Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

VS7-6

Note) Symbol EA and EB correspond to R1 and R2 respectively (R1=EA, R2=EB) 1.19-18 VS7-8 Interface Speed Control/Dimensions AXT510-32A Interface Speed Control SV SY SYJ Symbol SX VK Interface Regulator/Dimensions VZ P port regulation/ARB350-00-P Interface Regulator VF VFR VP7 VQC SQ VQ VQ4 Symbol VQ5 A port regulation/ARB350-00-A B port regulation/ARB350-00-B VQZ VQD P port regulation VFS

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Chapter 4 Rotary axis setting switch (SW1) SW1 Used to set the axis No. of servo amplifier. 8 driver. 7 9 Section 3.13 A 6 B 5 8 C 7 4 9 A 6 D 3 B 5 C E 4 2 D 3 F 1 E 2 F 1 0 0 SW1 ON 4F Test operation select switch (SW2-1) TEST SW2 Used to perform the test operation mode by using MR Configurator. SW2 1 2 MR Configurator2TM.

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

Ejector Valve Unit Series ZYY/ZYX

14 X129 (X130) ZSE1 00 15 X129 (X130) ZSE1 00 16 X129 (X130) ZSE1 00 17 X129 (X130) ZSE1 00 18 X129 (X130) ZSE1 00 19 X129 (X130) ZSE1 00 55 X129 (X130) Model Sensor type Diffusion type semiconductor pressure sensor Set pressure range 0 to 101 kPa Hysteresis 1 to 10% of set pressure (Adjustable) 1 to 10% of set pressure (Adjustable) 3% full span or less (Fixed) 1% full span or less Repeatability

Plug-in/Plug Lead: Single Unit

00-B-1 P ARBQ5000-00-P-1 ARBQ5000-00-P (P B) A ARBQ5000-00-A-5 0.7 0.6 VQ55 (Plug lead type) B ARBQ5000-00-B-5 Outlet pressure (MPa) 0.5 P ARBQ5000-00-P-5 0.4 0.3 Dimensions 0.2 0.1 00 2500 2000 1500 1000 500 3000 Flow rate (l/min (ANR)) SMC Pressure Characteristics 64 181 Conditions Inlet pressure: 0.7 MPa Outlet pressure: 0.2 MPa Flow rate: 20 l/min(ANR) 2 B SMC 68.5 D P 1 X 12 5 R1 3

Modular Type Filter Regulator Series AW

Contact P/A regarding the specifications for PSI unit and F .

HRX-OM-Q026

G1, Symbol N: NPT1) Tank port size Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) Supply side pressure range MPa 0.2 to 0.5 Automatic water fill function (Standard) Supply side water temp. range oC 5 to 35 Automatic water fill port size Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Over flow port size Rc1 (Symbol F: G1, Symbol N: NPT1) Metal Stainless steel, Copper (Brazing filler metal for the heat

Air Pilot Operated

DttEl{StOlts DIMENSIONS A I c D E F o H 1,1f a r.36 (34.5) 0.874 @.4 1.10 t?f .c, 0.51 02.9t 0./(!3 fl0.91 o.12 (10.7) 0.31 a.s, Mlmelers In Pargnlheseg A I c D E F o H 1.75 (44.4) 1.25 (31.7t 0.gi e5.3) 1.11 {28.9) 0.75 (1s.1)0.6t1 (16.

Air Pilot Operated Series NVSA

DttEl{StOlts DIMENSIONS A I c D E F o H 1,1f a r.36 (34.5) 0.874 @.4 1.10 t?f .c, 0.51 02.9t 0./(!3 fl0.91 o.12 (10.7) 0.31 a.s, Mlmelers In Pargnlheseg A I c D E F o H 1.75 (44.4) 1.25 (31.7t 0.gi e5.3) 1.11 {28.9) 0.75 (1s.1)0.6t1 (16.

Electric Actuator/Slider Type

Rubber back of the belt is softened and sticky f.

KQ2

Applicable model Applicable thread Material Gasket M-10/32G 10-32 UNF Stainless steel 304, NBR KQ2E01-00, KQ2E03-00, KQ2E01-35 KQ2E03-35, KQ2LF01-00, KQ2LE03-00 KQ01-P01 KQ2E05-00, KQ2E07-00, KQ2E05-34 KQ2E07-35, KQ2LF05-00, KQ2LE07-00 KQ05-P01 Pipe nut KQ09-P01 KQ2E09-00, KQ2E09-36, KQ2LE09-00 KQ11-P01 KQ2E11-00, KQ2E11-36, KQ2LE11-00 KQ2E13-00, KQ2E13-36 KQ2E13-37, KQ2LE13-00 KQ13

CV/MVGQ

REC Bore size Cushion 40 50 63 80 100 CX 40 mm 50 mm 63 mm 80 mm 100 mm Nil N F Lube type Non-lube type Steel tube Solenoid valve CY 2 position single (VS4124-00-X46) 2 position double (VS4224-00) 3 position closed center (VS4324-00) 3 position exhaust center (VS4424-00) Nil W Y Z Note) Auto switches are not available with steel tube.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

1.6 (PE port) 1/8 (P, R1, R2 port) B A 17 One-touch fitting (A, B port) (4.9) 36 Applicable tubing O.D.: 6, 1/4" : 8, 5/16" (3.6) L plug connector (L): SYJ7120-L-01 (-F) M plug connector (M): SYJ7120-M-01 (-F) M8 connector (W0): SYJ7120-W0-01 (-F) DIN terminal (D): SYJ7120-D-01 (-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 65 31.5 [38.5] 101 Max. 10 57.5 16.1 46.2 31.1

Rubber seal 5 Port Solenoid Valve Series SYJ5000

O.D.: 4, 5/32" : 6, 1/4" (2.3) L plug connector (L): SYJ5120-L-M5(-F) M plug connector (M): SYJ5120-M-M5(-F) DIN terminal (D): SYJ5120-D-M5(-F) M8 connector (W0): SYJ5120-W0-M5(-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 82.1 Max. 10 60.9 28.1 [35.1] 53.4 12.7 42.1 32.6 M8 x 1 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 73 [75.2] (2.3) 63.2 [65.4] 83 72.1 3

KR

8 6 KAT08-00 6 6.8 7.5 23 26.5 28.5 15 25 KAT10-00 12 10 KAT12-00 29 Union Y: KAU Effective area (mm2) Applicable tubing O.D.

VXA31/32

size (mm) Model Max system pressure (MPa) Proof pressure (MPa) Pilot port Weight (g) 0.32 0.25 0.40 0.20 0.25 0.20 0.29 0.60 0.64 0.82 1.10 1.66 0.08 0.16 0.19 0.24 0.33 0.60 1.0 1.9 3.8 4.6 8.0 9.0 12 1.5 VXA3115-00 VXA3125-00 VXA3225-00 1.0 1.5 0.3 0.6 0.3 0.08 0.15 0.17 0.20 0.27 0.38 150 0.5 1.0 2.2 230 150 VXA3135-00 VXA3235-00 VXA3245-00 3 230 4 Note) Add the V type (VXA31) 80 g,

AC Servo Motor Driver (CC-Link Type)

Please select the station 00, if you want to use for the first time.