Vacuum System Peripherals: R L B 01 1 Nil F G Rc 1 8 ... ...
Note) Symbol EA and EB correspond to R1 and R2 respectively (R1=EA, R2=EB) 1.19-18 VS7-8 Interface Speed Control/Dimensions AXT510-32A Interface Speed Control SV SY SYJ Symbol SX VK Interface Regulator/Dimensions VZ P port regulation/ARB350-00-P Interface Regulator VF VFR VP7 VQC SQ VQ VQ4 Symbol VQ5 A port regulation/ARB350-00-A B port regulation/ARB350-00-B VQZ VQD P port regulation VFS
Chapter 4 Rotary axis setting switch (SW1) SW1 Used to set the axis No. of servo amplifier. 8 driver. 7 9 Section 3.13 A 6 B 5 8 C 7 4 9 A 6 D 3 B 5 C E 4 2 D 3 F 1 E 2 F 1 0 0 SW1 ON 4F Test operation select switch (SW2-1) TEST SW2 Used to perform the test operation mode by using MR Configurator. SW2 1 2 MR Configurator2TM.
44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!
44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!
M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .
14 X129 (X130) ZSE1 00 15 X129 (X130) ZSE1 00 16 X129 (X130) ZSE1 00 17 X129 (X130) ZSE1 00 18 X129 (X130) ZSE1 00 19 X129 (X130) ZSE1 00 55 X129 (X130) Model Sensor type Diffusion type semiconductor pressure sensor Set pressure range 0 to 101 kPa Hysteresis 1 to 10% of set pressure (Adjustable) 1 to 10% of set pressure (Adjustable) 3% full span or less (Fixed) 1% full span or less Repeatability
00-B-1 P ARBQ5000-00-P-1 ARBQ5000-00-P (P B) A ARBQ5000-00-A-5 0.7 0.6 VQ55 (Plug lead type) B ARBQ5000-00-B-5 Outlet pressure (MPa) 0.5 P ARBQ5000-00-P-5 0.4 0.3 Dimensions 0.2 0.1 00 2500 2000 1500 1000 500 3000 Flow rate (l/min (ANR)) SMC Pressure Characteristics 64 181 Conditions Inlet pressure: 0.7 MPa Outlet pressure: 0.2 MPa Flow rate: 20 l/min(ANR) 2 B SMC 68.5 D P 1 X 12 5 R1 3
Contact P/A regarding the specifications for PSI unit and F .
Model: T (Male Branch Tee), Applicable Tube O.D.: 08 (ø8), Port Size for Tubing O.D,: G02 (G1/4)
Model: T (Male Branch Tee), Applicable Tube O.D.: 08 (ø8), Port Size for Tubing O.D,: G03 (G3/8)
Model: T (Male Branch Tee), Applicable Tube O.D.: 08 (ø8), Port Size for Tubing O.D,: G01 (G1/8)
Model: T (Male Branch Tee, Union Tee, Different Dia. Tee), Applicable Tube O.D.: 08 (ø8), Port Size/Applicable Tube: 10 (ø10 Tube)
Model: Male Branch Tee, Applicable Tube O.D.: ø8, Port Size for Tubing O.D,: G1/4
Model: Male Branch Tee, Applicable Tube O.D.: ø8, Port Size for Tubing O.D,: G3/8
Model: Male Branch Tee, Applicable Tube O.D.: ø8, Port Size for Tubing O.D,: G1/8
Model: Male Branch Tee, Union Tee, Different Dia. Tee, Applicable Tube O.D.: ø8, Port Size/Applicable Tube: ø10 Tube
G1, Symbol N: NPT1) Tank port size Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) Supply side pressure range MPa 0.2 to 0.5 Automatic water fill function (Standard) Supply side water temp. range oC 5 to 35 Automatic water fill port size Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Over flow port size Rc1 (Symbol F: G1, Symbol N: NPT1) Metal Stainless steel, Copper (Brazing filler metal for the heat
DttEl{StOlts DIMENSIONS A I c D E F o H 1,1f a r.36 (34.5) 0.874 @.4 1.10 t?f .c, 0.51 02.9t 0./(!3 fl0.91 o.12 (10.7) 0.31 a.s, Mlmelers In Pargnlheseg A I c D E F o H 1.75 (44.4) 1.25 (31.7t 0.gi e5.3) 1.11 {28.9) 0.75 (1s.1)0.6t1 (16.
DttEl{StOlts DIMENSIONS A I c D E F o H 1,1f a r.36 (34.5) 0.874 @.4 1.10 t?f .c, 0.51 02.9t 0./(!3 fl0.91 o.12 (10.7) 0.31 a.s, Mlmelers In Pargnlheseg A I c D E F o H 1.75 (44.4) 1.25 (31.7t 0.gi e5.3) 1.11 {28.9) 0.75 (1s.1)0.6t1 (16.