5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

03 Rc 1 4 Rc 3 8 T F SJ Option Mountable only for VFS3120.

Table of Contents

Standard Specifications AR25K AR30K AR40K AR40K-06 AR50K AR60K AR20K Model 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1/8, 1/4 Port size Air Fluid 1.5 MPa Proof pressure 1.0 MPa Maximum operating pressure 0.05 to 0.85 MPa Set pressure range (1) Rc, NPT, G 1/8 Rc, NPT, G 1/8 Rc, NPT, G 1/8 Rc, NPT, G 1/4 Rc, NPT, G 1/4 Rc, NPT, G 1/4 Rc, NPT, G 1/4 Pressure gauge port size (2) Set pressure

AC Servo Motor Driver (CC-Link Type ）

Use wires 8) of the following sizes with the power regeneration converter (FR-RC-(H) :Mitsubishi Electric Corporation). Model Wires[mm2] FR-RC-15K 14(AWG6) FR-RC-30K 14(AWG6) FR-RC-55K 22(AWG4) FR-RC-H15K 14(AWG6) FR-RC-H30K 14(AWG6) FR-RC-H55K 14(AWG6) 13 15 13.

Valve Single Unit

S 5 VDC R 3 VDC 1-6-55 Manifold Specifications SS5X3-41 SS5X3-42 SS5X5-41 SS5X5-42 SS5X7-42 SX340 SX340(R) SX540 SX540(R) SX740(R) Single base/B mount Common SUP/Common EXH 2 to 20 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P(SUP)/R(EXH) Valve stations Note) Location Direction A, B Porting specifications P, EA, EB port Rc 1 4 Rc 1 4 M5 x 0.8

17

Choice of Rc, NPT, G port is available. (Refer to page 3.)

Magnetically Coupled Rodless Cylinder

Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part No.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part No.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

1/4 Rc 3/8 G 1/4 G 3/8 Mixed 8 One-touch fitting 5/16" One-touch fitting 10-SV1000 10-SV1000 10 One-touch fitting 3/8" One-touch fitting 10-SV2000 10-SV2000 12 One-touch fitting 3/8" One-touch fitting 10-SV3000 10-SV3000 3/8" One-touch fitting 12 One-touch fitting 10-SV4000 NPT 3/8 10-SV4000 Rc 3/8 NPTF 3/8 G 3/8 For mixed specifications (M), indicate separately on the manifold specification

Cylinder with Lock Series CLS

m(kg) Load weight: m(kg) 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) 31

Hygienic Design Cylinder Series HY

1/8 Rc 1/8 Rc 1/4 Rc 1/4 G 1/8 G 1/8 G 1/4 G 1/4 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 20 20.5 22 24 Individual -X Technical data Note 1) Refer to page 888 for details about the optional parts (plug bolt).

5

, 450, 500 1000 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 1000 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 1000 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350

CC

REC CX CY MQQ M RHC MK(2) RS Q G Oil draining hole Rc 1/4 Oil port size Rc RS H A (mm) Model Air port size Rc Oil port size Rc A B C DA DB DL H NL P QB QL S T W RZQ CCT633/8 3/4 104 88 64 86 88 53 45 28 3 86 30 0 11 9.5 MI W S CCT1001/2 1 139 125 92 116 123 61 65 33 5 120 32 2 13 7 CCT1603/4 1 1/4 202.5 185 144 180 183 60 93 29 0 185 46 2 20 7 CEP1 L Dimension CE1 (mm) 800 700 600 500 400

CC

Rc 1/8 Pilot air port port (Stip valve side) RS H A Manual push button RZQ MI W S CEP1 CE1 CE2 Oil port size Rc Oil draining hole Rc 1/4 Throttle valve locking screw ML2B C J G5-S CV MVGQ (mm) Model Air port size Rc Oil port size Rc A B C DA DB DL EA EB EL F H GA GB GL KA KB KL M CC CC63-S1-G CC100-S1-G CC100-L1-G CC160-L1-G 186 64 86 88 53 121.8 98 151.5 35 18 35 104 45 86 45 83 60 3/8 1

4/5 Port Solenoid Valve

Nil : : Nil Rc Single solenoid coil is on same side as the A,B port.

IR1000/2000/3000

Rc 1/2 IR1000: Rc 1/8, IR2000: Rc 1/4 Assembly is performed in an ordinary environment without using grease.

CG1

Bore size (mm) MM W TC NA P S TA ZZ WA WH 30 30 25 20 20 20 20 20 M8 M10 X 1.25 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 24 29 35.5 44 55 69 80 100 M5 M5 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)1/2 77 77 79 87 102 102 122 122 11 11 11 12 13 13 M5 M6 X 0.75 M8 X 1.0 M10 X 1.25 M12 X 1.25 M14 X 1.5 147 157 159 187 218 218 264 264 16 16 16 16 18 18 22

IR1000/2000/3000

(PT) 1/8 L Rc(PT) 1/4 X1 Port size Rc(PT) 3/8 IRM Rc(PT) 1/2 Refer to page 8 for details.

Series AK1000

In Japan, according to METI, pipe thread (Rc, R, NPT etc) should not be used as connections of piping, ttings, and valves installed in gas systems.

Precision Regulator Series IR1000/2000/3000

1/4, 3/8, 1/2 Rc 1/4 Rc 1/4, 3/8, 1/2 Port size Rc 1/4 Rc 1/8 Rc 1/8 (2 locations) Pressure gauge port ARX20 Ambient and fluid temperature 5 to 60C (No freezing) 0.71 0.35 0.64 Mass (kg) 0.30 0.14 VCHR Note 1) With the condition of no flow on the output side.

Precision Regulator

1/4, 3/8, 1/2 Rc 1/8 (2 locations) Rc 1/4, 3/8, 1/2 Port size Pressure gauge port Rc 1/4 Rc 1/4 Rc 1/8 SRP Ambient and fluid temperature Weight (kg) 5 to 60C (No freezing) 0.64 0.71 0.35 0.30 0.14 SRF Note 1) With the condition of no flow on the output side.