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Flow-rate Characteristics Note) Values when the main valve is fully open Male thread nozzle High efficiency nozzle 1L = 0.035 SCFM 1L = 0.035 SCFM 14.5 29.0 43.5 58.0 72.5 87.0 102 116 131 145 psi 14.5 29.0 43.5 58.0 72.5 87.0 102 116 131 145 psi 1500 1400 1300 1200 1100 1000 900 800 700 600 500 400 300 200 100 400 VMG1-R02-400:4 KNH-R02-200 VMG1-R02-350:3.5 350 VMG1-R02-300:3 Flow rate [

1100 Polycarbonate Bowl material AL Semi-standard Standard Bowl guard Relieving type Regulator construction AW 0.74 0.88 0.95 1.76 1.83 Mass (kg) AG Note 1) Pressure gauge connection threads are not available for F.R.L. unit with a square embedded type pressure gauge or with a digital pressure switch (AC20C to AC40C).

200 450 1100 0.3 m (95% filtered particle size) Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2) Nominal filtration rating Outlet side oil mist concentration Bowl material Bowl guard Drain capacity (cm3) Weight (kg) Polycarbonate Option 8 0.18 Standard 45 0.44 AFM30 45 0.49 25 0.22 Note 1) When the inlet pressure is 0.7 MPa.

Theoretical output (N) = Pressure (MPa) x Piston area (mm2) Mass Unit: g Male thread additional mass 5 Cylinder stroke (mm) Bore size (mm) 10 15 20 25 30 35 40 45 50 75 100 20 32 40 50 63 80 100 180 200 220 240 260 280 300 320 340 360 10 610 710 330 350 370 390 410 430 450 470 490 510 52 760 860 480 500 520 540 560 580 600 620 640 660 52 1250 1400 860 890 920 950 980 1010 1040 1070 1100

Caution Symbol Specifications Theoretical Cylinder Thrust Head resistant cylinder (10 to 150C) XB6 XB9 Low-speed cylinder (15 to 50mm/s) 6, 10 15, 20, 25, 32, 40 XB11 Long stroke type XB13 Low-speed cylinder (7 to 50mm/s) 1200 100 XC24 With magnetic shielding plate 40 40 1100 90 XC57 With floating joint 1000 900 Bore size 10 Bore size 10 Theoretical thrust (N) Theoretical thrust (N) 80 X116

11.5 8.7 4.1 5.9 50 Hz 13.0 10.2 4.5 6.4 60 Hz Inlet air pressure 0.7 (MPa) Inlet air temperature 55 (C) Ambient temperature 32 (C) 10 Outlet air pressure dew point (C) Power supply voltage (frequency) Three-phase: 200 VAC (50 Hz) Three-phase: 200/220 VAC (60 Hz) Power consumption (W) 50/60 Hz Operating current (A) 50/60 Hz Applicable circuit breaker capacity Note 4) 1530/2000 2200/2850 1100

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

When using signal of the servo on (SON) by the I/O signal (CN6) . 0100 4 in HEX 0 0 in HEX 1100 C in HEX 0 0 in HEX When using signal of the Automatic/manual selection (MD0) by the I/O signal (CN6) 0001 1 in HEX 0 0 in HEX 1000 8 in HEX -44- * Enabling Servo-on (SON) and Automatic/manual selection (MD0) Signals Set PD12 to 0C04 and PD14 to 0801 in the I/O setting tab.

When using signal of the servo on (SON) by the I/O signal (CN6) . 0100 4 in HEX 0 0 in HEX 1100 C in HEX 0 0 in HEX When using signal of the Automatic/manual selection (MD0) by the I/O signal (CN6) 0001 1 in HEX 0 0 in HEX 1000 8 in HEX -49- * Enabling Servo-on (SON) and Automatic/manual selection (MD0) Signals Set PD12 to 0C04 and PD14 to 0801 in the I/O setting tab.

Modbus RTU protocol (Hexadecimal notation) Request data 01 08 0 1234 ED7C Response data (normal response) 01 08 0 1234 ED7C (Binary notation) Response data 0001 1000 0 0 0001 0010 0011 0100 1110 1101 0111 1100 Response data (normal response) 0001 1000 0 0 0001 0010 0011 0100 1110 1101 0111 1100 For correspondence between ASCII notation and ASCII hexadecimal notation, refer to the 8.4 ASCII

AC30C Air filter AF40 AF40-06 AF30 AF20 AF30 Mist separator AFM40 AFM40-06 AFM30 AFM20 AFM30 Component Regulator AR40 1/4 3/8 1/2 1/4 AR40-06 AR25 AR20 AR30 1/4 1/8 1/4 3/4 Port sizes 3/8 1/4 3/8 Note 1) 1/4 1/8 1/8 1/8 Air Pressure gauge port size Fluid Proof pressure Maximum operating pressure 1.5MPa 1.0MPa 0.05MPa Minimum operating pressure Set pressure range 0.05 to 0.85MPa Note 2) 1100

200 450 1100 0.3m (95% filtered particle size) Maximum 1.0mg/m3 (ANR) (approx. 0.8ppm) Note 2) Nominal filtration rating Outlet side oil mist concentration Bowl material Bowl guard Drain capacity (cm3) Weight (kg) AFM30 Polycarbonate option 8 0.18 Standard 45 0.44 45 0.49 25 0.22 Note 1) When the inlet pressure is 0.7MPa.

Theoretical Cylinder Thrust Symbol Specifications 1200 -XB11 -XB13 -X116 -X132 -X160 -X168 -X206 -X210 -X322 -X324 -XC57 Long stroke (2001mm and up) Low speed specifications (7 to 50mm/s) 1100 Hydro specifications 40 40 Axial ports 1000 High speed specifications Helical insert thread specifications 900 Added mounting tap positions for slider Oil-free exterior specifications Theoretical thrust

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solen1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

RSH20, 32 Graphq Graphw 1.0 RSH20 RSH32 0.9 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 Operating pressure P [MPa] 0.8 1300 1300 80 0.7 1200 1200 0.6 1100 1100 0.5 1000 1000 0.4 900 900 0.3 63 80 Load weight m [kg] Load weight m [kg] Load weight m [kg] Load weight m [kg] 0.2 800 800 50 0.1 700 700 600 600 0 500 100 200 300 400 63 Lateral load F [N] 500 500 50 400 400 RS1H50, 63,

Model Ambient temperature Applicable cylinder thread nominal size Allowable eccentricity U (mm) Applicable cylinder bore size (mm) Note 1) Maximum tension and compression N Air cylinder Hydraulic cylinder JS10-4-070 JS16-5-080 JS20-8-125 JS32-10-125 JS40-14-150 JS63-18-150 M4 x 0.7 M5 x 0.8 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 0.5 0.5 0.5 0.5 0.75 1 10 10, 16 20 25, 32 40 50, 63 80 210 1100

Mass (g) Size Standard mass 90 180 10 120 150 15 220 270 20 600 700 30 900 1100 40 1400 1600 Not including the mass of auto switch. D319 Series CRQ2X Rotation Range When pressurized from the port indicated by the arrow, the shaft will rotate in a clockwise direction.

CXT12 CXT16 CXT20 CXT25 CXT32 CXT40 0.015 0.019 0.044 0.180 0.123 0.109 3 7 12 20 30 50 60 70 125 125 140 170 0.002 0.004 0.007 0.030 0.032 0.025 350 500 900 900 1100 1900 For moving and transferring workpieces. For moving the receptacle for workpieces used in stamping or press-fitting processes. For using as a Pick & Place unit in combination with other actuators.

Compressor intake Rated conditions *4 60 Hz 4.6 6.5 10.4 13.3 Inlet air pressure [MPa] 0.7 Refrigerant R407C (HFC) IDF E Inlet air temperature [C] 55 Ambient temperature [C] 32 Outlet air pressure dew point [C] 10 Single-phase: 230 VAC 10% (50 Hz) Three-phase: 200 VAC (50 Hz) Three-phase: 200/220 VAC (60 Hz) Power supply voltage (Frequency) Power consumption [W] 50/60 Hz *5 Three-phase 200 V 1100

Actuator cable: 20 m or less Cooling system Natural air cooling Operating temperature range 0C to 40C (No freezing) Operating humidity range 90% RH or less (No condensation) Storage temperature range 10C to 60C (No freezing) Storage humidity range 90% RH or less (No condensation) Insulation resistance Between all external terminals and the case: 50 MW (500 VDC) Weight 1050 g (Screw mounting), 1100