Prevents Micro-Bubbles

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SET POS. 53 127 43 63 VX3 (Max. 50) 114 VXA 53 VN 43 63 LVC LVA LVH LVD LQ-GM LQ-GL LVQ LQ 50 LVN 50 207 85 TI/ TIL 342 85 LQ-GL 40 28 PA SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 PAX 4-R3 4-R3 (Max. 91) 325 PB (Max. 91) 191 87 60 87 60 112 112

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SET POS. 53 127 43 63 VX3 (Max. 50) 114 VXA 53 VN 43 63 LVC LVA LVH LVD LQ-GM LQ-GL LVQ LQ 50 LVN 50 207 85 TI/ TIL 342 85 LQ-GL 40 28 PA SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 PAX 4-R3 4-R3 (Max. 91) 325 PB (Max. 91) 191 87 60 87 60 112 112

LVQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SET POS. 53 127 43 63 (Max. 50) 114 53 43 63 LQ-GM LQ-GL 50 50 207 85 342 85 LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 17-5-84 Fitting Assembly Procedure Assemble fittings following

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

. + 4 x (n pcs. 1) 36 360.3 4 x R3 or less 4 x R3 or less 67 or more 739 Series ZSE80/ISE80 Dimensions Panel mount (Bottom ported) 50 40 24.2 7.5 51.2 71.1 38.6 Panel-cut dimensions 360.3 36 x n pcs. + 4 x (n pcs. 1) 360.3 36 4 x R3 or less 4 x R3 or less 740 Series ZSE80/ISE80 2-Color Display Digital Pressure Switch For General Fluids F in brackets stand for the function codes.

IDX-OM-M051

/4 R3/4 20 50 165 475 9902 1030 950 Facility water outlet 1.3 Name and function of parts Terminal block for signal (Symbol: W5) (Symbol: W5) R3/4 R3/4 Refer to 6.3 Outer dimensions 6 5 IDF100F~150F-W IDX-OM-M051 Air Dryer 6.

IDX-OM-Z004

/4 R3/4 20 50 165 475 9902 1030 950 (-W5) -W5 1,3 (-W5) -W5 R3/4 R3/4 IDF100F150F-W 6 5 IDX-OM-Z004 6 6.4 IDF100/125F/150F-30-W R R GFCI PE TB1 THR MC1 CM OLR MC1 HM PRR SWL PLC TB2 Y0 1 MC1 COM0 2 Y3 3 COM3 4 MC1 Y1 X4 5 () PRR () COM1 X0 6 THR X1 PRS2 PRS3 X3 L P P N 24V EDV PE CM OLR V V MC1 THR TB1,2 SWL PRR PRS1 PRS2 PRS3 PLC HM GFCI EDV IDF100F150F-W 6 6 IDX-OM-Z004

Series KC Self-seal Fittings

L1 D L2 A Rc(PT)1 8 KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 28.0 33.5 38.5 39.0 13.6 17.6 25.2 27.0 17.8 28.5 33.8 57.1 14 17 19 24 11.0 14.0 17.0 20.0 25.0 30.0 34.5 35.0 3 8 Rc(PT)1 4 Rc(PT) Rc(PT) 1 2 85 Series KB Piping Module 3 Other Piping Material Nipple: KBN Weight (g) L A D Part No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3

XM, XY

part XSA Seal material Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Changed part Note 2) Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil N1 XGT w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 CYV Q1 R1 R2 R3

15 to 400

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

0.23mm2 < >: AC 61.5 54 3 4 5 36 0 1 M plug connector (M): VQZ2 2 (R)wMwC4, C6, M5 37.5 <42.5> 300 (Lead wire length) Cover diameter 1.5 Cross section 0.23mm2 73.5 160 135.5 <137.5> 61.5 <62.5> Indicator light < >: AC 1.12-14 VQZ1000/2000/3000 Body Ported VQZ3000 2 position single 0 1 Grommet (G): VQZ312 (R)wGwC6, C8, C10, 02 300 (Lead wire length) 19 95 58 24.5Mounting holes 24.4 9 9 R3

VCHN

How to Order VCHN 06 3 Option Port size Nil None Symbol VCHN4 VCHN3 Port size F With freeze reduction 06 10 12 14 R3/4 Symbol R1 Body size R11/4 3 4 R11/2 608 5.0 MPa Silencer Series VCHN Specifications Model VCHNF4 VCHN4 VCHNF3 VCHN3 Fluid Air, Insert gas Max. operating pressure (MPa) 5.0 (Solenoid valve inlet pressure) Relief valve unlocking pressure (MPa) 1.8 R3/4 R1 R3/4 R1 R1 R11/4 R11

2-Color Display High Precision

. + 4 x (n pcs. 1) 36 0.3 36 0.3 4 x R3 or less 4 x R3 or less 67 or more Panel thickness 1 to 5 mm Note) This is the minimum value for the piping method 01 or N01. Take the piping material and tubing into account for design.

ASR

(mm) Port size Pressure valve ASR430F-02 ASR530F-02 ASR530F-03 ASR630F-03 ASR630F-04 6 8 10 12 Flow valve ASQ430F-02 ASQ530F-02 ASQ530F-03 ASQ630F-03 ASQ630F-04 R1/4 R1/4 R3/8 R3/8 R1/2 Pilot valve and two-way flow control valve integrated into a single construction Specifications Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Variable 0.1 to 0.3 MPa Set pressure range Fixed (option

Pallet Lock Cylinder W-R1/W-R3 Series

Pallet Lock Cylinder W-R1/W-R3 Series How to Order W R1 S2 Type 1 B W R3 S B Type 3 Proximity Switch B With mounting bracket (Without proximity switch) SC With proximity switch * For details, refer to the table below.

One-touch Fittings

connection 001 Same diameter tubing Symbol Model Oval type Round type H Male connector v v S Hexagon socket head male connector v v F Female connector v v L Male elbow v v LU Branch male elbow v V Universal male elbow v v W Extended male elbow v v T Male branch tee v v Y Male run tee v v D Male delta union v v U Branch Y v UD Double branch Y v M5 M5 x 0.8 01 R1/8, Rc1/8 02 R1/4, Rc1/4 03 R3

! Contact our sales office for delivery dates and prices as this is a special model. SP133X-010E P: RU P.G.Information (Specialized Product) SMC CORPORATION Pilot Operated Check Valve 4-14-1,SOTO-KANDA, CHIYODA

Metric size Inch size Body size Port size 3 1/8 standard 06 6 07 1/4 Symbol Cylinder side 4 1/4 standard 08 8 09 5/16 01 R1/8 5 3/8 standard 10 10 11 3/8 02 R1/4 6 1/2 standard 12 12 13 1/2 03 R3/8 04 R1/2 N01 NPT1/8 N02 NPT1/4 N03 NPT3/8 N04 NPT1/2 XTO Series Applicable tubing O.D.

Size: 25, Motor Mounting Position: R (Right), Motor: A [Servo Motor (24 VDC)], Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 150mm, Motor Option: None, Rod End Thread: Female, Mounting: F (Rod Flange)

Size: 25, Motor Mounting Position: R (Right), Motor: A [Servo Motor (24 VDC)], Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 30mm, Motor Option: None, Rod End Thread: Female, Mounting: D (Double Clevis)

Size: 25, Motor Mounting Position: R (Right), Motor: A [Servo Motor (24 VDC)], Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 200mm, Motor Option: C (w/Motor Cover), Rod End Thread: M (Male)