Size: 40, Motor Mounting Position: Left, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 150mm, Motor Option: with Lock/Motor Cover, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Standard Cable, Actuator Cable Length: 1.5m, Controller Type - LEC, JXC: LECA6, PNP, Step Data Input Type, I/O Cable Length for

Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 250mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Standard Cable, Actuator Cable Length: 1.5m, Controller Type - LEC, JXC: LECA6, PNP, Step Data Input Type, I/O Cable Length for LEC: -, Controller

Size: 16, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 100mm, Motor Option: None, Rod End Thread: Male, Mounting: Both Ends Tapped (Standard), Actuator Cable: Standard Cable, Actuator Cable Length: 1.5m, Controller Type - LEC, JXC: LECA6, PNP, Step Data Input Type, I/O Cable Length for LEC: -, Controller

Size: 32, Motor Mounting Position: In-line Type, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm, Stroke: 30mm, Motor Option: w/Lock, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Standard Cable, Actuator Cable Length: 1.5m, Controller Type - LEC, JXC: LECA6, PNP, Step Data Input Type, I/O Cable Length for LEC: -,

Series: Belt Drive, Size: 32, Motor: Step Motor (Servo 24 VDC), Lead: T, Stroke: 800mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: With, Positioning Pin Hole: Housing B (Bottom), Actuator Cable: Standard Cable, Actuator Cable Length: 1.5m, Controller Type - LEC, JXC: LECA6 PNP, Step Data Input Type, I/O Cable Length for LEC: -, Controller Mounting: -,

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 16, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm, Stroke: 300mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Standard Cable, Actuator Cable Length:

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 16, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm, Stroke: 500mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Standard Cable, Actuator Cable Length

Series: Ball Screw Drive, Accuracy: High Precision Type, Size: 40, Motor Mounting Position: Right Side Parallel, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm, Stroke: 1000mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Standard Cable

Style: Double Axis Type, Size: 32, Motor Mounting Position: Bottom Mounting, Stroke: 150, Motor Option: w/o Option, Actuator Cable Type: Standard Cable, Actuator Cable Length: 1.5m, Controller Type - LEC, JXC: LECP6, Step Data Input Type, PNP, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector or I/O Cable Length for JXC: -

Style: Double Axis Type, Size: 32, Motor Mounting Position: Bottom Mounting, Stroke: 300, Motor Option: w/Lock, Actuator Cable Type: Standard Cable, Actuator Cable Length: 1.5m, Controller Type - LEC, JXC: LECP6, Step Data Input Type, PNP, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector or I/O Cable Length for JXC: -

A

~ 500 14 88 32 350 ~ 600 14 90 40 350 ~ 800 15 101 50 350 ~ 1000 16 116 63 350 ~ 1100 16 119 80 350 ~ 1200 23 145 100 350 ~ 1300 23 145 B R A C K E T M O U N T I N G S T R O K E Bore Size (mm) Bracket Mounting Stroke 20 100st or more 25 125st or more 32 150st or more 40 200st or more 50 250st or more 63 300st or more 80 400st or more 100 500st or more Bore Size Stroke range (mm) A AA AB

Compact Cylinder Series NCQ8

175 200 250 300 350 400 NCQ8B200-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B250-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 #4-40UNC3/4 7/8 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC3/4 7/8 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC1-1/8 1-1/4 1-3/8 1-

Guide Cylinder/Compact Type Series MGC

to 500 14 88 150 st or more 136 350 to 600 14 90 200 st or more 156 350 to 800 15 101 250 st or more 202 350 to 1000 16 116 Note 1) Dimensions marked with are not required for the one without rear plate.

Secondary Batteries

Mounting style B F Basic style Front mounting flange style Cylinder stroke (mm) Bore size (mm) Standard stroke (mm) Long stroke (mm) Bore size 20 25 32 40 50 20 mm 20 75, 100, 125, 150, 200 250, 300, 350, 400 25 mm 25 350, 400, 450, 500 32 mm 350, 400, 450, 500, 600 32 40 mm 50 mm 75, 100, 125, 150, 200 250, 300 350, 400, 450, 500, 600, 700, 800 40 350, 400, 450, 500, 600, 700, 800, 900,

2

Applicable air dryer IDF100F IDF125F, 150F IDF190D, 240D IDF370D Capacity Type 360 400 400 400 7 kVA 9 kVA 14 kVA 18 kVA 540 650 650 650 400 450 450 450 260 300 300 300 300 350 350 350 11 13 13 13 30 40 40 40 94 kg Three220, 240, 380, 400, 415, 440 V (50/60 Hz) phase 109 kg 200V (50/60 Hz) D 4 x F A Double152 kg turn (mm) 179 kg 43 Optional Accessories Series IDF/IDU Air Preparation Equipment

5 Port Solenoid Valve Series SV1000/2000/3000/4000

1 P (Station n) (Station 1) Light/Surge voltage suppressor Individual SUP spacer Interface regulator Interface regulator Max.21 (DIN rail dimension) Individual EXH spacer 71.5 7.5 68.2 56.5 19.7 Block separation lever B B B B 145.6 127.6 A A A A B A B A B A B A n: Stations L Dimension L n 2 148 137.5 122.5 13 3 173 162.5 138.5 17.5 4 185.5 175 154.5 15.5 16 373 362.5 346.5 13.5 15 360.5 350

CL

Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Max.

0.4

Stations Stations Stations Stations L dimension (mm) L dimension (mm) L dimension (mm) L dimension (mm) 190 210 230 250 270 290 310 330 350 370 390 410 430 450 470 490 510 530 550 570 590 610 630 Station 2 Station 8 Station 14 Station 20 Station 3 Station 9 Station 15 Station 21

SQ1000/2000

450 Station 3 Station 15 230 470 Station 4 Station 16 250 490 Station 5 Station 17 270 510 Station 6 Station 18 For double wiring SSQ1000 P 41A 350 290 530 Station 7 Station 19 310 550 Station 8 Station 20 330 570 Station 9 Station 21 350 590 Station 10 Station 22 L 370 610 Station 11 Station 23 390 630 Station 12 Station 24 410 Station 13 108 Series SQ1000/2000 How to Add Manifold Stations

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

kPa 0 kPa 0 kPa 20 750 kPa 30 kPa 50 kPa 50 kPa 350 kPa 10 70 kPa 70 kPa 350 kPa 00 20 40 60 80 100 Flow [L/min] Flow [L/min] Flow Rate Characteristics (Reference Data) PF2M710(-L) PF2M705(-L) PF2M725(-L) 10 L/min 5 L/min 25 L/min 12 10 8 6 4 2 0 0 2 4 6 8 10 12 14 30 25 20 15 10 5 0 0 2 4 6 8 10 12 14 6 5 150 kPa 350 kPa 150 kPa 150 kPa Flow [L/min] Flow [L/min] Flow [L/min] 4 3 350 kPa