CQ2

T2 V W T1 S 6.5 10 18 50 80 11 YB-03 32, 40 Part No.

V

(Except for latching type and 100/110VAC) ACCESSORIES MANIFOLD OPTIONS VVQ1000-F7-L E L B O W F I T T I N G S A S S E M B LY VVQ1000-N7 Station (1Max. Stations) N A M E P L AT E [-N7] VVQ1000-87A-B-50 SUP-EXH B L O C K P U S H A S S E M B LY C3 C4 C6 KQP B L A N K I N G P L U G AN103-X233 S I L E N C E R 23 04 06 01 03 07 Courtesy of Steven Engineering, Inc. !

NCG/CG1

speed 50 to 400 mm/s 50 to 1000 mm/s Relief port size Auto switch can be mounted.

CM2

11 82 36 66 5 7 16 45 24 52 14 7 21 22 41 8 10 46.5 M14 x 1.5 21.5 42.5 M32 x 2 47.3 1/4 32 Dimensions by Stroke Boss-cut Style Stroke Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Symbol Symbol S ZZ S ZZ S ZZ S ZZ S ZZ ZZ ZZ ZZ ZZ ZZ Bore size (mm) Bore size (mm) 20 20 87 141 112 166 137 191 128 153 178 25 25 87 145 112 170

IZx-OMT0049

300 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 10 200 to 300 200 to 1400 200 to 2000 200 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 15 200 to 300 200 to 1400 150 to 2000 100 to 2000 50 to 125 50 to 1100 50 to 2000 50 to 2000 20 150 to 250 150 to 1300 100 to 2000 50 to 2000 50 to 125 50 to 1100 50 to 2000 50 to 2000 30 50 to 200 50 to 1300 50 to 2000 50 to 2000 50 to 125 50

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

X Y (mm) Size Y X 10 3 19 Body (B) 15 6.5 20.5 Body (A) 20 7.5 22.5 30 8.5 26.5 40 9 36 11-3-31 66 Rotary Actuator Vane Style Series CRB1 Size: 50, 63, 80, 100 Series Variations CRB2 Fluid Air CRBU2 Size 50 63 80 100 CRB1 Single vane (S) Double vane (D) Vane type MSU S D S D S D S D CRJ Axial ported Axial ported Axial ported Axial ported Axial ported Axial ported Axial ported Axial ported

High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

Dual Rod Cylinder Series CXSJ/CXS

20 30 40 50 100 5 10 20 30 40 50 100 Overhang l (mm) Overhang l (mm) Graph (4) V = 800 (mm/s) (V = 700 mm/s for 15, 20) CXSJM CXSJL Graph (3) V = 600 (mm/s) CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 10 Mass m (kg) 10 0.1 CX2 0.1 CXW 6 6 CXT CXSJ 0.02 0.02 10 20 30 40 50 100 5 10 20 30 40 50 100 5 CXS Overhang l (mm) Overhang l (mm) Note) V = 700 mm/s for 15, 20.

Metal Seal/Rubber Seal Series VQ Body Ported

F kit (D-sub connector) T kit (Terminal block) P kit (Flat ribbon cable connector) S kit (Serial) kit U S F 15P U S P 26P U S A S U S P 20P U S P 16P U S P A B C 10P F 25P T2 T1 Type Note) Note) Note) Max. points 14 8 8 16 16 16 16 16 14 Note) Due to the limitation of internal wiring.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

X Y (mm) Size Y X 10 3 19 Body (B) 15 6.5 20.5 Body (A) 20 7.5 22.5 30 8.5 26.5 40 9 36 11-3-31 66 Rotary Actuator Vane Style Series CRB1 Size: 50, 63, 80, 100 Series Variations CRB2 Fluid Air CRBU2 Size 50 63 80 100 CRB1 Single vane (S) Double vane (D) Vane type MSU S D S D S D S D CRJ Axial ported Axial ported Axial ported Axial ported Axial ported Axial ported Axial ported Axial ported

Air Cylinder

40 6 38 M5 0.8 depth 8 5.5 10 M10 x 1.25 35.5 1/8 40 Up to 200 30 27 19 26 16 25 2 13 10 50 8 47 M6 1 depth 12 6 14 M14 x 1.5 44 1/8 Female Rod End (mm) Bore size TA TB TC 1 to 50 st 51 to 100 st 101 to 125 st 126 to 200 st S ZZ S ZZ S ZZ S ZZ 20 11 11 M5 x 0.8 94 131 119 156 144 181 25 11 11 M6 x 0.75 94 136 119 161 144 186 169 211 32 11 10 M8 x 1.0 96 138 121 163 146 188 171 213 40

ZP

N S NBR Silicon rubber 40 50 40 50 57 86 160 224 Pad type 63 63 80 80 U Urethane rubber H Heavy duty F Fluoro rubber 100 100 E EPR Add NBR weight to the table on the right for other materials. 125 125 Dimensions ZP H 40 50 ZP H 63 80 ZP H 100 125 (mm) (mm) (mm) Model A 63 ZP63H B 65 80 ZP80H 82 C 14.5 16.5 D 50 61 Y 3.5 4.5 Model A 40 ZP40H B 42 50 ZP50H 52 C 32 42 Model A 100 ZP100H B 103

JXCx-OMT0023

Abbreviation Name Setting Unit PB06 GD2 Load to motor inertia moment ratio 4.0 Multiplier ( 1) PB07 PG1 Model loop gain 100 rad/s PB08 PG2 Position loop gain 120 rad/s PB09 VG2 Speed loop gain 3000 rad/s PB10 VIC Speed integral compensation 20 ms PB19 VRF1 Vibration suppression control vibration frequency setting 50 Hz PB20 VRF2 Vibration suppression control resonance frequency setting 50

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

3 CQ2B16-T-PS CQ2B16-S-PS 16 CQ2B20-T-PS CQ2B20-S-PS 20 Port size Rc 1/8, 1/4 CQ2B25-T-PS CQ2B25-S-PS 25 Port size M5 x 0.8 Nickel plated 20 to 50, Anodized 32 to 50 CQ2B32-T-PS CQ2B32-S-PS 32 CQ2B40-T-PS CQ2B40-S-PS 40 CQ2B50-T-PS CQ2B50-S-PS 50 A set includes !4. Note Kits include items !4, !5, !

Free Mount Cylinder

(g) Stroke (mm) Model 15 10 5 C(D)U6-S,T C(D)U10-S,T C(D)U16-S,T C(D)U20-S,T C(D)U25-S,T C(D)U32-S,T 28(38) 25(35) 22(27) 48(58) 40(50) 36(41) 71(101) 56(86) 50(75) 133(170) 106(143) 95(128) 235(294) 193(252) 176(230) 347(425) 286(364) 262(335) For the weight of auto switch, refer to page 68 to 72.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Axial foot (L) [mm] XA + Stroke Bore size [mm] E1 TR AH AO AT AB SA XA C85 C85W C85-S/T C75-S/T C85K-S/T C75K-S/T C85K C75K C75R CP96 CP96K C96 C96K C96Y C55 C85R C75 C75W Auto Switch Made to Order Related Products 32 48 32 32 10 4.5 7 142 144 40 55 36 36 11 4.5 10 161 163 50 68 45 45 12 5.5 10 170 175 63 80 50 50 12 5.5 10 185 190 80 100 63 63 14 6.5 12 210 215 100 120 75 71 16 6.5 14.5

Integrated Controller

/s] Speed: V [mm/s] EQY32HC Horizontal/Lead 4 Vertical/Lead 4 180 160 140 120 100 80 60 40 20 0 50 100 150 200 50 45 40 35 30 25 20 15 10 5 0 50 100 150 200 Work load: W [kg] Work load: W [kg] 3000 mm/s2 3000 mm/s2 5000 mm/s2 10 mm/s2 0 0 Speed: V [mm/s] Speed: V [mm/s] 41 Easy to Operate Model Selection EQYH Series Battery-less Absolute (Step Motor 24 VDC) Graph of Allowable Lateral Load

CXS

400mm/s 2 20 50 CXSM CXSL CXSM CXSL 10 Weight m (kg) Weight m (kg) 10 32 32 25 25 1 1 20 20 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Graph V = up to 800mm/s 4 Graph V = up to 600mm/s 3 6 5 3 32 2 Weight m (kg) Weight m (kg) 32 25 25 1 1 20 20 CXSM CXSL CXSM CXSL 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Graph

Basic type / Direct mount type Series CY3B/CY3R

300 100 50 0.5 500 300 100 50 Individual -X Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s Technical data 1235 Series CY1F Precautions at Vertical Operation and Intermediate Stop Vertical Actuation 1.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

CJ1 Specifications Specifications Type Air-hydro 20, 25, 32, 40, 50, 63 Double acting Turbine oil 1.5 MPa 1.0 MPa 0.18 MPa 15 to 300 mm/s None 5 to 60C JIS Class 2 Up to 1000 mm, Up to 1200 mm Bore size (mm) 20, 25, 32, 40, 50, 63, 80, 100 Double acting Air 1.0 MPa 0.08 MPa With rubber bumper With air cushion 50 to 1000 mm/s 50 to 700 mm/s CJP Bore size (mm) Action Fluid Proof pressure Max