AR20-B to AR60-B

(MPa) 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure (MPa) 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure (MPa) AR50(K)-B AR60(K)-B 0.25 0.25 Outlet pressure (MPa) Outlet pressure (MPa) Set point Set point 0.2 0.2 0.15 0.15 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure (MPa) 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure (MPa) 69 Regulator Series AR10-A Regulator Series

VZS

Body type Plug-in type ARBZS3000-00-P-1 Non plug-in type ARBZS3000-00-P-2 Part no. Note) Apply pressure from the P port of the base to operate the interface regulator. To use concurrently with a double check spacer, assemble in the following order: the valve, the interface regulator, and the double check spacer.

VQ7-6/7-8

P reduced pressure A B A B ARB250-00-P A reduced pressure ARB250-00-A B reduced pressure ARB250-00-B 3-10-17 Series VQ7-6 Control Unit Control equipment (filters, regulators, pressure switches, air release valves) has been made into standardized units which can be mounted on manifolds without any modifications.

VQ7-6/7-8

P reduced pressure A B A B ARB250-00-P A reduced pressure ARB250-00-A B reduced pressure ARB250-00-B 3-10-17 18 Series VQ7-6 Control Unit Control equipment (filters, regulators, pressure switches, air release valves) has been made into standardized units which can be mounted on manifolds without any modifications.

VVXA21/22

5"5 VVXA211-stations VVXA212-stations VVXA221-stations VVXA222-stations 7 %1 % = > = > 3 1 VXA21 -00 . ; < Construction/ Principal Parts Material 3 1 VXA22 -00 ; Common SUP type Solenoid Valve for Manifold " 5 '* #5 5 # I ,+!J ! #5 " 0"8 1 E F 4 " 4 % " 4 4 4 4 7 %1 % 3 VXA212-00 VXA213-00 VXA223-00 VXA224-00 = < .G < < * 4.5 . >< * < * 6 < * $ /H"3 % .

LEF-OM006xx

* 48mm T T LECP1 PNP PNP 1P * 1P * NPN NPN AN * AN * LECA6 LECA6 PNP PNP 3 00 mm 300 300 AP * AP * 2000 2000 2000 mm B 8m 8 8 B 10m 1.5 m 1 1 A A 15m m 3m 3 3m 3 B B 20m 5 5m 5 C C 5m 3 00 3 00 500 500 600 600 7 00 7 00 800 800 900 900 1000 1000 1 2 00 1 2 00 1500 1500 1800 1800 2000 2000 LEFB16 LEFB16 LEFB25 LEFB25 () R R LEFB32 LEFB32 S S / P.38 5.3 <> NPNPNP LEFS16A-100

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

VS7-6

Note) Symbol EA and EB correspond to R1 and R2 respectively (R1=EA, R2=EB) 1.19-18 VS7-8 Interface Speed Control/Dimensions AXT510-32A Interface Speed Control SV SY SYJ Symbol SX VK Interface Regulator/Dimensions VZ P port regulation/ARB350-00-P Interface Regulator VF VFR VP7 VQC SQ VQ VQ4 Symbol VQ5 A port regulation/ARB350-00-A B port regulation/ARB350-00-B VQZ VQD P port regulation VFS

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Chapter 4 Rotary axis setting switch (SW1) SW1 Used to set the axis No. of servo amplifier. 8 driver. 7 9 Section 3.13 A 6 B 5 8 C 7 4 9 A 6 D 3 B 5 C E 4 2 D 3 F 1 E 2 F 1 0 0 SW1 ON 4F Test operation select switch (SW2-1) TEST SW2 Used to perform the test operation mode by using MR Configurator. SW2 1 2 MR Configurator2TM.

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

Ejector Valve Unit Series ZYY/ZYX

14 X129 (X130) ZSE1 00 15 X129 (X130) ZSE1 00 16 X129 (X130) ZSE1 00 17 X129 (X130) ZSE1 00 18 X129 (X130) ZSE1 00 19 X129 (X130) ZSE1 00 55 X129 (X130) Model Sensor type Diffusion type semiconductor pressure sensor Set pressure range 0 to 101 kPa Hysteresis 1 to 10% of set pressure (Adjustable) 1 to 10% of set pressure (Adjustable) 3% full span or less (Fixed) 1% full span or less Repeatability

Plug-in/Plug Lead: Single Unit

00-B-1 P ARBQ5000-00-P-1 ARBQ5000-00-P (P B) A ARBQ5000-00-A-5 0.7 0.6 VQ55 (Plug lead type) B ARBQ5000-00-B-5 Outlet pressure (MPa) 0.5 P ARBQ5000-00-P-5 0.4 0.3 Dimensions 0.2 0.1 00 2500 2000 1500 1000 500 3000 Flow rate (l/min (ANR)) SMC Pressure Characteristics 64 181 Conditions Inlet pressure: 0.7 MPa Outlet pressure: 0.2 MPa Flow rate: 20 l/min(ANR) 2 B SMC 68.5 D P 1 X 12 5 R1 3

Modular Type Filter Regulator Series AW

Contact P/A regarding the specifications for PSI unit and F .

HRX-OM-Q026

G1, Symbol N: NPT1) Tank port size Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) Supply side pressure range MPa 0.2 to 0.5 Automatic water fill function (Standard) Supply side water temp. range oC 5 to 35 Automatic water fill port size Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Over flow port size Rc1 (Symbol F: G1, Symbol N: NPT1) Metal Stainless steel, Copper (Brazing filler metal for the heat

Air Pilot Operated

DttEl{StOlts DIMENSIONS A I c D E F o H 1,1f a r.36 (34.5) 0.874 @.4 1.10 t?f .c, 0.51 02.9t 0./(!3 fl0.91 o.12 (10.7) 0.31 a.s, Mlmelers In Pargnlheseg A I c D E F o H 1.75 (44.4) 1.25 (31.7t 0.gi e5.3) 1.11 {28.9) 0.75 (1s.1)0.6t1 (16.

Air Pilot Operated Series NVSA

DttEl{StOlts DIMENSIONS A I c D E F o H 1,1f a r.36 (34.5) 0.874 @.4 1.10 t?f .c, 0.51 02.9t 0./(!3 fl0.91 o.12 (10.7) 0.31 a.s, Mlmelers In Pargnlheseg A I c D E F o H 1.75 (44.4) 1.25 (31.7t 0.gi e5.3) 1.11 {28.9) 0.75 (1s.1)0.6t1 (16.

Electric Actuator/Slider Type

Rubber back of the belt is softened and sticky f.

KQ2

Applicable model Applicable thread Material Gasket M-10/32G 10-32 UNF Stainless steel 304, NBR KQ2E01-00, KQ2E03-00, KQ2E01-35 KQ2E03-35, KQ2LF01-00, KQ2LE03-00 KQ01-P01 KQ2E05-00, KQ2E07-00, KQ2E05-34 KQ2E07-35, KQ2LF05-00, KQ2LE07-00 KQ05-P01 Pipe nut KQ09-P01 KQ2E09-00, KQ2E09-36, KQ2LE09-00 KQ11-P01 KQ2E11-00, KQ2E11-36, KQ2LE11-00 KQ2E13-00, KQ2E13-36 KQ2E13-37, KQ2LE13-00 KQ13