Modular Type Air Filter Series AF

Port size Port size Body size Body size Port size Port size Bowl Symbol Symbol 30 40 50 60 20 30 40 50 60 Applicable model AF20 to 60 Symbol 2 Note 4) Description 02 03 04 06 10 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 1/4 3/8 1/2 3/4 1 Bowl Metal bowl Applicable model AF30 to 60 Description Symbol Metal bowl with level gauge 8 Note 3) AF30 to 60 2 Note 4) Metal bowl Note 4) Only Metal Bowl

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

M M5 M5 x 0.8 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Thread connection H/DL L/LL KC Applicable tubing O.D. Same dia. tubing 4 6 8 10 12 04 06 08 10 12 4 6 8 10 12 KK Tubing (rod) connection Different dia. tubing (plug-in reducer) KK130 DM Construction KDM KB KR KA KQG2 KG KFG2 MS KKA M5 type Male connector KP KP Description Material Component Parts LQ No.

Series VQ Metal Seal/Rubber Seal Body Ported

Blank plug Dimensions 23 04 06 KQP-X19 A L D Model Fittings size d Color: White 3.2 4 6 16 16 18 3.2 6 8 31.5 32 35 KQP-23-X19 KQP-04-X19 KQP-06-X19 It is inserted into an unused cylinder port and SUP/ EXH ports. The minimum order quantity is 10 pcs.

CA2

socket 17 BA-04 BA-05 BA-06 BA-08 BA-10 80, 100 20JIS B 1181 Class 3 Intermediate M12 x 1.75 19 JIS B4636 + Two-angle socket 19 2.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Elbow Universal 2 3 Metric size Inch size 3.2 23 01 1/8" 04 06 08 10 12 03 05 07 09 11 13 4 5/32" 6 3/16" Control 8 1/4" Meter-out Meter-in 0 1 10 5/16" 12 3/8" Use 1/8" tube. 1/2" M5 Port size With One-touch fitting M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 01 02 03 04 U10/32 N01 N02 N03 N04 Needle Valve/Flow Characteristics AS1201FG, AS1211FG AS2201FG-

Speed Controller with One-touch Fittings

L4 Note) Weight (g) 3 5 5.5 6.5 8.5 9.5 19 22 36 38 42 44 76 82 Model D1 Applicable tubing O.D. d AS1002F-02 AS1002F-23 AS1002F-04 AS1002F-06 AS2002F-04 AS2002F-06 AS2052F-06 AS2052F-08 AS3002F-06 AS3002F-08 AS3002F-10 AS3002F-12 AS4002F-10 AS4002F-12 D2 D3 D4 L1 L2 L3 L5 L6 L7 L8 M1 MIN. 18.4 21 21.7 22.7 25.4 26.5 28.2 29.5 33.6 34.4 36 37.1 44.1 45.1 3.2 5 6 25.4 36 37 39.5 40.7 42.5 53.2

VQZ1000/2000/3000

(A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

SYJ3000/5000/7000

SY100-61-3-05 SY100-61-3-06 SY100-61-2-01 SY100-61-2-02 SY100-61-2-03 SY100-61-2-04 Voltage symbol 24V 12V 100V 200V 110V 220V Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC How to Use DIN Terminal Caution Connection 1. Loosen the holding screw and pull the connector out of the solenoid valve terminal block. 2.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

Fluoropolymer Piping Equipment

tubing size Size 1 2 3 4 5 6 Symbol 03 04 06 08 10 12 19 25 3 x 2 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19 x 16 25 x 22.5 03 05 07 11 13 19 25 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" 1" x 7/8" Basic size With reducer Basic size With reducer Note) For details of the applicable tubing sizes, refer to page 945.

AN

-04 90 1 2 AN500-06 160 3 4 Note) NPT thread is also available.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10 15.5 1.5 1.6 13 23 14 25 36 16 25 37 16 24 36 32 40 65 31 39 64

Table of Contents - Tubing

lines in clean room environments TPH 06 04 B 20 Tube O.D.

Modular Type Regulator Series AR

Symbol 20 25 30 40 50 60 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Name plate and pressure gauge in imperial units (PSI, F) When more than one specification is required, indicate in ascending alphanumeric order.

Quick Exhaust Valve Series AQ 1

-00 Model Tubing O.D. d AQ240F-04-04 6 4 9.3 5 4 9.3 AQ240F-06-00 AQ240F-06-06 13.7 13.7 15.4 6.2 13.7 26.7 40.7 8 10.0 14.7 6 11.6 6 6 11.6 6.2 40.7 AQ340F-06-00 AQ340F-06-06 13.7 19.5 13.7 13.7 6.3 44.8 31.7 13 19.6 11.8 6 11.6 11 6 11.6 6.3 44.8 AQ240F-07-00 AQ240F-07-07 13.7 13.7 15.4 6.2 13.7 27.3 40.7 8 10.0 15.1 6.2 1/4" 12 6 1/4" 12 40.7 AQ340F-07-00 AQ340F-07-07 16.8 20.3 13.7 16.8

Suction Filter with Case FH99 Series

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM, EPDM Model/Rated Flow Rate Model Port size Note 2) INLET OUTLET Rated flow rate (L/min) FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 1B 1/2B 20 1B 3/4B 50 1 1/2B 1B 100 1 1/2B 1 1/4B 150 2B 1 1/2B 200 2B 2B 300 2 1/2B 2 1/2B 450 3B 3B 600 3 1/2B 3 1/2B 750 4B 4B 900 Note 2) Both flange

Stainless Steel One-touch Fittings Series KG

3 8 KGE10-03 3 8 KGE12-03 37 14 92 59 12 M22 1 27 24 23 22 58.3 46.1 1 2 KGE12-04 41 18 3 8 KGE16-03 14 40 127 25 96 113 (96) 16 M28 1.5 32 29 30 1 2 KGE16-04 18 44 132 Note) ( ): Values for soft nylon.

Series KG Stainless Steel One-touch Fittings

3 8 KGE10-03 3 8 KGE12-03 37 14 92 59 12 M22 1 24 27 23 22 58.3 46.1 1 2 KGE12-04 41 18 3 8 KGE16-03 14 40 127 25 96 113 (96) 16 M28 1.5 32 29 30 1 2 KGE16-04 18 44 132 Note) ( ): Values for soft nylon.