Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Note) Other dimensions are the same as the single shaft. l 25 30 40 45 N 15 17 20 25 U 89 105 130 156 L 14 16 19 24 Model G 11 13 15 19 H 27 29 38 44 UU 109 127 155 186 K 5 5 5 5 UU 134 158 192 232 Model H 27 29 38 44 G 11 13 15 19 M 20 22 25 30 N 15 17 20 25 L 14 16 19 24 Model H 36 41 50 60 CRA1BY50 CRA1BY63 CRA1BY80 CRA1BY100 CRA1BX50 CRA1BX63 CRA1BX80 CRA1BX100 CRA1BZ50 CRA1BZ63 CRA1BZ80

KR

VMG 19 12 46.1 46.1 22 1 2 KAH12-U04 24.5 16.5 22 28 Reference dimensions after Uni thread installation.

MGG

100 35 M6 x 1 depth 12 35 20 25 32 40 129 135 29 80 118 6.6 M10 x 1.5 depth 18 40 73 27 5.5 6 8 4 75, 100, 125, 150, 200 11 depth 8 16 19 19 120 40 M8 x 1.25 depth 16 45 149 170 29 100 150 9 50 93 M12 x 1.75 depth 21 34 6.5 9 10 7 75, 100, 125 14 depth 10 16 19 19 120 40 45 M8 x 1.25 depth 16 149 170 29 100 150 9 50 93 M12 x 1.75 depth 21 34 6.5 9 10 7 150, 200, 250 14 depth 10 19 21 22

SX

Note 19 Orange Black 20 Red White Hirose Electric Co., Ltd. Fujitsu Limited Japan Aviation Electronics Industry, Ltd. J.S.T.

ZX

(62) (Mounting hole) 4 18 15.5 Bracket A (Standard accessory) 13-2-19 19 Series ZX Vacuum pad connection V port Ejector exhaust Valve Unit: Type K1 Pilot exhaust PE port Vacuum switch (ZSE2) Vacuum switch (ZSE3) Configuration and combination Ejector unit + Valve unit (K1) + Air supply PV port Adsorption confirmation switch (ZSP1) Filter unit (F) Without switch and filter Circuit diagram

MGP

67.5 71.5 78 83 88 102.5 120 (mm) A Bore size (mm) B FB Over 100mm stroke 30mm stroke or less Over 30mm to 100mm stroke 68 78 93 98.5 117 117.5 56 62 76 82.5 12 16 20 25 55 59 66 66.5 18 18 19 19 2.

Free Mount Cylinder Series CU

(mm) D-A9, D-A9V D-M9, D-M9W D-M9V, D-M9WV Bore size (mm) A B W A B W A B W 20 25 32 18 15 13 (10.5) 22 19 9 22 19 11 20 11 24.5 15 5 24.5 15 7 9 (6.5) 22.5 13.5 26.5 17.5 7.5 26.5 17.5 9.5 11.5 (9) Note 1) Figures in the table above are used as a reference when mounting the auto switches for stroke end detection.

Electric Actuators

BIT 2 5 Program designation Pro-no. bit2 5 <1> BIT 3 18 STP-NO BIT 1 Pro-no. bit3 18 6 BIT 2 Stp-no. bit1 6 19 BIT 3 Stp-no. bit2 19 7 BIT 4 Stp-no. bit3 7 20 The terminal that designates the step to be executed. Used when executing steps (position movement). (Set by the binary system.)

Table of Contents

For details, refer to pages 3-7-19 and 3-7-20.

Vacuum Pad

ZP2A-TF1 ZP40H ZP50H ZP40HB ZP50HB ZP2A-XF1 ZP40H ZP50H ZP40HB ZP50HB M14 x 1 M14 x 1 Width across flat 19 (Hexagon) Width across flat 19 (Hexagon) Rc1/8 Width across flat 19 (Hexagon) Width across flat 19 (Hexagon) 5 5 21 5 5 21 59.5 3 x M3 x 0.5 47.5 3 x M3 x 0.5 32 21.5 21.5 7 7 30 30 7.3 14.5 14.5 7.3 30 18 2 2 M5 x 0.8 18 30 With three M3 bolts With three M3 bolts Applicable pad part

Vacuum Pad

ZP2A-TF1 ZP40H ZP50H ZP40HB ZP50HB ZP2A-XF1 ZP40H ZP50H ZP40HB ZP50HB M14 x 1 M14 x 1 Width across flat 19 (Hexagon) Width across flat 19 (Hexagon) Rc1/8 Width across flat 19 (Hexagon) Width across flat 19 (Hexagon) 5 5 21 5 5 21 59.5 3 x M3 x 0.5 47.5 3 x M3 x 0.5 32 21.5 21.5 7 7 30 30 7.3 14.5 14.5 7.3 30 18 2 2 M5 x 0.8 18 30 With three M3 bolts With three M3 bolts Applicable pad part

Vacuum Pad

ZP2A-TF1 ZP40H ZP50H ZP40HB ZP50HB ZP2A-XF1 ZP40H ZP50H ZP40HB ZP50HB M14 x 1 M14 x 1 Width across flat 19 (Hexagon) Width across flat 19 (Hexagon) Rc1/8 Width across flat 19 (Hexagon) Width across flat 19 (Hexagon) 5 5 21 5 5 21 59.5 3 x M3 x 0.5 47.5 3 x M3 x 0.5 32 21.5 21.5 7 7 30 30 7.3 14.5 14.5 7.3 30 18 2 2 M5 x 0.8 18 30 With three M3 bolts With three M3 bolts Applicable pad part

Vacuum Pad

ZP2A-TF1 ZP40H ZP50H ZP40HB ZP50HB ZP2A-XF1 ZP40H ZP50H ZP40HB ZP50HB M14 x 1 M14 x 1 Width across flat 19 (Hexagon) Width across flat 19 (Hexagon) Rc1/8 Width across flat 19 (Hexagon) Width across flat 19 (Hexagon) 5 5 21 5 5 21 59.5 3 x M3 x 0.5 47.5 3 x M3 x 0.5 32 21.5 21.5 7 7 30 30 7.3 14.5 14.5 7.3 30 18 2 2 M5 x 0.8 18 30 With three M3 bolts With three M3 bolts Applicable pad part

SV

L Dimension n: Stations L n 2 123 112.5 90.5 19.5 63 3 135.5 125 101 20.5 73.5 4 148 137.5 111.5 21.5 84 5 160.5 150 122 22.5 94.5 6 173 162.5 132.5 23.5 105 7 173 162.5 143 18 115.5 8 185.5 175 153.5 19 126 9 198 187.5 164 20 136.5 10 210.5 200 174.5 21 147 11 223 212.5 185 22 157.5 12 235.5 225 195.5 23 168 13 235.5 225 206 18 178.9 14 248 237.5 216.5 19 189 15 260.5 250 227 20 199.5 16

Vacuum Module Series ZX

RESET button 3.6(Mounting hole) SET button 18.7 19 10 1 22.6 ZMA 2 x R1.8 3.6 2 x R1.8 (Mounting hole) (Mounting hole) (Mounting hole) 17.8 1 10 ZQ 19 Pilot valve for supply Release valve ZH Adsorption confirmation switch ZU Release flow rate 2 x 3.3 (Mounting hole) Interface plate adjusting needle A Vacuum port (V) ZL A Vacuum port (V) M5 (or M6) ZY Pitch = 10 M2.5 x 63 Philips screw Air

MXQ

19 19 19 27 47 47 47 47 57 36 66 84 75 84 75 75 Note) Use the average speed when calculating static moment.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

override 14 L2 4 x 4.5 (For mounting) 32.5 19 85.9 [88.1] 85.1 [87.3] 107.4 [111.8] 62.9 (DIN: 64.2) R P R B B B B B 63.7 (DIN: 65) R P R 18.5 18 59.9 (4.9) 19 21.9 31.4 A A A A A (DIN: 15.2) 1/4 (P, R port) 13.9 (Pitch) P = 19 29 (Station n) (Station 1) (Light/surge voltage suppressor) + + + 74 [81] A 58.6 A 42 8.5 29.5 B B 8 (Pitch) P = 19 25 One-touch fitting (A, B port) Applicable tubing

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Non-locking) 55.5 [62] 43.1 36.5 25.5 49 A A 19 9.5 21 (Pitch) n-Rc (PT)1/8 P=17 21 (A port) A A 19 9.5 18.5 (Pitch) n-M5 X 0.8 P=16 16 (A port) [ ] for AC Other dimensions are the same as the M5.

VQC

For example, changing from F Kit (D-sub connector) to S Kit (serial transmission) is achieved by simply changing the kit piece. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring (Refer to the connector wiring diagram) Printed circuit board patterns between connectors are shifted at every station

4/5 Port Air Operated Valve Series SYJA3000

) Manual override L1 14 L2 4-4.5 (For mounting) 32.5 SV 19 85.9 [88.1] 85.1 [87.3] 107.4 [111.8] 62.9 (DIN 64.2) SZ R P R 63.7 (DIN 65) B B B B B R P R 18.5 18 59.9 (4.9) 19 21.9 31.4 SY A A A A A (DIN: 15.2) SYJ 1/4 (P, R port) 13.9 SX (Pitch) P = 19 29 (Station n) (Station 1) (Light/Surge voltage suppressor) + + + 74 [81] 58.6 A A 42 29.5 8.5 B B 8 (Pitch) P = 19 25 One-touch fitting (A