Step Motor Controller (Servo / 24 VDC)

CN4 20 - (2) Connection with a PC Controller setting kit Controller 120.3 120.3 mm mm 200 200 mm/s mm/s USB cable (A-miniB type connector) 100 500 100 500 1 1 200 1000 200 1000 2 2 Communication 50 200 50 200 3 3 CN4 cable PC (The PC should be obtained separately.) Caution (1) Do not connect to equipment other than specified (LEC-W1, LEC-W2, LEC-T1, LEC-G).

LEF-OM007xx

500 LEFS25 900 500 Please aspirate it from the port on both sides when aspirating 50 /min(ANR).

Vacuum Unit Ejector / Vacuum Pump System

Common EXH port Common PS/PD port Application ZZK2-A1 Yes PS = PD Ejector complex exhaust PV = PS = PD ZZK2-A1-D Yes PS PD Ejector complex exhaust PV = PS PD Ejector individual exhaust PV = PS = PD ZZK2-A2 ZZK2-P2 None PS = PD Vacuum pump system PV PS = PD Ejector individual exhaust PV = PS PD ZZK2-A2-D ZZK2-P2-D None PS PD Vacuum pump system PV PS PD When PS = PD, the common PS/PD

Vacuum Unit Ejector / Vacuum Pump System

Common EXH port Common PS/PD port Application ZZK2-A1 Yes PS = PD Ejector complex exhaust PV = PS = PD ZZK2-A1-D Yes PS PD Ejector complex exhaust PV = PS PD Ejector individual exhaust PV = PS = PD ZZK2-A2 ZZK2-P2 None PS = PD Vacuum pump system PV PS = PD Ejector individual exhaust PV = PS PD ZZK2-A2-D ZZK2-P2-D None PS PD Vacuum pump system PV PS PD When PS = PD, the common PS/PD

90

Common EXH port Common PS/PD ports Application Environment Ejector common exhaust + PV = PS = PD specification ZZK2-A1 PS = PD Yes Caution Ejector common exhaust + PV = PS PD specification ZZK2-A1-D PS PD Yes 1. The use of resin piping can cause static electricity to be generated, depending on the fluid.

Compact Cylinder with Lock Series CLQ

Double clevis pins and retaining rings are included. 831 Rod end nut L1 Series CLQ Accessory Bracket Dimensions Single Knuckle Joint Double Knuckle Joint I-G02, I-G03 I-G04, I-G05 I-G08, I-G10 Y-G02, Y-G03 Y-G04, Y-G05 Y-G08, Y-G10 Hole: ND H10 Shaft d9 Hole: ND H10 Shaft d9 MM MM L NDH10 MM NDH10 MM L RR1 RR1 RR1 RR1 E1 E1 E1 E1 A1 L1 A NX NZ U1 A1 L1 A NX NX U1 A1 L1 A U1 A1 L1 A NX NZ

MXS

Allowable moment Wmax: Table 2 a1=W/Wa Calculate load rate a1 of static work. 3-2 Load rate of static moment Rolling Yawing Examine My My=1 X 9.8(10+30)/1000=0.39 A6=10 Examine My Calculate static moment Me (Nm).

SI Unit for Vacuum Manifold

L/A1 LED and L/A2 LED Table. 7-2 L/A1 LED and L/A2 LED L/A1 L/A2 Description Green ON --The SI Unit is connect to Ethernet via BUS IN/Port 1. Orange ON --The SI Unit is transmitting or receiving Ethernet data via BUS IN/Port 1. --Green ON The SI Unit is connect to Ethernet via BUS OUT/Port 2. --Orange ON The SI Unit is transmitting or receiving Ethernet data via BUS OUT/Port 2.

CY1F

speed mm/s Piston speed mm/s 4 CY1F/m1 5 CY1F/m2 6 CY1F/m3 7 CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm/s Piston speed mm

Cylinder with Lock Series CLS

m (kg) Load mass: m (kg) 180 1000 RLQ 700 800 900 600 125 160 500 MLU 600 140 400 500 125 400 MLGP 300 300 ML1C 200 200 [Example] 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph 7 Graph 4 0.5 MPa P 0.5 MPa P 250 4000 3000 3000 200 2000 180 250 2000 160 140 200 1000 125 180 700 800 900 Load mass: m (kg) Load mass: m (kg) 1000 700 800

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

mm/s Piston speed mm/s Piston speed mm/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s 8-16-7 7 Series CY1F Vertical Actuation 1.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.

Air Slide Table Series MXP

A2 Model Stroke A3 A1 50 100 200 300 500 700 18.5 5 MXPJ6 MXP 6 5.3 9 Average speed Va (mm/s) 23.5 10 10.5 10 MXP 8 7.4 11 Graph (2) Allowable Moment Coefficient: 20.5 20 10.5 10 MXP10 6.8 13.5 19.5 20 1.0 14.5 15 MXP12 8 16 Allowable moment coefficient: 24.5 0.7 25 20 20 MXP16 12.5 23 0.5 28 30 0.4 Table (4) Maximum Allowable Moment: Mmax (Nm) 0.3 Roll moment: Mrmax Pitch/Yaw moment: Mpmax

Digital Flow Switch

) Air N2 1 L/min 10 100 2 L/min 20 200 5 L/min 50 500 PF3A7 H Thermal type (Platinum sensor) 2 L/min 30 3000 p. 9 Air N2 PFG300 5 L/min 60 6000 p. 14 12000 Bypass flow type 10 L/min 120 0.2 PFM 0.01 L/min 10 Dry air N2 Ar CO2 0.5 25 Thermal type (MEMS) 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min Bypass flow type 10 1000 PFG300 20 2000 PFMC 5 500 Thermal

1

Rod end thread tolerance + 1.0 0 mm Stroke length tolerance 50 to 500 mm/s Piston speed Note) For detailed specifications about auto switch, refer to page 7-9-35.

CLQ

A A1 E1 L1 MM RR1 U1 Part no.

Precautions 1

A1 U1 L1 A A1 U1 L1 A Applicable cylinder bore size 20 ND E1 L L1 MM A A1 H L MM ND NX2 R2 U2 Y Z A Part no.

MGP

(mm) Standard dimension E st50 50A1 Symbol: A1 Symbol: A6 Symbol:

LEC-OM02904

-L MR-PWS1CBLM-A2-L MR-PWS1CBLM-A1-H MR-PWS1CBLM-A2-H CNP3 AWG 19() AWG 19() AWG 19() AWG 19() AWG 19() AWG 19() U V W U V W M AWG 19(/) AWG 19(/) (b) 10m 10m 2m 11.5 2m 2m MR-PWS1CBL2M-A1-L MR-PWS1CBL2M-A2-L MR-PWS1CBL2M-A1-H MR-PWS1CBL2M-A2-H LE-CSM50m 50m MR-PWS2CBL03M-A1-L MR-PWS2CBL03M-A2-L CNP3 AWG 19() AWG 19() AWG 19() AWG 19() AWG 19() AWG 19() U V W U V W M AWG 19(/) AWG 19(