7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

DOC1020530

Between P3 and P4 is connected by default. 2. Always connect between P+ and D terminals. (Factory-wired) 4. If disabling ALM (Malfunction) output with the parameter, configure up the power supply circuit which switches off the magnetic contactor after detection of alarm occurrence on the upper side. 5. This diagram shows sink I/O interface. 7.

Vacuum Manifold for fieldbus system

ZKJ-OM00201-D Pressure value The pressure value parameter for energy saving function (P2, H2), vacuum confirmation (P1, H1) and release confirmation (P3, H3) can be set. The release pressure varies depending on the supply pressure, piping conditions and the number of ejectors operating simultaneously. Set the release confirmation signal value with care.

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

IC

Step 20 Step 5 P4 Set pressure P3 P2 P1 The deviation is corrected manually (with keys). Time Zero span correction function Deviation of the zero span point of the sensor can be corrected. 10 bit parallel input Keylock function Up to 10 bits of parallel input is possible from PLC. Pressure can be set with 2 10 = 1024 steps.

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

New

(Full span), Self-diagnosis: p5% or less (Full span) Symbol Switch output PNP open collector output: Max. 80 mA Hysteresis: p3% (Full span), Self-diagnosis: p5% or less (Full span) p1% or less (Full span) Linearity Hysteresis Repeatability Sensitivity Temperature characteristics 1% or less (Full span) p1% or less (Full span) p1% or less (Full span) p0.12% or less (Full span)/oC p2% or less

Electric Actuator/Slider Type

LECSS2-T Front view example Main Circuit Power Supply Connector: CNP1 Accessory L1 Terminal name Function Details L2 L3 N() Control Circuit Power Supply Connector: CNP2 Accessory P3 Terminal name Function Details P(+) Regeneration option Connect between P(+) and D. (Connected at time of shipping.) If regeneration option is required for Model Selection, connect to this terminal.

Sensor Resolution: 30 μm, Stroke: 30mm, Actuator Cable Length: 1m, Controller: AN (LATCA, NPN), I/O Cable Length: 1m, Controller Mounting: D (DIN Rail Mounting, DIN Rail not Included)

Sensor Resolution: F (1.25 μm), Stroke: 30mm, Actuator Cable Length: 1m, Controller: AN (LATCA, NPN), I/O Cable Length: 1m, Controller Mounting: D (DIN Rail Mounting, DIN Rail not Included)

Sensor Resolution: 30 μm, Stroke: 30mm, Actuator Cable Length: 5m, Controller: AP (LATCA, PNP), I/O Cable Length: 5m, Controller Mounting: D (DIN Rail Mounting, DIN Rail not Included)

Sensor Resolution: 30 μm, Stroke: 30mm, Actuator Cable Length: 3m, Controller: AP (LATCA, PNP), I/O Cable Length: 3m, Controller Mounting: D (DIN Rail Mounting, DIN Rail not Included)

Sensor Resolution: 30 μm, Stroke: 10mm, Actuator Cable Length: 3m, Controller: AP (LATCA, PNP), I/O Cable Length: 3m, Controller Mounting: D (DIN Rail Mounting, DIN Rail not Included)

Sensor Resolution: 30 μm, Stroke: 20mm, Actuator Cable Length: 3m, Controller: AP (LATCA, PNP), I/O Cable Length: 3m, Controller Mounting: D (DIN Rail Mounting, DIN Rail not Included)

Sensor Resolution: F (1.25 μm), Stroke: 20mm, Actuator Cable Length: 3m, Controller: AP (LATCA, PNP), I/O Cable Length: 3m, Controller Mounting: D (DIN Rail Mounting, DIN Rail not Included)

Sensor Resolution: F (1.25 μm), Stroke: 30mm, Actuator Cable Length: 3m, Controller: AP (LATCA, PNP), I/O Cable Length: 3m, Controller Mounting: D (DIN Rail Mounting, DIN Rail not Included)