F

28 18.5 14.3 10 14 KQV10-U02 14 18.5 20.6 31 18.5 34 28 21 27 10 38 KQV10-U03 14 18.5 20.6 31 18.5 34 28 21 27 12 38 KQV12-U03 17 20.9 25.2 34 20 36.5 30.5 22 39 12 12 KQV12-U04 17 20.9 25.2 34 22.5 39.5 31.5 22 39 Courtesy of Steven Engineering, Inc. !

Air Cylinder Series CA2

30 31 31.5 31.5 30 30 37 71.5 81.5 38.5 38 73 69 81 69 37.5 46.5 34 34 34 34 34 38 34 35 35.5 35.5 34 34 42 76.5 86.5 42 42 78.5 77 86.5 77 43 52 41 41 41 41 41 44 41 41.5 43 43 41 41 49 83.5 93.5 46.5 47 85.5 91 93.5 91 51.5 58.5 49 49.5 49 49.5 49 52.5 49 50 51 51 49.5 49 57.5 92 102 53.5 53.5 94 107 102 107 58.5 66 55.5 57.5 55.5 56.5 56 61 56 58.5 57.5 57.5 56.5 56 68 102.5 112.5 61.5

Air Cylinder Series CM2

CD-S02 CD-S03 20, 25 32, 40 8 19.5 0.9 1.6 24.5 7.6 Type C 8 for axis B 10 29 1.15 1.35 34 9.6 Type C 10 for axis C D d Applicable bore size d H C B D Part no.

Sine Rodless Cylinder Series REA/REB

Note 2) Square nut for body mounting : 4 pieces 28 34 27 Contents Replacement Parts: Seal Kit Bore size (mm) 10 Kit no. DSet of nos. above REAH10-PS 30 , , 32 , 33 , 34 31 28 , 29 , 15 REAH15-PS -X Note) It may be difficult to replace the cushion seal . Seal kit includes a grease pack (10: 5 g and 10 g, 15: 10 g).

Vacuum Pad

ZP2A-TF2 ZP63H ZP80H ZP63HB ZP80HB ZP2A-XF2 ZP63H ZP80H ZP63HB ZP80HB Width across flat 22 (Hexagon) M16 x 1.5 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) Width across flat 22 (Hexagon) 6 6 25 6 6 25 80.5 Rc1/8 59.5 45 28.5 28.5 19 19 8 8 30 30 9.1 9.1 4 x M4 x 0.7 4 x M4 x 0.7 4 4 34 34 50 50 With four M4 bolts With four M4 bolts Applicable pad part no

Vacuum Pad

ZP2A-TF2 ZP63H ZP80H ZP63HB ZP80HB ZP2A-XF2 ZP63H ZP80H ZP63HB ZP80HB Width across flat 22 (Hexagon) M16 x 1.5 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) Width across flat 22 (Hexagon) 6 6 25 6 6 25 80.5 Rc1/8 59.5 45 28.5 28.5 19 19 8 8 30 30 9.1 9.1 4 x M4 x 0.7 4 x M4 x 0.7 4 4 34 34 50 50 With four M4 bolts With four M4 bolts Applicable pad part no

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(M): SYJ7140lMll01 02 01 02 VZS VFS 2-4.3 2-4.3 (Mounting holes) (Mounting holes) VS A B B A 34 27 34 27 B VS7 A A B R2 R1 P R2 R1 P 85.5 [86.8] 81.5 64.3 34 8.5 34 8.5 64.3 (Lead wire length) 300 (Lead wire length) 95.1 300 (P, A, B port) 3-Rc(PT)1/4, 1/8 3-Rc(PT)1/4, 1/8 (P, A, B port) 25.5 41 54 60 71.1 [77.6] 25.5 41 47.6 54 60 [66.5] 11.5 12 20 57.1 20 57.1 11.5 12 (R1, R2 port) 2

Vacuum Pad

ZP2A-TF2 ZP63H ZP80H ZP63HB ZP80HB ZP2A-XF2 ZP63H ZP80H ZP63HB ZP80HB Width across flat 22 (Hexagon) M16 x 1.5 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) Width across flat 22 (Hexagon) 6 6 25 6 6 25 80.5 Rc1/8 59.5 45 28.5 28.5 19 19 8 8 30 30 9.1 9.1 4 x M4 x 0.7 4 x M4 x 0.7 4 4 34 34 50 50 With four M4 bolts With four M4 bolts Applicable pad part no

Vacuum Pad

ZP2A-TF2 ZP63H ZP80H ZP63HB ZP80HB ZP2A-XF2 ZP63H ZP80H ZP63HB ZP80HB Width across flat 22 (Hexagon) M16 x 1.5 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) Width across flat 22 (Hexagon) 6 6 25 6 6 25 80.5 Rc1/8 59.5 45 28.5 28.5 19 19 8 8 30 30 9.1 9.1 4 x M4 x 0.7 4 x M4 x 0.7 4 4 34 34 50 50 With four M4 bolts With four M4 bolts Applicable pad part no

Air Cylinder Series MB

34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2 10 11 14 20 20 27 16 19 24 34 34 42 10 10 14 22 22 25 10 10 14 22 22 25 14 14 20 30 30 32 14 14 20 30 30 32 28 28 40 60 60 64 Y-04MNote 1) 50 12.5 Y-05MNote 1) 64 16.5 Y-08MNote 1) 80 23.5 Y-10MNote 1) 80 23.5 Y-12MNote 2) 119 28.5 Note 1) A pin, cotter pin and a flat washer are equipped as standard.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

235.5 39 240.5 D16 25 30 40 11 7 205.5 5.5 36 16 8 210.5 9.5 7 47 34 235.5 39 240.5 -X Individual -X 30 P 40 18 8 210.5 11 9 47 39 240.5 TN NPT 1/4 TF G 1/4 Nil Rc 1/4 1295 Series CKQ K/CLKQ K G P G P Dimensions G P CLKQ KC50 (CLKQ KD50 Relationship between the mounting surface and a port location is .)

ZP

54.5 55 60 33.5 34 39 12.4 15.6 25 28 10.5 10.5 14 3 25 8 3.5 15 12 ZPT25B 32 34 18.9 37 ZP ZCU AMJ 10, 13, 16 Size 40, 50 Size Bellows Bellows Misc.

Fluoropolymer Piping Equipment

LQ1T3A-TT2-R5 Tube 3/8 3/8 1/4 5 20 15 9 18 17 14 37.6 36.6 36.6 24 23 16.5 3.6 LQ1T4A-TT1-R1 1/2 Tube 3/8 1/2 24 24 21 21 34 38 34 24 28 28 6.3 LQ1T4A-TT1-R7 3/8 Tube 3/8 1/2 20 24 17 21 34 38 34 24 23 28 5.8 LQ1T4A-TT1-R37 1/2 Tube 3/4 1/2 24 24 21 21 39.5 49 39.5 35 28 28 9 LQ1T5A-TT1-R1 3/4 Tube 1/2 3/4 29 29 26 26 41.9 47.5 41.9 28 39 39 9.5 LQ1T5A-TT1

4/5 Port Solenoid Valve

Use manifold specification sheet. 34 Series SYJ5000 Flat Ribbon Cable Manifold Multiple valve wiring is simplified through the use of the flat cable connector.

Electric Actuator

Description Material Note 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 No.

smcmaintenancepartslist

Seal Kit List (16, 17, 34 and 44 are not included in the seal kit. Order them as required with by individual part numbers.) Description Qty. No.

Table of Contents

55 34 S E T OUT1 OUT2 DOWN FOR WATER 34 2-Port size 4-4.5 40 50 (41.5) 73 34 Flow direction 16-11-21 18 Series PF2W Dimensions: Integrated Display Type for Water PF2W711 148 80 79 77 32 9 2 U P FLOW SWITCH SET 70 58 88 46 45 OUT1 OUT2 DOWN 2-Port size 45 4-5.5 36 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

Proposals for Energy Saving

Content 40 50 63 MGZ40R-PS MGZ50R-PS MGZ63R-PS A set of above nos. 29, 34, 35, 36, 37, 38, 39 and 40. Seal kits consist of a set of items 29 and 34 through 40, which can be ordered using the seal kit number for each bore size. 12 &RXUWHV\RI6WHYHQ(QJLQHHULQJ,QF5\DQ:D\6RXWK6DQ)UDQFLVFR&$ *HQHUDO Actuator Series MGF 40, 63, 100 Guide Table Compact type with reduced height.

Magnetically Coupled Rodless Cylinder

64 22 76 34 76 5 35 70 23 82 35 82 5 40.5 99.5 28.5 111.5 40.5 111.5 Mounting patternw B2 A2 D-F9nW, D-F9nWV (mm) Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 Operating range B1 B2 B3 (mm) 10 15 25 5.5 34 64 22 76 34 76 Mounting patterne B3 A3 5 35 70 23 82 35 82 5 40.5 99.5 28.5 111.5 40.5 111.5 These values are given as a guideline including the hysteresis

Compact Cylinder Series CQS

34 40 44 B 27 27 31 34 A 39 39 50 54 B 32 32 41 44 12 16 20 25 6 8 7 12 6 8 10 12 25 29 36 40 7.5 7.5 9 11 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 5.2 6.2 8.2 10.2 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 12.5 12.5 14 16 7 7 10 10 4 4 7 7 0.5 0.5 1 1 5 to 30 5 to 30 5 to 50 5 to 50 Note 1) For basic style 20 and 25 with