Vacuum Pad

J P. 13 Bellows (pad) MB P. 14 ZJ P. 16 D Deep AN Nozzle pad P. 9 MT Flat pad P. 11 3.5 x 7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 W P. 17 Oval pad 3.5 x 7 2 x 4 4 x 10 U H P. 33 HT P. 33 Heavy-duty pad HB P. 35 HW P. 36 U P. 27 Mark-free pad H P. 28 Related pad S Sponge pad P. 30 Resin attachment K P. 29 Pad with ball spline buffer U P. 24 H P. 37

ZP

) 47 (34) 43 (36) ZPY40 49 (35) 50 (37) 49 (35) 44 (38) 46 (38) ZPY50 ( ): Figures for female thread connections.

ZP

) 47 (34) 43 (36) ZPY40 49 (35) 50 (37) 49 (35) 44 (38) 46 (38) ZPY50 ( ): Figures for female thread connections.

1.1

air inlet Eye bolt M12 (1300) (51) Ventilation air inlet Automatic water supply port Rc 1/2 Display panel Circulating fluid outlet Rc 3/4 Circulating fluid return port Rc 3/4 Ventilation hole By-pass valve (19) (582) (83) (30) (85) (507) (500) (37) (918) (440) Handle Fluid level gauge (4 x 37) Power cable entry (Grommet with membrane) 4 x 13 (For anchor bolt) With casters (-A) (Option) Caster

Electric Actuator

LJ1H30 53 lb (24.0 kg) Weight reduced by approx. 37% 33.5 lb (15.2 kg) 37% LEJS63 Stroke: 600 mm #Workpiece does not interfere with the motor Table height > Motor height Equipped with seal bands as standard Workpiece Covers the guide, ball screw and belt. Prevents grease from splashing and external foreign matter from entering.

Vacuum Pad

J P. 13 Bellows (pad) MB P. 14 ZJ P. 16 D Deep AN Nozzle pad P. 9 MT Flat pad P. 11 3.5 x 7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 W P. 17 Oval pad 3.5 x 7 2 x 4 4 x 10 U H P. 33 HT P. 33 Heavy-duty pad HB P. 35 HW P. 36 U P. 27 Mark-free pad H P. 28 Related pad S Sponge pad P. 30 Resin attachment K P. 29 Pad with ball spline buffer U P. 24 H P. 37

Vacuum Pad

J P. 13 Bellows (pad) MB P. 14 ZJ P. 16 D Deep AN Nozzle pad P. 9 MT Flat pad P. 11 3.5 x 7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 W P. 17 Oval pad 3.5 x 7 2 x 4 4 x 10 U H P. 33 HT P. 33 Heavy-duty pad HB P. 35 HW P. 36 U P. 27 Mark-free pad H P. 28 Related pad S Sponge pad P. 30 Resin attachment K P. 29 Pad with ball spline buffer U P. 24 H P. 37

LEC-OM02904

PB27 CDL 10 PB28 CDT 1 ms PB29 GD2B 7.0 PB30 PG2B 37 rad/s PB31 VG2B 823 rad/s PB32 VICB 33.7 ms PB33 VRF1B 100.0 Hz PB34 VRF2B 100.0 Hz 5 12 5 No.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

SIGNALS AND WIRING 31 to 3-36 3.1 Input power supply circuit . 34 3.2 I/O signal connection example . 37 3.2.1 For sink I/O interface . 37 3.2.2 For source I/O interface . 39 3.3 Explanation of power supply system . 3-10 3.3.1 Signal explanations . 3-10 3.3.2 Power-on sequence . 3-11 3.3.3 Wiring CNP1, CNP2, and CNP3 . 3-12 3.4 Connectors and pin assignment . 3-14 3.5 Signal (device) explanations

Stainless Steel One-touch Fittings Series KG

28 38 31 35.5 33 37 17 12 20.9 17 28.5 22 50.2 39.7 1 2 3 8 1 2 KGL12-04 KGL16-03 KGL16-04 65 22 37 39.5 71 (71) 101 100 (84) 105 26.5 21 33 24 38 44.5 41 46 16 22 Reference dimensions after R(PT) thread installation.

Series KG Stainless Steel One-touch Fittings

28 38 31 35.5 33 37 17 12 20.9 17 28.5 22 50.2 39.7 1 2 3 8 1 2 KGL12-04 KGL16-03 KGL16-04 65 22 37 39.5 71 (71) 101 100 (84) 105 26.5 21 33 24 38 44.5 41 46 16 22 Reference dimensions after R(PT) thread installation.

High Purity Chemical Valve

26 37 Rc 1/4, 3/8, NPT 1/4, 3/8 M6 x 1 46 60 99 16 20.5 138 142 47.5 33.5 50 Rc 3/8, 1/2, NPT 3/8, 1/2 M8 x 1.25 30 36 55 44 11 10 75.5 77 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 80 56 15 19 109.5 111.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8 PPS 46 60 99.5 68 22 20.5 138.5 142.5 8 42 57 5.5 50 Rc 1/2, NPT 1/2 30 36 58.5 44 14.5 10 79 80.5 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 84 56 19 19 113.5

Tie-rod Type Hydraulic Cylinder

W W D E d M a MA Q C A K F NA NB B H S + Stroke M ZZ + Stroke With rod boot e 10 l f h + l ZZ + l + Stroke (mm) Bore size (mm) A a d B C F G GA GB K M MA NA NB R S Q V W T P J MM E D 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 40 17 45 23 10 60 17.5 M8 x 1.25 18 M14 x 1.5 7.5 8 44 18 9.5 13 11 25 20 1/4 14 30 22 37 106 5

Cylinder with Lock

Note 32 Tie-rod Carbon steel 4 Zinc chromated 33 Tie-rod nut Rolled steel 8 Zinc chromated 34 Flat washer Steel 8 80, 100 35 Bumper A Urethane 1 36 Bumper B Urethane 1 37 Wear ring B Resin 1 38 Rod end nut Carbon steel 1 Zinc chromated 39 Magnet (1) 40 Rod seal B NBR 1 41 Piston seal B NBR 1 42 Cushion seal A Urethane 1 43 Cushion seal B Urethane 1 44 Cushion valve seal NBR 2 45 Cylinder

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

45 45 ZCUK 4 x M4 x 0.7 4 x M4 x 0.7 E 10 10 AMJ G Width across flats 37 F F E AMV Y Y AEP 8 8 34 34 HEP C C A A Related B D B D Equipment Dimensions A Dimensions A B C D E F G Y Model B C D E F G Y Model ZPT63HB-A16 ZPT63HB-B 8 63 65 46 68 31.5 43 73 21.5 M8 x 1.25 ZPT80HB-A16 -B10 80 83 58 85 37 48.5 78.5 27.5 M10 x 1.5 63 65 46 68 31.5 43 21.5 -B12 M12 x 1.75 -B16 M16 x 1.5 ZPT80HB-B

MB

The part number XC3AA does not exist with regard to the port and cushion valve positions, because this is the standard specification. 32 40 50 63 80 100 139 146 166 166 192 208 7.2 9.7 10.5 12 14 15 M14 x 1.5 M18 x 1.5 M22 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 6 7 10 10 10 16 51 58 68 68 74 90 16 20 25 25 30 36 30 35 40 40 40 50 27 32 37 37 37 47 With Heavy Duty Scraper -XC4 Heat Resistant

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

For details about the follwing auto switches (D-B76/B73/B73C/G79/K79/K79C/B80/B80C), please inquire of us. 8-21-37

VQ7-6/7-8

O-ring NBR 2 AXT512-13 O-ring NBR 1 AS568-022 O-ring NBR 2 AS568-020 Gasket NBR 1 AXT512-5 Plate SPCC 1 AXT512-4 Oval countersunk head screw SWRH3 2 M4X10 Connection fitting A 2 AXT512-6-1 Connection fitting B 2 AXT512-6-4 Hexagon socket head screw 2 AXT512-6-3 3-10-37

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

Body Shim B Retaining ring 1 18 35 Tool steel Aluminum alloy Stainless steel t = 0.5 mm Guide pin Cylinder tube Magnet 2 19 36 Stainless steel Aluminum alloy Clamp arm Lock body Wear ring 3 20 37 Resin Aluminum alloy Structural steel Seat Intermediate collar Rod seal A 4 21 38 NBR Aluminum alloy Stainless steel Guide tube Lock ring Rod seal B 5 22 39 NBR Structural steel Tool steel Ring

ZPT/ZPX

Hexagon width across flats 24 25 G Width across flats 37 45 45 4-M4 x 0.7 4-M4 x 0.7 E 10 10 G Width across flats 37 F F E Y Y 8 8 34 34 C C A A B D B D Dimensions Dimensions (mm) (mm) Model Model B A B C D E F G Y A C D E F G Y ZPT63HB-A16 ZPT63HB-B8 63 65.1 45.5 67.6 31.5 43 73 21.5 M8 x 1.25 ZPT80HB-A16 -B10 80 83 58.4 85.1 37 48.5 78.5 27.5 M10 x 1.5 63 65.1 45.5 67.6 31.5 43 21.5 -B12