5

Bore size (mm) B1 C1 H1 L1 MM X 12 8 9 4 14 M5 x 0.8 10.5 16 10 10 5 15.5 M6 x 1.0 12 20 13 12 5 18.5 M8 x 1.25 14 25 17 15 6 22.5 M10 x 1.25 17.5 Standard Without auto switch With auto switch C D E F H I K L M N OA OB Q RA RB T A B A B 12 5 to 30 25.5 22 30.5 27 6 6 25 5 M3 x 0.5 32 5 3.5 15.5 3.5 M4 x 0.7 6.5 7.5 7 4 0.5 16 5 to 30 25.5 22 30.5 27 8 8 29 5 M4 x 0.7 38 6 3.5 20 3.5 M4 x

Process Gas Diaphragm Valve

Select compatible materials of construction for the gas Vacuum to 125 psig (0.9 MPa) 200 psig (1.4 MPa) 375 pisg (2.7 MPa) -10 to 71C (No freezing) 0.29 0.5 Inboard leakage Outboard leakage 2 x 10-11 Pam3/s 2 x 10-10 Pam3/s 1) 4 x 10-9 Pam3/s 1) Ra 10in. (0.25 m) Face seal, Tube weld 60 to 110 psig (0.4 to 0.76 MPa) M5 x 0.8 Top Bottom mount 0.06 in3 (1.07 cm3) 0.24 kg 2) Leak rate Across

NAAMS Standards Compliant

Bore size Arm opening angle 050 50 equivalent 063 63 equivalent J 15 H 30 G 45 F 60 E 75 D 90 C 105 B 120 A 135 * The stopper bolt kit includes a stopper bolt and mounting brackets. 3 NAAMS Standards Compliant Power Clamp Cylinder CKZ3N -X2742A -X2568 Dimensions: Base Type Rubber cover type XC XB R RR RA (Dual arm) RB (Right arm) RC (Left arm) Release point Pivot point with square flats

Power Clamp Cylinder

38.50.05 470.05 450.1 250.1 44.5 350.02 120.05 +0.1 40 0 99.4 96.8 250.02 3.5 8N9 ( ) 0 -0.036 265.9 350.02 2 x 2 x 6 H7 depth 8 2 x 6 H7 depth 10 NPT 1/8 G 2 x 2 x M6 x 1.0 depth 10 4 x M6 x 1.0 depth 10 NPT 1/8 G 52 52 198 B Power Clamp Cylinder Series CKZT Dimensions (Clamp Cylinder Without Arm) CKZT50, 63, 80 Release point XA CK1 CLK2 C(L)KQ MK2T/MK2/MK CKZ2N CKZT CLKZ1R CK/M(D)UKA RA

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

oc c a o t r cl cl en nt er er e tm e m nt nt is us u t u w C 0 us o 90 k o c lo o C l dj C C 19 dj se c Cl 1 A k A A wi e w oc ge dj k A is oc k ng dj u wi e Cl an st us se ro ra m r ta t ot m r d at ti n e n io on e n e on nt e nt tio nd r r a a ti n n g ta e 5 9 g ta e 9 ro 5 ro m m u im u im ax M ax M Note) The drawing shows the rotation range of the positioning pin hole.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Basic Style (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 C D E F H I K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5

Compact Cylinder with Solenoid Valve/

Example) Lead wire length 2000 mm Electrical entry When ordering cylinder with valve CVQM32-30-M9B-5MOZ SY100-30-4A-20 M-type plug connector with lead wire (Lead wire length 300 mm) M MO M-type plug connector without connector 5 Series CVQM Dimensions 32 to 63 EXH 2 x P2 F SUP P1 S S Q 2 x HB through Manual button 2 x HA through V W 2 x 2 x OA effective length RA KA 2 x N through Y EB (KB

CQ2

(mm) Standard stroke range Bore H A 115 115 125 B 83 83 91 C (2) D 36 36 40 E 142 158 178 I 190 210 238 J 11 10 10 K 32 32 36 L 16 16 17 M 114 128 144 N 12.5 12.5 14.5 OA OB 21.2 21.2 24.2 Q 24.5 24.5 27.5 RA 25 25 28 RB 18.4 18.4 21.2 S 162 177 197 U 80 88 98 125 140 160 30(22.5) 30(22.5) 33(26.5) M22 X 2.5 M14 X 2 10, 20, 30, 40, 50 75, 100, 125, 150 175, 200, 250, 300 M22 X 2.5 M14 X 2

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod End Male Thread Bore size (mm) 12 16 20 25 (mm) C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Basic Style (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 C D E F H I K L M N OA OB Q RA

RZQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com J E 4-O1 effective thread depth RB RA W 4-O1 T Section a-a' Basic style (Through-hole): RZQB 2-RR 50, 63 Flat washer (Included) 4-HR 2-RR Flat washer (Included) b 2-N 4-O 4-N b' Section b-b' (mm) Bore size (mm) A B C D FB G H I J K L M N O1 O P Q RA RB

MG

E B + Stroke A + Stroke Dimensions (mm) Bore size (mm) Standard stroke (mm) A E 25, 50 st Over 50 st B C DA DB FA FB G GA GB GC H HA J K L 25, 50 st Over 50 st 50 80 86 118 110 151 20 25 30 45 0 0 24 33 30 35 12 18 72 95 14 19 11 24 12 14.5 160 242 M10 M12 35 47 37 48 50 66 86 118 44 65 25, 50, 75, 100, 125, 150, 175, 200 Bore size (mm) Standard stroke (mm) 50 80 RB RR RL QA QB RA P PA PB

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

OA B C DA FA Standard stroke (mm) 63 80 100 77 96.5 116 20 25 30 10 12 15 39 45.5 55.5 103 121.5 145 M10 M12 M14 162 202 240 16.5 14.5 18 13.5 15.5 19 16.5 19 23 78 91.5 111.5 15 15 20 12 18 25 16 22 25 49 56.5 66 M6 X 1.0 M8 X 1.25 M8 X 1.25 22 26 32 58 54 62 39 46 56 M10 X 1.5 M12 X 1.75 M14 X 2.0 8.6 10.6 12.5 25, 50, 75, 100, 125, 150, 175, 200 (mm) Bore size (mm) OB OL P PA PB PW Q RA

It is also available for common exhaust from manifolds., SILENCER, HIGH NOISE REDUCTION, AIRLINE EQUIPMENT, AN SILENCER, 2X, AN NO SIZE RA(MISC./OTHER), 2.13244 lb

It is also available for common exhaust from manifolds., SILENCER, HIGH NOISE REDUCTION, AIRLINE EQUIPMENT, AN SILENCER, 2X, AN NO SIZE RA(MISC./OTHER), 1.28474 lb

The internal smoothness of the TQ's inner layer is equivalent to Ra 0.02 m., and because the TQ is translucent it helps in identifying fluid color.  Compared to SMC's TL series, flexibility has been improved by up to 55%, and the weight has been reduced by approximately 44%. 

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

Lead[mm] Motor mounting position Symbol LEKFS25 LEKFS32 LEKFS40 Nil In-line 25 32 40 High performance R Right side parallel H 20 24 30 Battery-less Absolute G L Left side parallel A 12 16 20 Step Motor 24VDC B 6 8 10 Stroke Motor option Actuator cable type/length 50 50 Nil Without option Robotic cable [m] to to B With lock Nil None R8 8 1200 1200 Grease application (Seal band part) R1 1.5 RA

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

Actuator cable type/length Stroke [mm] Robotic cable [m] Stroke Note Nil None R8 87 Size Applicable stroke R1 1.5 RA 107 50 500 16 50,100,150,200,250,300,350,400, R3 3 RB 157 450,500 R5 5 RC 207 50 800 25 50,100,150,200,250,300,350,400, 450,500,550,600,650,700,750,800 Controller 50,100,150,200,250,300,350,400, 450,500,550,600,650,700,750,800, 850,900,950,1000 50 1000 32 Nil Without controller

Electric Actuator / Guide type 《 Battery-less absolute (Step motor 24VDC) 》

R1 C5H73 Size Motor type Motor mounting position Bearing type 25 32 40 Symbol Motor Compatible Nil Top mounting M Sliding bearing controller D In-line JXC5H JXC6H JXC9H JXCPH JXCEH High performance G Battery-less absolute Step motor 24 VDC Lead [mm] Actuator cable type/length [m] Symbol LEG25 LEG32/40 Robotic cable[mm] 6 8 Nil None R1 1.5 Stroke [mm] R3 3 30 30 50 50 R5 5 100 100 R8 8 * RA

Electric Slide Table / High Precision Type 《 Battery-less absolute 》

mm] L Left side parallel Size *For size 8 8 16 25 10 12 16 (2)Motor mouting position 5 6 8 In-line D C 2.5 Right side parallel R Left side parallel L *For size 16/25 (5)Storke [mm] (7)Actuator cable type/length Robotic cable [m] (8)Controller Size #Please refer to the catalog for the controller part. 8 16 25 Without cable Nil R1 R3 R5 R8 50 1.5 75 3 5 8 100 150 (6)Motor option 10 15 20 RA

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

R1 1.5 RA 10 * R3 3 RB 15 * R5 5 RC 20 * Applicable Stroke Table *Produced upon receipt of order Stroke Size 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 1100 1200 Controller *Refer to catalog 16 25 32 40 Caution The actuator body and controller are sold as a package.