MXU

35 8-3-7 8 Series MXU Dimensions: MXU16 (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 65.5 66 52 24 24 20 65.5 66 52 24 24 20 75.5 76 62 34 35 30 75.5 76 62 34 35 30 85.5 86 72 40 45 40 90.5 91 77 40 50 45 8-3-8 9 Compact Slide Series MXU Construction MXU6 (6) MXU10 (10) MX MTS MY CY MG CX MXU16 (16) D-X With auto switch 20Data Component Parts No. q Note Hard anodized No. !

MXQ

Option Combinations Functional option Nil F R P FR FP Adjuster option Adjuster option Nil Without adjuster Extension end adjuster Retraction end adjuster Double end adjuster Extension end absorber Retraction end absorber Double absorber Extension end metal stopper Retraction end metal stopper Double metal stopper Nil (3) (3) (3) AS AT A BS BT B CS CT C ASBT ASCT BSAT BSCT CSAT CSBT AS AT

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

+ BDL BS24V 0V BDH BS+ BDL BS24V 0V 24V Master unit SI unit SI unit DG DB DA DG DB DA DG DB DA Master Connector with terminating resistance VSLD FG FG FG BDH CANL BDL FG CANH Class 3 ground Class 3 ground Class 3 ground Crimped connectors for junction Twisted pair with shielding V+ Terminating resistor 30 Cassette Type Manifold Series SZ3000 SI unit part numbers Symbol Specifications Part

Cylinder with Lock

100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Up to 1800 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Up to 2500

Plug-in/Plug Lead: Single Unit

Note 5) Dusttight/splash proof enclosure (IP65) is not available with interface regulator. 0.1 00 2500 2000 1500 1000 500 3000 Flow rate (l/min (ANR)) ARBQ5000-00-P (P A) 0.7 0.6 Outlet pressure (MPa) 0.5 0.4 How to Order 0.3 0.2 0.1 Regulating port Solenoid valve Interface regulator 00 2500 2000 1500 1000 500 3000 A ARBQ5000-00-A-1 Flow rate (l/min (ANR)) VQ50 (Plug-in type) B ARBQ5000-

Table of Contents

Lead wire length Nil 6 10 15 20 25 30 300 mm (Standard) 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm How to order When requiring a vacuum unit equipped with valves with lead wires of 600 mm or more, specify the vacuum module valves without the standard connectors and order the required connector ass'ys separately. Example) ZR120S1-K15MZ-EC . 1 pc.

VQ5000

2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ5000-00-P (PA) ARBQ5000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 2500 2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) Note: 1MPa = 145psi 1l/min = 0.035SCFM

Thermo-con

Heating capacity (W) Heating capacity (W) 2500 2000 Facility water: 95F (35C) 2000 Facility water: 95F (35C) Facility water: 68F (20C) 1500 Facility water: 68F (20C) 1500 1000 1000 500 500 Facility water: 50F (10C) Facility water: 50F (10C) 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) Circulating fluid temperature (C) 149 Series HEC-W Pump Capacity

Ionizer IZS40/41/42 Series

Nil P NPN PNP Bar length (mm) 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 With 2 pcs. 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 Since input/output function cannot be used, specify Nil when the AC adapter is being used.

Ionizer Series IZS40/41/42

Nil P NPN PNP Bar length (mm) 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 With 2 pcs. 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 Since input/output function cannot be used, specify Nil when the AC adapter is being used.

Plug-in/Plug Lead: Single Unit

Note 5) Dusttight/splash proof enclosure (IP65) is not available with interface regulator. 0.1 00 2500 2000 1500 1000 500 3000 Flow rate (l/min (ANR)) ARBQ5000-00-P (P A) 0.7 0.6 Outlet pressure (MPa) 0.5 0.4 How to Order 0.3 0.2 0.1 Regulating port Solenoid valve Interface regulator 00 2500 2000 1500 1000 500 3000 A ARBQ5000-00-A-1 Flow rate (l/min (ANR)) VQ50 (Plug-in type) B ARBQ5000-

Compact Hydraulic Cylinder

12020 18859 3506 5490 8751 14121 21911 550 862 1347 2126 3434 5388 1002 1569 2500 4035 6260 18 22.4 28 35.5 45 56 18 22.4 28 35.5 45 B-series rod C-series rod Effective cushion stroke 16 16 17 16 20 23 302 JIS Standard Hydraulic Cylinder Double Acting/Double Rod Series CH2EW/CH2FW Construction !

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

31157 21264 50240 34344 78500 53882 12560 10017 19625 15686 31157 25002 50240 40347 78500 62604 14 11254 7693 17584 12070 27475 18859 43619 29769 70336 48081 109900 75435 17584 14023 27475 21961 43619 35003 70336 56486 109900 87645 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 804 550 1256 862 1963 1347 3116 2126 5024 3434 7850 5388 1256 1002 1963 1569 3116 2500

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ5000-00-P (PA) ARBQ5000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 2500 2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) Note: 1MPa = 145psi 1l/min = 0.035SCFM

Compressed Air Preparation Filter

rate [L/min (ANR)] Air flow rate [L/min (ANR)] AFF50 AFF60 6 20 Inlet pressure 0.3 MPa Inlet pressure 0.3 MPa 5 15 Inlet pressure 0.5 MPa Inlet pressure 0.5MPa 4 Pressure drop [kPa] Pressure drop [kPa] Max. flow capacity line 3 10 Max. flow capacity line Accessories Sold Separately/ International Standard 2 5 1 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0 500 0 500 2000 1500 1000 2000 2500

JIS Standard Hydraulic Cylinder

(mm) 32 40 50 63 80 100 40 50 63 80 100 550 862 1347 2126 3434 5388 1002 1569 2500 4035 6260 18 22.4 28 35.5 45 56 18 22.4 28 35.5 45 B-series rod C-series rod Effective cushion stroke 16 16 17 16 20 23 386 CH2EW/CH2FW Series JIS Standard Hydraulic Cylinder Double Acting/Double Rod Construction !

42

Note 5) Dust-tight/Water-jet-proof (IP65) is not available with interface regulator. 00 2500 2000 1500 1000 500 3000 Flow rate [L/min (ANR)] ARBQ5000-00-P (PRA) 0.6 0.7 Outlet pressure [MPa] 0.5 0.4 0.3 How to Order 0.2 Solenoid valve Interface regulator Regulating port 0.1 ARBQ5000-00-A-1 A 00 2500 2000 1500 1000 500 3000 VQ5l0l (Plug-in type) ARBQ5000-00-B-1 B Flow rate [L/min (ANR)] ARBQ5000

High Power Cylinder:

REC 0.5 10 10 1/4, 3/8 0.1 0.3 9 3000 RHC 6 1/4, 3/8 2.5 500 8 1/4, 3/8 MTS 5 1000 0 1,000 2,000 3,000 25 (1/4) 10 1/4, 3/8 Max. speed Vmax (mm/s) 7.5 1500 CC Graph 3:32 10 1/4 10 2000 12.5 15 2500 3000 30 1/4 1/4 h=0.7 6 10 1/4, 3/8 20 4 500 0.5 0.1 0.3 10 32 (3/8) 10 1/4, 3/8 8 1000 0 1/4, 3/8 3/8 3/8 3/8 12 16 20 24 1500 2000 2500 3000 1,000 2,000 3,000 Max. speed Vmax (mm/s) Graph 3:

AC

3 2500 3000 A B How to Order (1) When adding n stations to ARM : Regulator n pcs. Bracket ass'y n pcs. (2) When regulators, end plate assembly and bracket assembly are assembled to make the manifold of n stations. Regulator n pcs. Bracket ass'y n pcs.

3 Port Solenoid Valve Rubber Seal Series SY100 1

Lead wire length 2000 mm Cover Concave Pin Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lever DC indicator Socket Part no.