Compatible Robot: 051 (FANUC: CRX-5iA, CRX-10iA(L), CRX-20iA, CRX-25iA), Switch Selection: P (Auto Switch PNP), Valve Option: C (Normally Closed), Robot Connection Cable: With connector cable, Protective Cover: D (with protective cover), Manual Changer: E (with main plate assembly)

Compatible Robot: 051 (FANUC: CRX-5iA, CRX-10iA(L), CRX-20iA, CRX-25iA), Switch Selection: P (Auto Switch PNP), Valve Option: O (Normally Open), Robot Connection Cable: With connector cable, Protective Cover: D (with protective cover), Manual Changer: E (with main plate assembly)

Compatible Robot: 051 (FANUC: CRX-5iA, CRX-10iA(L), CRX-20iA, CRX-25iA), Switch Selection: P (Auto Switch PNP), Valve Option: Basic Type, Robot Connection Cable: With connector cable, Protective Cover: D (with protective cover), Manual Changer: E (with main plate assembly)

Compatible Robot: 051 (FANUC: CRX-5iA, CRX-10iA(L), CRX-20iA, CRX-25iA), Switch Selection: A (Actuator Position Sensor: D-MP), Valve Option: Basic Type, Robot Connection Cable: With connector cable, Protective Cover: D (with protective cover), Manual Changer: E (with main plate assembly)

Compatible Robot: 051 (FANUC: CRX-5iA, CRX-10iA(L), CRX-20iA, CRX-25iA), Switch Selection: A (Actuator Position Sensor: D-MP), Valve Option: Basic Type, Robot Connection Cable: With connector cable, Protective Cover: without protective cover, Manual Changer: E (with main plate assembly)

Compatible Robot: 051 (FANUC: CRX-5iA, CRX-10iA(L), CRX-20iA, CRX-25iA), Switch Selection: P (Auto Switch PNP), Valve Option: Basic Type, Robot Connection Cable: With connector cable, Protective Cover: without protective cover, Manual Changer: E (with main plate assembly)

AC Servo Motor Driver (MECHATROLINK-III type)

Station Address S1 S2 00H to 02H: Disabled 0 0 to 2 (Do not use these addresses.) 03H (Factory setting) 0 3 04H 0 4 EFH E F F0H to FFH: Disabled F 0 to F (Do not use these addresses.) (2) Settings of the DIP Switch S3 The following table shows the settings of the DIP switch (S3). Switch No.

Compatible Robot: 051 (FANUC: CRX-5iA, CRX-10iA(L), CRX-20iA, CRX-25iA), Switch Selection: P (Auto Switch PNP), Valve Option: Basic Type, Robot Connection Cable: N (without connector cable), Protective Cover: without protective cover, Manual Changer: E (with main plate assembly)

JXCx-OMT0023

Driver No-fuse breaker (Note) Fuse Current Voltage AC Current Voltage AC LECSA2-S1 50A frame 5A 10A LECSA2-S3, LECSA1-S1 50A frame 10A 240V 15A 300V LECSA2-S4, LECSA2-S3 50A frame 15A 20A Note.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

2 e @1 q @7 @5 @8 MY CXSM10 CXSM15 CY @0 !5 @9 @4 r w !3 i !0 @2 u t !6 @0 !5 @9@3@4r w !3i!0@2u t!6 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20!4 y e !1 !2 @3 @1 q !4y e !1 !2 q @1 Data CXSM20 to 32 @0 !5 !6 @3 @4rw o i !0 u @2 t !4 y e !1 !

Dual Rod Cylinder Series CXSJ/CXS

2 e @1 q @7 @5 @8 CXSL10 CXSL15 @0!5 @9@3@4r!8w!9!3 i!0 @2ut!6 @0 !5 @9 @4 r w !8 !9 !3 i !0 @2 u t !6 !4ye!1!2 q @1 !4 y e !1 !2 @3 @1 q CXSL20 to 32 @0 !5!6@3@4r!8w!7o i!0u@2t !4 y e !1 !2 q @1 Component Parts: Standard Piping Component Parts No.

VQZ1000/2000/3000

3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q e w q r r Note) 3 position pressure center 3 position exhaust center 3 position closed center 3 position pressure center 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B

VQC

VQC2000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000-51A-N9 3.2 4 6 8 M5 1/8" 5/32" 1/4" 5/16" With miswiring prevention mechanism (stop diode) Note) A-side energized: Light (orange) ON B-side energized: Light (green) ON With surge absorbing mechanism

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Note 3) Weight without sub-plate 1.12-7 VQZ1000/2000/3000 Body Ported Construction: VQZ1000/2000/3000 Metal seal Rubber seal e w q r e w q r 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q e w q 4 r 3 position pressure

Space Saving Vacuum Ejector Series ZQ [Option] Note) CE compliant: For DC only.

Also, in order to completely prevent the overflow of exhaust air, leave plenty of space between the check valve unit and adjacent ejector to avoid interference from the ejectors exhaust unit. 3.2 (Straight) KJS23-M5 VVQ1000-50A-C3 4 (Straight) KJS04-M5 VVQ1000-50A-C4 6 (Straight) KJS06-M5 VVQ1000-50A-C6 3.2 (Elbow) KJL23-M5 VVQ1000-F1-LC3 4 (Elbow) KJL04-M5 VVQ1000-F1-LC4 !

Table of Contents

VQ1000 VQ5 VVQ1000-50A-C3 Applicable tubing 3.2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VVQ1000-50A-C4 Applicable tubing 4 VQZ VVQ1000-50A-C6 Applicable tubing 6 Purchasing order is available in units of 10 pieces. Caution VQD 1.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

VVQ1000-50A-C3 Applicable tubing 3.2 VVQ1000-50A-C4 Applicable tubing 4 VVQ1000-50A-C6 Applicable tubing 6 Purchasing order is available in units of 10 pieces. Caution 1. Protect O-rings from scratches and dust to prevent air leakage. 2. The tightening torque for inserting fittings to the M5 thread assy should be 0.8 to 1.4 Nm.

5 Port Solenoid Valve SY Series

Metric size Inch size Nil Rc 5 32" One-touch fitting for 4 VVQ1000-50A-C4 VVQ1000-50A-N3 One-touch fitting for F G SY3000 SY3000 1 4" VVQ1000-50A-N7 One-touch fitting for 6 VVQ1000-50A-C6 One-touch fitting for N NPT 5 32" One-touch fitting for 4 VVQ1000-51A-C4 VVQ1000-51A-N3 One-touch fitting for NPTF T A, B port size 1 4" One-touch fitting for 6 VVQ1000-51A-C6 VVQ1000-51A-N7 One-touch

HEC_W-E

Alarm Sequence Setting range : On, Off Indicated content : Use of temp. upper/lower limit alarm U p p e r / L o w e r T e m p . A l a r m S e q u e n c e M O D E < O f f sequence(Ex. : Off) Function : Determines whether or not temp. upper/lower limit alarm is output when power is turned on.

CNA

W V FY FV BF d D e H1 AL A T 8 f l K lC ZZ + l + Stroke h + l FT BN N lB H M S + Stroke ZZ + Stroke Long stroke (50 to 100) 4-FD d RY FY BF e 8 f l ZZ + Stroke Z FT RT FZ FX ZZ + l + Stroke h + l (mm) Bore (mm) Stroke range (mm) A AL B B1 BF BN BP BQ C D E FD FT FV FX FY FZ GA GB GC GD GL GL1 GR H1 J 40 50 63 80 100 30 27 60 22 71 96 1/8 1/8 44 16 32 9 12 60 80 42 100 85 15 52 16 12 12