V100

kPa to 0.6 100 kPa to 0.6 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0.6 100 kPa to 0.6 N.C.

LEC-OM069xx

Setting (byte) 1 to 65535 10 Pn80A 1st Linear Acceleration Constant 1 2 100 reference units/s2 its/s 1 to 65535 10 Pn80B 2nd Linear Acceleration Constant 1 2 100 reference units/s2 its/s 0 to 65535 100 reference units/s Pn80C Acceleration Constant Switching Speed 1 2 0 1 to 65535 10 Pn80D 1st Linear Deceleration Constant 1 2 100 reference units/s2 its/s 1 to 65535 10 Pn80E 2nd Linear Deceleration

2 Phase Stepper Motor/Without Motor Brake Series LXP

For transfer load of 1kg Positioning time (sec) Positioning distance (mm) 100 200 50 10 1 50 2.1 4.1 1.1 0.3 0.1 Speed (mm/s) 100 1.1 2.1 0.6 0.2 0.1 200 0.6 1.1 0.3 0.1 0.1 Refer to page 302 for acceleration time. 249 Series LXP CE Marking Guide Rod Type With Motor Brake/Without Motor Brake How to Order LX P B 2 S 1 S B 100 F9N Q B CE marking Guide rod type P Actuator configuration Number

NCG/CG1

First and second digit: Stroke/Inch Third and fourth digit: Stroke/Hundredth of an inch Example) 0525=5.25 (5-1/4) inch stroke 40 40 mm (1-1/2) Cylinder stroke (inch) How to Order Without auto switch 100 L 25 N S CG1 S N 25 M9NW L 100 CDG1 With auto switch Number of auto switches Built-in magnet Mounting style Nil S n 2 pcs. 1 pc. n pcs.

CQ2

mounting height. 20.5 23.5 M14 X 1.5 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 28.5 20.5 23.5 28.5 26 28.5 33.5 26 28.5 33.5 32.5 35.5 43.5 32.5 35.5 43.5 Standard (mm) Bore (mm) 32 40 50 63 80 100 Stroke range (mm) 5 to 100 5 to 100 10 to 100 10 to 100 10 to 100 10 to 100 O N M I E L A H D F J K P Q S U W Z B C M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 M16 X 2.0 M20 X 2.5 10.5 10 13

CJ2

Z 5 to 15 Bore size (mm) Stroke 61 to 75 46 to 60 31 to 45 16 to 30 5 to 15 61 to 75 46 to 60 31 to 45 16 to 30 76 to 100 101 to 125 126 to 150 76 to 100 101 to 125 126 to 150 10 16 105 93 81 73.5 77 65 53 45.5 112 106 94 82 73.5 108 126 138 154 166 84 78 66 54 45.5 136 Single Acting, Spring Return: Double Clevis Style (D) CJ2KD S Bore size Stroke Z + Stroke Rod end nut S + Stroke Piping

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Applicable Series C85 C85W C85-S/T C75-S/T C85K-S/T C75K-S/T C85K C75K C75R CP96 CP96K C96 C96K C96Y C55 C85R C75 C75W Auto Switch Description Model Action Note Standard type C96S Double acting, Single rod 32 to 100 C96S-W Double acting, Double rod 32 to 100 Standard model no.

Dual Rod Cylinder Series CXSJ/CXS

to 10 st 3 2 V = Up to 100 mm/s V = Up to 300 mm/s CXSM CXSL 0.1 1 Mass m (kg) 0.05 0.5 32 Mass m (kg) 25 CXSM6 CXSL6 0.1 0 0.01 20 20 40 60 80 100 0.05 Overhang l (mm) 15 Graph (8) Up to 30 st 10 0 0.01 V = Up to 100 mm/s V = Up to 300 mm/s 20 40 60 80 100 0.05 Overhang l (mm) Mass m (kg) Graph (11) V = Over 400 mm/s; Up to 10 st 2 CXSM CXSL 1 CXSL6 CXSM6 0.5 0 0.01 20 40 60 80 100 32 Overhang

Air Cylinder

N Rubber bumper 100 CG1 25 B S Z N CDG1 With auto switch M9BW 100 B 25 N S Z With auto switch (Built-in magnet) Number of auto switches Rod end thread Mounting Nil Male rod end F Female rod end Nil 2 pcs. S 1 pc. n n pcs.

Integrated Controller

Reference value for settling time: 0.15 s or less The following value is used for this calculation. T4 = 0.15 [s] Calculation example) T1 to T4 can be calculated as follows. T1 = V/a1 = 100/5000 = 0.02 [s], T3 = V/a2 = 100/5000 = 0.02 [s] T2 = = = 1.98 [s] L 0.5 V (T1 + T3) V 200 0.5 100 (0.02 + 0.02) 100 T4 = 0.15 [s] The cycle time can be found as follows.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Output Black lead wire 100 200/230 MSD013P1E MSM012P1A 100/115 MR-C10A1 Mitsubishi Electric Corporation HC-PQ13 100 200/230 MR-C10A 100/115 SGDE-01BP 100 SGME-01BF12 Yaskawa Electric Corporation Blue lead wire 200/230 SGDE-01AP SGME-01AF12 H S For motor mounting dimensions, refer to the dimensions for series LJ1 20 on page 143 as a reference for mounting and design.

Series KV2 Fittings

Green Gray Tan S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S Color Indication Color S S S Color Black Red Green Blue White Yellow Orange Natural Silver Purple Brown Dk.

High Vacuum Angle Valve

to space saving With restriction on exhaust direction (one way only: from valve element side to bellows side) B XL -100/160 Chamber A Model A [mm] B [mm] Weight [kg] Conductance [L/s] XLA-100-X152 108 300 10.6 300 XLA-160-X152 138 315 18.5 800 Vacuum pump Vacuum pump XL -100/160 Variations Leakage [Pam3/s] Flange size Option Model Valve type Operating pressure [Pa(abs)] Internal1 External1

LEC-OM02704CN

PB26) kpps pulse r/min (6) (PB28) 9 14 9 9.6.4 (1) (a) PB06 GD2 4.0 PB07 PG1 100 rad/s PB08 PG2 120 rad/s PB09 VG2 3000 rad/s PB10 VIC 20 ms PB29 GD2B 10.0 PB30 PG2B 84 rad/s PB31 VG2B 4000 rad/s PB32 VICB 50 ms PB26 CDP 0001 (ON/OFF ) PB28 CDT 100 ms PB33 VRF1B Hz PB34 VRF2B Hz (b) (CDP) OFF ON OFF CDP CDT100ms 100 4.0 10.0 4.0 120 84 120 3000 4000 3000

Proposals for Energy Saving

S S Effective area ratio 3.2 : 1 Pressure loss: Small Filter regulator S coupler Coil tube 2 Nozzle 2 Upstream side S: 9 Nozzle side S: 2.8 Effective area (mm) Effective area ratio Nozzle size (mm) Number of nozzles Supply pressure S: S = 3.2 : 1 2 1 0.5MPa 0.35MPa 0.33MPa Regulator pressure Outlet pressure Effect of Energy Saving Improvement 50 to 75% Reduction 50 to 75% Reduction 100%

CM2

x 1.5 9 19.5 17 6 33.5 15 30 11.5 1/8 26 0 0.033 32 45 8 13 12 20 M10 x 1.25 27 15 22 10 5.5 M26 x 1.5 12 19.5 17 6 37.5 15 34.5 14.5 1/8 26 0 0.039 40 50 11 16 14 20 M14 x 1.5 33 15 24 10 7 M32 x 2 12 21 22 8 46.5 21.5 42.5 14.5 1/4 32 Dimensions by Stroke Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Symbol S ZZ Z S ZZ Z S ZZ Z S Z ZZ S Z ZZ Bore size (mm) 20 199 190

2 Phase Stepper Motor/Without Motor Brake Series LXS

Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 9kg Positioning time (sec) Positioning time (sec) 150 100 50 10 1 150 100 50 10 1 Positioning distance (mm) Positioning distance (mm) 10 10 15.1 10.1 5.1 1.1 0.2 15.1 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 50 50 3.1 2.1 1.1 0.3 0.1 3.1 2.1 1.1 0.3 0.1 100 100 1.6 1.1 0.6 0.2 0.1 1.6 1.1 0.6 0.2

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Servo motor Graph of overload protection characteristics LE-T5 T6 Characteristics a T7 T8 T9 Characteristics b The following graphs show overload protection characteristics. 1000 1000 Operating Operating Operating 100 100 Operation time [s] Operation time [s] Servo-lock Servo-lock 10 10 1 1 0.1 0.1 100 200 300 350 0 50 150 250 350 100 200 300 400 0 50 150 250 350 (Note 1, 2) Load ratio [%

IZx-OMT0049

200 150 100 50 0 50 100 150 200 250 150 100 50 0 50 100 150 150 100 50 0 50 100 150 (250) (200) (150) (100) (50) 0 50 100 150 200 250 (650) (550) (450) (350) (250) (150) (50) 50 150 250 350 450 550 650 0 0 mm () mm Installation distance in depth from ionizer to work piece [mm] Installation distance in widthfrom ionizer to work piece [mm] 50 50 100 100 1s 150 150 2s 200 200 0.5s 1s 2s 250

ZP

How to Order B01 H N 40 25 ZPX A18 J Mounting thread Pad diameter (mm) A18 A22 M18 x 1.5 (40 to 80) M22 x 1.5 (100, 125) 40 50 40 50 63 63 Vacuum entry 80 80 100 100 B01 Rc 1 8 125 125 Pad type Buffer stroke (Rotating) H Heavy duty Stroke 40 50 63 80 100 125 50 25 Material 75 N S NBR Silicon rubber 100 Spring Force U Urethane rubber F Fluoro rubber 40 to 80 Pad diameter 100, 125 E EPR 6.9