2 How to Order AHC unit AHC unit MA 210 Y M3 N R3 Tool adapter Robot adapter Without robot adapter 8 10 11 14 15 20 Nil S1 R1 R2 R3 R4 R5 Auto hand changer Air gripper for AHC Applicable shaft diameter Transportable mass Transportable mass 3 kg 2 AHC unit Electric specifications Air connection size M3 M3 x 0.5 None N Air gripper for AHC

Vacuum Module Series ZX

ZX1-R1 R2 R3 R4 R5 R6 R7 R8 Symbol Part no. ZX1-R 9 R10 R11 R12 R13 R14 R15 R16 PS PS PS PS PV PV PV PV PV PV PV PV R1 R2 R3 R4 R5 R6 R7 R8 R 9 R10 R11 R12 R13 R14 R15 R16 PE PE Caution when ordering manifold PD PD PD PD PE PE The asterisk denotes the symbol for assembly. Prefix it to the ejector part numbers to be mounted.

Large Size Vacuum Module: Series ZR

Symbol ZR1-R1 -R2 -R3 -R4 -R5 -R6 -R7 -R8 BM1 ZR1 R1 R2 R3 R4 R5 R6 R7 R8 R9 R10 R11 R12 R13 R14 R15 R16 PV PV PV PV PV PV PV PV PE PE Refer to Example 1).

Metal Seal/Rubber Seal Series VQ Body Ported

235.5 225 235.5 237.5 248 250 260.5 262.5 273 L3 L4 100 110.5 2-4-40 Body Ported Series VQ0/1000/2000 Plug Lead Unit: Flip Type VQ2000 55.5 (L plug connector) AC, Latching Manual override 50.5 (L plug connector) VQC L4 L3 49 (L plug connector) 5.2 AC, Latching L2 L1 52.5 SQ 44 (L plug connector) 48 Indicator light DIN rail clamp screw 5.5 31 VQ0 12 D-sub connector mounting screw VQ4 VQ5 R5

VQZ1000/2000/3000

5 (R)-M57 (Lead wire length) Cross section 0.23 mm2 Cover diameter 1.5 300 58.5 <63.5> 73.5 137.5 Indicator light 62 160 < >: AC 2-7-44 Base Mounted 45 45 Series VQZ1000/2000/3000 Plug Lead Unit: Single Unit VQZ3000 2 position single Grommet (G): VQZ3150 1(R)-G-02 03 300 (Lead wire length) 95 58 28 10.5 10.5 (For Rc 3/8) (For Rc 3/8) 9 9 24.5 mounting hole (For Rc 1/4) (For Rc 1/4) 5 R5

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

plug connector (M): VQZ2 5 (R)lMl 0 1 01 02 57 Indicator light Cover diameter 1.5 Cross section 0.23mm2 (Lead wire) 73.5 135.5<137.5> 300 61.5<62.5> 160 58.5<63.5> < >: AC 1.12-42 VQZ1000/2000/3000 Base Mounted VQZ3000 2 position single 0 1 02 03 Grommet(G): VQZ315 (R)lGl 300 95 58 28 (Lead wire length) 10.5 10.5 24.5Mounting holes (Rc(PT)3/8) (Rc(PT)3/8) 9 9 (Rc(PT)1/4) (Rc(PT)1/4) 5 R5

PFxx-OMP0001CN

25 ) NPN PNP 80 mA (NPN) DC28 V () NPN 1 V (80 mA ) PNP 2 V (80 mA ) 4 0.05 0.1 0.5 1 2 5 0 -62No.PF-OMP0001CN-F PFMB7501 PFMB7102 PFMB7202 15 V420 mA () 1 k 6 24 V 600 12 V 300 7 0.4 V ()30 msec. 8 9 L/mincfm 10 3 Lft -25525 L/min -501050 L/min -1002100 L/min (-44 [ 0]) (-99 [ 0]) (-1919 [ 0]) 0999,999,990 L 1 L/min 10 L LCD 4 7 ON (OUT1/OUT2 IP40 AC1000 V 1 50M

PFxx-OMK0003CN

.(-700 kPa) (0kPa 4) -70300 kPa -100400 kPa 500 kPa 5 15 V 5 ms 1 k DC1224 V10(p-p) 10() 16 mA IP40 050 () 050 -1060 () 3585R.H.() AC1000 V1 50M (DC500 V ) CEULCSARoHS M50.8(11.5 Nm) PPSSiAuSUS316C3604() 30 g()10 g() 1 20 3VINOUT 5V OUTIN 1 V 3F.S.4 V(15 V) 40 kPa 5 2 0.15 mm 0.58 mm 0.88 mm 2.6 -19No. PF-OMK0003CN-E PFMV5 [V] PFMV5 [V] -20No.

PF-OMN0011_C

pulse 0.5 L/pulse 1 L/pulse 2 L/pulse L/minL 0.5F.S. 0.5F.S. 0.5F.S. 0.5%F.S.(25 ) 9.9 L 9 L 1 0.1L 0.5L 1L NPN PNP 80 mA DC28 V NPN1 V (80 mA ) PNP1.5 V (80 mA ) 2 1 s/2 s 3 1 s/2 s 15 V 1 k 420 mA DC12 V 300 DC24 V 600 -66No.PF-OMN0011CN-C PF3W30 0.4 V ()30 ms / 2 4 7 2 /6 11 ) 5 / 12 DC1224 V10 50 mA 5P 4P (e-con) IP40( IP65) 050 () 3585R.H.() AC1000V1 50M

DOC1003077

Current consumption 12.5A (Peak current 18A) connector Insulation resistance 50M or more (DC500V) J.S.T. Mfg. Over voltage category Category I 2 DC24VJFA connector J4000 series Fan speed control function SC02B-J42SK-GHXR Pollution degree Pollution degree II Only trained personnel should handle or operate the product.

HEC-OM-Y008

Insulation resistance 50M or more (DC500V) JFA connector J4000 series 2 DC24VOver voltage category Category I SC02B-J42SK-GHXR Pollution degree Pollution degree II Limitation of hazardous substance RoHS compliant products 1 RS-485 BUS + 5 4 3 2 1 Do not modify or reconstruct the unit.

A_HEC-OM-K001

Power interruption Insulation resistance 50ms or less 50M or more (for removal of surge absorber) 2000V in both normal and common modes (1s width impulse noise) Voltage discharged to body: 8kV or less (Air discharge) Noise resistance Electrostatic discharge resistance Dimensions (Note 3) Paint color Weight W100D320H215mm Urban white Approx. 6kg W140D350H215mm Urban white Approx. 8kg W165D447H215mm

HEC-OM-S019

HEA Series (see section 2.5) 1 Safety Instructions Continued Insulation resistance 50M or more (DC500V) Constant temperature air flow rate 20 to 200L/min(ANR) Over current protection 10A circuit protector Inrush current 20A or less (100V) Pollution degree Pollution degree II Fluid Compressed air Current consumption Max.3A (100V) Port size IN/OUT: Rc1/4 Indication temp. range -9.9 to 60.0

FGX-OM-N027

How to Order / Specifications 1) How to order Material Pressure gauge Symbol Symbol No symbol G Port size Seal material NBR FKM gauge No Pressure gauge Pressure Symbol 20 Element size Element included Symbol A B Port size Rc2 Model change symbol Element length 190L440 190L770 Nominal filtration Symbol 005 010 025 050 100 Nominal filtration 5m 10m 25m 50m 100m 2) Specifications Table 3-

CEP1

CEU5 3 CEU1 , CEP1 CEU5 ,CE1-R,23m ,, (8 ) CEP1 ,CE1-R, CEP1 ()() CEP1 ,CE1-R C C () CEP1, CE1-ROOC CE1-RO5 CE1-R10 CE1-R15 CE1-R20 CE1-R*C 3 3-1 CEP1B12 CEP1B20 () 1.5MPa 1.0MPa 0.15MPa 0.1MPa 50~300mm/s 0~60 () 25~85%RH() 0~+1.0 2 3 , JIS2 3-2 7,6 () [,R03-J8M] 23m*1 ,<> 145 DC12V~DC24V(10%) [1%] 50mA 0.01mm(4 ) (20) 0.02mm*2 (Max DC24V,40mA ) A /B DC500V,50M