Compatible Motor: Step Motor, Servo/24 VDC, Parallel I/O Type: NPN, I/O Cable Length: 3m, DIN Rail: Screw Mounting, Type: Rod Type, Body Size: 16, Bearing Type: Ball Bushing Bearing, Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24 VDC), Lead: 16: 10mm; 25: 12mm; 32: 16mm, Stroke: 50mm

Compatible Motor: Step Motor, Servo/24 VDC, Parallel I/O Type: PNP, I/O Cable Length: 5m, DIN Rail: DIN Rail Mounting, Type: Rod Type, Body Size: 16, Bearing Type: Ball Bushing Bearing, Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24 VDC), Lead: 16: 10mm; 25: 12mm; 32: 16mm, Stroke: 250mm

Compatible Motor: Step Motor, Servo/24 VDC, Parallel I/O Type: PNP, I/O Cable Length: 5m, DIN Rail: Screw Mounting, Type: Rod Type, Body Size: 16, Bearing Type: Ball Bushing Bearing, Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24 VDC), Lead: 16: 10mm; 25: 12mm; 32: 16mm, Stroke: 250mm

Compatible Motor: Step Motor, Servo/24 VDC, Parallel I/O Type: NPN, I/O Cable Length: 3m, DIN Rail: DIN Rail Mounting, Type: Rod Type, Body Size: 16, Bearing Type: Ball Bushing Bearing, Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24 VDC), Lead: 16: 10mm; 25: 12mm; 32: 16mm, Stroke: 150mm

Compatible Motor: Step Motor, Servo/24 VDC, Parallel I/O Type: NPN, I/O Cable Length: 5m, DIN Rail: Screw Mounting, Type: Rod Type, Body Size: 16, Bearing Type: Ball Bushing Bearing, Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24 VDC), Lead: 16: 10mm; 25: 12mm; 32: 16mm, Stroke: 50mm

Protocol: 9 (EtherNet/IPâ„¢), Mounting: 8 (DIN Rail Mounting), Cable Connector: w/o Plug Connector, Actuator: LEY, Type: Rod Type, Body Size: 16, Bearing Type: L (Ball Bushing Bearing), Motor Mounting: Top Mounting Type, Lead: A (16: 10mm; 25: 12mm; 32, 40: 16mm), Stroke: 200mm

Controller Series: LECP1 (Programless Controller), Parallel I/O Type: N (NPN), I/O Cable Length, m: 3, Actuator Series: LEY (Rod Type), Size: 16, Motor Mounting Position: L (Left Side Parallel Type), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm), Stroke: 50mm

Controller Series: LECP1 (Programless Controller), Parallel I/O Type: P (PNP), I/O Cable Length, m: 3, Actuator Series: LEY (Rod Type), Size: 16, Motor Mounting Position: L (Left Side Parallel Type), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm), Stroke: 50mm

Controller Series: LECP1 (Programless Controller), Parallel I/O Type: P (PNP), I/O Cable Length, m: 5, Actuator Series: LEY (Rod Type), Size: 16, Motor Mounting Position: L (Left Side Parallel Type), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm), Stroke: 200mm

Table of Contents

0 to 50C Linearity Note 1) 5% F .S. or less 3% F .S. or less Repeatability Note 1) 2% F .S. or less 1% F .S. or less Temperature characteristics 2% F.S. or less (15 to 35C based on 25C), 3% F .S. or less (0 to 50C based on 25C) Pulse output, N channel, open drain, output for display unit PF2W3.

CATALOG

/ 14 to 122F -10 to 50C / 14 to 122F Max Operating 2 Position S & D 20Hz 5Hz OR CONTACT YOUR LOCAL SMC REPRESENTATIVE.

2

Inlet air temperature 5 to 50C IDF (For IDF100F to 150F, up to 60C is allowed.)

Proposals for Energy Saving

Note 2) Power supply 12 months continuous operation (without back lighting) Battery life 250ms Response speed 2% F.S. or less (Temperature conditions: at 25C) Display accuracy 1% F.S. or less (Temperature conditions: at 25C) Repeatability 3% F.S. or less (0 to 50C, based on 25C) Temperature characteristics M5 x 0.8 Piping port 0 to 50C (with no condensation) Ambient temperature 35 to 85%

V

Double Max 10ms Max 15ms 3-position Max 20ms Max 25ms Life 200 million cycles or more Ambient and Fluid Temperature ( N o t e 3 ) -10 to +50C (14~122F) -5 to +50C (23~122F) Lubricant ( N o t e 4 ) Not required Not required Manual Override Non-locking, Push Non-locking, Push Protection Dustproof Dustproof ( N o t e 2 ) Calculated on the basis of JIS B 8375-1981 (Supply pressure 0.5 MPa {5.1

Digital Flow Switches

0 to 50C Linearity Note 1) 5% F.S. or less 3% F.S. or less 2% F.S. or less 1% F.S. or less Repeatability Note 1) 2% F.S. or less (15 to 35C based on 25C), 3% F.S. or less (0 to 50C based on 25C) Temperature characteristics Pulse output, N channel, open drain, output for display unit PF2W3.

PF2A/PF2W

0 to 50C Linearity Note 1) 5% F .S. or less 3% F .S. or less Repeatability Note 1) 2% F .S. or less 1% F .S. or less Temperature characteristics 2% F.S. or less (15 to 35C based on 25C), 3% F .S. or less (0 to 50C based on 25C) Pulse output, N channel, open drain, output for display unit PF2W3.

Table of Contents

Model ZR1-FX Vacuum to 0.5 MPa 5 to 50C 30 m PVF 0.1 kg Operating pressure range Operating temperature range Filtration efficiency Element Weight (With bracket) Note) If not operated within the specified range of pressure and temperature, trouble may be caused.

Digital Flow Switches, Series PF2A, Series PF2W

0 to 50C Linearity Note 1) 5% F.S. or less 3% F.S. or less 2% F.S. or less 1% F.S. or less Repeatability Note 1) 2% F.S. or less (15 to 35C based on 25C), 3% F.S. or less (0 to 50C based on 25C) Temperature characteristics Pulse output, N channel, open drain, output for display unit PF2W3.

Series IDG

(23 to 122F) Inlet air temperature Ambient temperature 5 to 50C (23 to 122F) 5 to 50C (23 to 131F) Outlet air atmospheric pressure dew point Inlet air flow rate l/min (ANR) (SCFM) Note 2) Standard performance 25C (68F) 62 (2.2) 125 (4.4) 250 (8.8) 375 (13.2) 625 (22.1) 900 (31.8) 1190 (42.0) 725 (25.6) 31 (1.1) Outlet air flow rate l/min (ANR) (SCFM) Purge air flow rate l/min (ANR) (SCFM

V100

(1) Ambient and fluid temperature 10 to 50C (1) 10 to 50C (1) Maximum operating frequency 20 Hz 5 Hz 20 Hz Individual EXH Pilot valve EXH Common exhaust Not required Lubrication Non-locking push type/Slotted locking type (tool required) as an option Pilot valve manual override 150/30 m/s2 Shock/Vibration resistance (2) Dustproof Enclosure 12, 24 VDC and 100, 110, 200, 220 VAC Coil rated