Table Accuracy: High Precision Type, Size: 30, Max. Rotation Torque: Basic, LER10: 0.22; LER30: 0.8; LER50: 6.6, Motor Cable Entry: Basic Type, Entry on Right Side, Actuator Cable Type: Standard Cable, Actuator Cable Length: 1.5m, Controller Type - JXC: JXC91, EtherNet/IPâ„¢ Direct Input Type, Controller Mounting: DIN Rail Mounting, Communication Plug Connector for DeviceNetâ„¢: -

Table Accuracy: High Precision Type, Size: 30, Max. Rotation Torque: Basic, LER10: 0.22; LER30: 0.8; LER50: 6.6, Motor Cable Entry: Basic Type, Entry on Right Side, Actuator Cable Type: Standard Cable, Actuator Cable Length: 3m, Controller Type - JXC: JXCE1, EtherCAT®, Controller Mounting: Screw Mounting, Communication Plug Connector for DeviceNet™: -

Table Accuracy: High Precision Type, Size: 30, Max. Rotation Torque: Basic, LER10: 0.22; LER30: 0.8; LER50: 6.6, Motor Cable Entry: Basic Type, Entry on Right Side, Actuator Cable Type: Standard Cable, Actuator Cable Length: 5m, Controller Type - JXC: JXC91, EtherNet/IPâ„¢ Direct Input Type, Controller Mounting: Screw Mounting, Communication Plug Connector for DeviceNetâ„¢: -

Table Accuracy: High Precision Type, Size: 30, Max. Rotation Torque: Basic, LER10: 0.22; LER30: 0.8; LER50: 6.6, Motor Cable Entry: Basic Type, Entry on Right Side, Actuator Cable Type: Standard Cable, Actuator Cable Length: 1.5m, Controller Type - JXC: JXC61, Step Data Input Type, Parallel PNP, Controller Mounting: Screw Mounting, Communication Plug Connector for DeviceNetâ„¢: -

Table Accuracy: High Precision Type, Size: 30, Max. Rotation Torque: Basic, LER10: 0.22; LER30: 0.8; LER50: 6.6, Motor Cable Entry: Basic Type, Entry on Right Side, Actuator Cable Type: Standard Cable, Actuator Cable Length: 3m, Controller Type - JXC: JXC51, Step Data Input Type, Parallel NPN, Controller Mounting: Screw Mounting, Communication Plug Connector for DeviceNetâ„¢: 3

Oscillation Angle A: 360°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Others, Rigidity Accuracy: High Rigidity, High Accuracy, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 0.8, Size: 30, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Robotic

Information

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1

Exhaust Cleaner for Vacuum Pump AMV Series

1 1/2 2 2 80 (3B) JIS 10K FF flange 360 650 1,500 3,700 7,500 16,000 100 (4B) JIS 10K FF flange Construction Gasket Cover Element Tension bolt No Description Material Component Parts 1 2 3 4 Holder Case Cover Tension bolt Aluminum alloy Carbon steel Carbon steel Carbon steel Case Oil-drain port Plug AMV3, AMV6: R3/8 AMV15, AMV37: R1/2 AMV75, AMV160: R3/4 Replacement Parts AMV3 AMV6 AMV15

Exhaust Cleaner for Vacuum Pump AMV Series

1 1/2 2 2 80 (3B) JIS 10K FF flange 100 (4B) JIS 10K FF flange Construction Gasket Cover Element Tension bolt No Description Material Component Parts 1 2 3 4 Holder Case Cover Tension bolt Aluminum alloy Carbon steel Carbon steel Carbon steel Case Oil-drain port Plug AMV3, AMV6: R3/8 AMV15, AMV37: R1/2 AMV75, AMV160: R3/4 Replacement Parts AMV3 AMV6 AMV15 AMV75 1 AMV37 AMV160 2 No Description

■How to Order ASP-X369 Series ASP330F－01－06S－X369 Applicable tubing O.D. Body size Metric size Inch size Port size φ6 3 φ1/4” 06 07 1/8 standard Symbol Cylinder side φ8 4 φ5/16” 08 09 1/4 standard 01 R1/8 φ3/8” φ10 5

Metric size Inch size Body size Port size 06 6 3 1/8 standard 07 1/4 Symbol Cylinder side 08 8 4 1/4 standard 09 5/16 01 R1/8 10 10 11 3/8 5 3/8 standard 02 R1/4 12 12 13 1/2 6 1/2 standard 03 R3/8 04 R1/2 N01 NPT1/8 N02 NPT1/4 N03 NPT3/8 N04 NPT1/2 XTO Series XTO257102 Applicable tubing O.D.

MA2

AHC System Series MA2 How to Order AHC unit AHC unit MA 210 Y M3 N R3 Tool adapter Robot adapter Without robot adapter 8 10 11 14 15 20 Nil S1 R1 R2 R3 R4 R5 Auto hand changer Air gripper for AHC Applicable shaft diameter Transportable mass Transportable mass 3 kg 2 AHC unit Electric specifications Air connection size M3 M3 x 0.5 None N Air gripper for AHC Tool adapter <10/15> MA 210 A M3

Pressure valve/Series ASR Flow valve/Series ASQ

Port size 6 8 10 12 Flow valve Pressure valve ASR4 3 0F02 ASR53 0F02 ASR53 0F03 ASR6 3 0F03 ASR6 3 0F04 ASQ4 3 0F02 ASQ53 0F02 ASQ53 0F03 ASQ6 3 0F03 ASQ6 3 0F04 R1/4 R1/4 R3 /8 R3 /8 R1/2

Title not found

(mm) Model R3/8 KQGT04-00 KQGT06-00 KQGT08-00 KQGT10-00 KQGT12-00 4 6 8 10 12 R1/4 10 R3/8 R3/8 12 R1/2 Straight Union Straight Union Union "Y" Union "Y" Applicable tubing O.D. (mm) Model Applicable tubing O.D.

Air Cylinder

Rod Clevises Part No CB CD CE CH CW F L A KK ER NY-150 0.765 0.5 1 1/2 1 1/2 1 3/4 3/4 7/16-20 1/2 NY-325 1.265 0.75 2 3/8 1 3/8 5/8 1 1/4 1 1/4 1 1/8 3/4-16 3/4 NY-800 1.515 1 3 1/8 1 1/2 3/4 1 1/2 1 1/2 1 5/8 1 -14 1 NY-1000 2.032 1 3/8 4 1/8 2 1 2 2 1/8 2 1 1/4 -12 1 3/8 NY-1200 2.531 1 3/4 4 1/2 2 3/8 1 1/4 2 3/8 2 1/4 2 1/4 1 1/2 -12 1 3/4 NY-1400 2.531 2 5 1/2 2 15/16 1 1/4 2 15/16

V100

1/8 1/8 1/8 1/8 C6 Base mounted For internal pilot VZ54 VV3Z5-41-1 1/4 1/4 C8 Body ported For external pilot VV3Z5-21R-1 VZ52R 2.2 0.34 0.55 2.4 0.32 0.62 1/4 1/8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VV3Z5-41R-2 1/4 1/4 1/8 1/8 C6 C8 2.2 2.0 1.6 2.1 0.35

Table of Contents

1 !

AS

/FPG How to Order 1 1 2 F P Q 01 06 AS 2 Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

RD SD LRUN PW VP4 9 B B B B B S0700 23 SMC SMC SMC SMC 42 VQ 63.5 VQ4 1 2 3 4 5 6 7 n Stations D side U side 1(P), 5(R3), 3(R1) 6 x Rc 1/2 VQ5 Manual override VQC SMC VQZ 150.5 141.00 SQ 115.5 A A A A A A A 91.5 74.00 VFS 58 18 14 B B B B B B B VFR 3 3 3 4(A), 2(B) port 2n x Rc 3/8, 1/2 30 43 62.5 VQ7 EX123: 2 x G 1/2 EX124: 4 x G 1/2 Use a dripproof plug assembly (AXT100B04A) for the unused

30

8 1/4 M M 12 8.3 1/8" 13.6 3.4 D 13.7 4.5 10-32UNF 1/8 1/4 A 9.1 12.6 5/32" L2 14.4 6 4.5 H Connection thread 14.7 10-32UNF 1/8 1/4 3/8 1/8 1/4 3/8 1/8 1/4 3/8 1/2 1/4 3/8 1/2 11.7 13.5 1/4" (NPT) 15.9 13.9 2 x Applicable tube L1 L1 18.6 M M 16.1 13.7 26.3 5/16" 19.1 D 20 A L2 16.6 16 40.8 3/8" H 21 Connection thread (with sealant) 22.7 18.5 19.6 57.2 1/2" 23.7 Reference dimensions after

HRX-OM-M090

HRX-OM-M090 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.3.3 Types of hazard labels . 1-3 1.3.4 Locations of Hazard Labels . 1-4 1.4 Other Labels . 1-5 1.4.1 Product Label . 1-5 1.5 Safety Measures . 1-5 1.5.1 Safety